Diffusion Morning Report 04/28/11

Ted Berg tberg at stanford.edu
Thu Apr 28 07:26:08 PDT 2011


Good Morning All,
     Looking good this morning. LTO and TEOS are back up after tube 
changes. Epi is failing Etch coat. tylan 4 had door/loader issues. SEM 
4160 is down for tip change. No other major issues at this time.

					
	Date: 	4/28/11 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*yellow* 	*door/loader issues* 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*up* 	** 	*0/30* 	** 	**
Tylan 8-SiGe 	*up* 	** 	*1.94/30* 	** 	**
Tylan 9-Poly 	*up* 	** 	*.77/30* 	** 	**
Tylan 10-Nitride 	*up* 	** 	*11.62/30* 	** 	**
Tylan 11-LTO 	*yellow* 	*users have run* 	*0/30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*yellow* 	*no tlc flow* 	** 	** 	**
Thermco 3 	*future* 	** 	** 	** 	**
Thermco4 	*future* 	** 	** 	** 	**
Thermco Poly1 	*up* 	*
* 	** 	** 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi 	*down* 	*failed geetch coat* 	** 	** 	*1*
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
Ebeam 	*down* 	*cryo compresssor dead* 	** 	** 	**
ZYGO 	*up* 	*
* 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	** 	*A on line 401 PSI* 	*changeover working 
well* 	** 	**


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