From tberg at stanford.edu Mon Aug 1 07:08:41 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 01 Aug 2011 07:08:41 -0700 Subject: Diffusion Morning Report 08/01/11 Message-ID: <4E36B369.60900@stanford.edu> Good Morning All, Looking good this morning. GeH4 for Epi was changed this morning and is in leak check. Tylans 1 and 3 are in Argon per user request and reservation. Tylan LTO has broken Cantilever sheaths.. TEOS pump has a possible water leak. Thermco Nitride has higher dep pressure than previous. Thermco 2 no TLC flow. No other issues at this time. Date: 8/1/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* * in Argon * ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* * inArgon* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *2.7/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *26.87/30* ** ** Tylan 10-Nitride *yellow* *observation* *21.49/30* ** ** Tylan 11-LTO *down* *broken cantilever sheaths* *3.47/30* ** *1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *GeH4 changed in leak check* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* *network disabled* ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 907 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Aug 2 07:33:54 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 02 Aug 2011 07:33:54 -0700 Subject: Diffusion Morning Report 08/02/11 Message-ID: <4E380AD2.6090500@stanford.edu> Good Morning All, Looking good this morning. TEOS pump is down for a broken water hose-ordered. Epi LLA doesn't know that door is open. POCl3 has a broken baffle-replacing. Thermco 2 no TLC flow. Thermco Nitride pressure is higher than previous. Tylan Nitride looking OK after repairs. No other issues at this time. Date: 8/2/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *down* *broken baffle* ** ** ** Tylan 7-TEOS2 *down* *leaking water hose-ordered* *2.7/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *26.87/30* ** ** Tylan 10-Nitride *yellow* *observation* *22.48/30* ** ** Tylan 11-LTO *up* ** *5.56/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* *network disabled* ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 907 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Aug 3 06:15:05 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 03 Aug 2011 06:15:05 -0700 Subject: Diffusion Morning Report 08/03/11 Message-ID: <4E3949D9.60303@stanford.edu> Good Morning All, Looking good this morning. LLa on Epi is still having issues. SiGe had N2 leak. TEOS water hose should be here today. Thermco 2 no TLC flow. Thermco Nitride has higher pressure than previous. No other issues at this time. Date: 8//2011 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *leaking water hose-ordered* *2.7/30* ** ** Tylan 8-SiGe *yellow* *n2 leak* *1.94/30* ** ** Tylan 9-Poly *up* ** *26.87/30* ** ** Tylan 10-Nitride *up* ** *23.95/30* ** ** Tylan 11-LTO *up* ** *6.06/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* *network disabled* ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 907 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Aug 5 06:19:00 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 05 Aug 2011 06:19:00 -0700 Subject: Diffusion Morning Report 08/05/11 Message-ID: <4E3BEDC4.30706@stanford.edu> Good Morning All, Looking good this morning. LLA on Epi still has issues but tool is running fine. Tylan SiGe possible pressure issues. Thermco 2 no TLC flow. Tylan Nitride dep pressure is higher than previous. No other issues at this time. Burn box clean this morning. Date: 8/5/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *2.95/30* ** ** Tylan 8-SiGe *yellow* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *26.87/30* ** ** Tylan 10-Nitride *up* ** *23.95/30* ** ** Tylan 11-LTO *up* ** *6.06/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* *network disabled* ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 907 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Aug 8 07:12:24 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 08 Aug 2011 07:12:24 -0700 Subject: Diffusion Morning report 08/08/11 Message-ID: <4E3FEEC8.3040104@stanford.edu> Good Morning All, looking OK this morning. HCL for Epi was empty upon arrival-Cylinder changed in leak check. Thermco Nitride has boat out issues. Thermco 2 no TLC flow. No other problems this morning. Date: 8/8/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *2.95/30* ** ** Tylan 8-SiGe *yellow* *pressure issues* *1.94/30* ** ** Tylan 9-Poly *up* ** *26.87/30* ** ** Tylan 10-Nitride *up* ** *23.95/30* ** ** Tylan 11-LTO *up* ** *8.59/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *lla issues-HCl cylinder changed-leak check* ** *1* ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* *network disabled* ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 907 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Aug 9 06:52:10 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 09 Aug 2011 06:52:10 -0700 Subject: Diffusion Morning Report 08/09/11 Message-ID: <4E413B8A.90704@stanford.edu> Good Morning All, Looking good this morning. Epi still has LLa issues. Tylan 4 has O2 leak. Sige has pressure issues. Thermco Nitride has higher dep pressure than previous. Thermco 2 has no TLC flow. No other issues at this time. Date: 8/9/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *O2 leak* ** ** *1* Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *2.95/30* ** ** Tylan 8-SiGe *yellow* *pressure issues* *1.94/30* ** ** Tylan 9-Poly *up* ** *26.87/30* ** ** Tylan 10-Nitride *up* ** *23.95/30* ** ** Tylan 11-LTO *up* ** *8.59/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 907 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Aug 10 06:37:17 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 10 Aug 2011 06:37:17 -0700 Subject: Diffusion Morning Report 08/10/11 Message-ID: <4E42898D.40003@stanford.edu> Good Morning All, Looking OK this morning . Epi is down for a blown power supply. Hopefully we will have one today. SiGe is down for a dead Mech pump-looking into it. Thermco Nitride has higher pressure than previous. thermco 2 no TLC flow. No other issues at this time. Date: 8/10/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *2.95/30* ** ** Tylan 8-SiGe *down* *Mech Pump problems* *1.94/30* ** *2* Tylan 9-Poly *up* ** *27.17/30* ** ** Tylan 10-Nitride *up* ** *26.9/30* ** ** Tylan 11-LTO *up* ** *14.09/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *lla issues-Dead Power supply* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 907 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Aug 11 07:41:35 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 11 Aug 2011 07:41:35 -0700 Subject: Diffusion Morning Report 08/11/11 Message-ID: <4E43EA1F.8060901@stanford.edu> Good Morning All, Looking good this morning. Epi LLA still has issues. Tylan 3 has MFS issues but Ray almost has it up. Thermco nitride has higher dep pressure than previous. Thermco 2 no TLC flow. No other issues at this time. Date: 8/11/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *down* *mfs 460 issues* ** ** *1* Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *2.95/30* ** ** Tylan 8-SiGe *down* *Mech Pump problems-out for repair* *1.94/30* ** ** Tylan 9-Poly *up* ** *27.17/30* ** ** Tylan 10-Nitride *up* ** *27.33/30* ** ** Tylan 11-LTO *up* ** *14.09/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 907 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Aug 12 06:11:51 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 12 Aug 2011 06:11:51 -0700 Subject: Diffusion Morning Report 08/12/11 Message-ID: <4E452697.6050405@stanford.edu> Good Morning All, Looking good this morning. LLA on Epi still has issues. Thermco nitride has higher dep pressure than previous. Thermco 2 no TLC flow. TYLAN nitride going dow on Monday for pull and clean. SiGe pump out for rebuild. No other issues at this time. Date: 8/12/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *2.95/30* ** ** Tylan 8-SiGe *down* *Mech Pump problems-out for repair* *1.94/30* ** ** Tylan 9-Poly *up* ** *27.17/30* ** ** Tylan 10-Nitride *up* *going down Monday for pull and clean* *29.16/30* ** ** Tylan 11-LTO *up* ** *14.14/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 907 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Aug 15 07:57:55 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 15 Aug 2011 07:57:55 -0700 Subject: Diffusion Morning Report 08/15/1 Message-ID: <4E4933F3.7040005@stanford.edu> Good Morning All, looking OK this morning. DCS is off for a while-checking system. Tylan Nitride is down for pull and clean. Phosphine was off on BPSG and Thermcos to check out exhaust. Epi LLA has issues. No other issues at this time. Date: 8/15/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *2.95/30* ** ** Tylan 8-SiGe *down* *Mech Pump problems-out for repair* *1.94/30* ** ** Tylan 9-Poly *up* ** *27.17/30* ** ** Tylan 10-Nitride *down* *down Monday for pull and clean* *0/30* ** ** Tylan 11-LTO *up* ** *14.17/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *down* *no DCS* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 856 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Aug 16 06:23:17 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 16 Aug 2011 06:23:17 -0700 Subject: Diffusion Morning Report 08/16/11 Message-ID: <4E4A6F45.3070309@stanford.edu> Good Morning All, Looking good this morning. Epi LLa still has issues. Tylan Nitride is down for tube change. Tylan LTO is down for broken injectors. Thermco Nitride has higher dep pressure than previous. SiGe pump out for repair. No other major issues at this time. Date: 8/16/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *2.95/30* ** ** Tylan 8-SiGe *down* *Mech Pump problems-out for repair* *1.94/30* ** ** Tylan 9-Poly *up* ** *27.17/30* ** ** Tylan 10-Nitride *down* *down for pull and clean* *0/30* ** ** Tylan 11-LTO *down* *Broken injectors* *14.17/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *Possible temp issues* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 856 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Aug 17 06:32:26 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 17 Aug 2011 06:32:26 -0700 Subject: Diffusion Morning Report 08/17/11 Message-ID: <4E4BC2EA.3070207@stanford.edu> Good Morning All, Looking OK this morning. Epi had possible door close issues. Tylan Nitride coming up after tube change. Tylan LTO has a broken injector.Thermco 2 has possible temp issues. Thermco Nitride has higher dep pressure than previous. SiGe pump is out for rebuild. No other issues at this time. Date: 8/17/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *2.95/30* ** ** Tylan 8-SiGe *down* *Mech Pump problems-out for repair* *1.94/30* ** ** Tylan 9-Poly *up* ** *27.17/30* ** ** Tylan 10-Nitride *down* *down for pull and clean* *0/30* ** ** Tylan 11-LTO *down* *Broken injector* *14.17/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *Possible temp issues* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues-possible door issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 856 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Aug 18 06:25:38 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 18 Aug 2011 06:25:38 -0700 Subject: Diffusion Morning Report 08/18/11 Message-ID: <4E4D12D2.30106@stanford.edu> Good Morning All, Looking good this morning. Tylan LTO is down for tube change-tube was cracked when injectors broke. Epi has LLa issues. Tylan Nitride has possible thickness issues. SiGe pump out for repair. Thermco Nitride has higher dep pressure than previous.. Thermco 2 has possible temp issues. No other issues at this time. Date: 8/17/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *2.95/30* ** ** Tylan 8-SiGe *down* *Mech Pump problems-out for repair* *1.94/30* ** ** Tylan 9-Poly *up* ** *27.17/30* ** ** Tylan 10-Nitride *yellow* *thickness issue ?* *.14/30* ** ** Tylan 11-LTO *down* *Broken injector* *14.17/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *Possible temp issues* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 856 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Aug 19 06:09:31 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 19 Aug 2011 06:09:31 -0700 Subject: Diffusion Morning Report 08/19/11 Message-ID: <4E4E608B.3020209@stanford.edu> Good Morning all, Looking good this morning. Only one new issue. Tylan2 was showing incorrect temp in source zone during TLC clean. Ongoing issues-LLA on Epi still has problems. Thermco 2 possible temp issues. Thermco Nitride has higher dep pressure than previous. Tylan LTO has a bad tube-replacing. Tylan Nitride possible thickness issues.SiGe pump out for repair. No other issues at this time. Date: 8/19/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *showing incorrect temp in Source* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *2.95/30* ** ** Tylan 8-SiGe *down* *Mech Pump problems-out for repair* *1.94/30* ** ** Tylan 9-Poly *up* ** *27.17/30* ** ** Tylan 10-Nitride *yellow* *thickness issue ?* *.14/30* ** ** Tylan 11-LTO *down* *Broken injector and tube* *14.17/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *Possible temp issues* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 856 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Aug 22 07:06:05 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 22 Aug 2011 07:06:05 -0700 Subject: Diffusion Morning Report 08/22/11 Message-ID: <4E52624D.30704@stanford.edu> Good Morning All, Looking OK this morning. Tylan LTO has 2 broken cantilever sheaths. Tylan Nitride wont pump down. Left over issues: Epi LLA has issues, Sige pump still out for repair, Thermco 2 possible temp issues. Tylan 2 observation. No other issues at this time. Date: 8/22/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *showing incorrect temp in Source* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *2.95/30* ** ** Tylan 8-SiGe *down* *Mech Pump problems-out for repair* *1.94/30* ** ** Tylan 9-Poly *up* ** *27.69/30* ** ** Tylan 10-Nitride *down* *not pumping* *.26/30* ** ** Tylan 11-LTO *down* *Broken cantilever sheaths* *4.58/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *Possible temp issues* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 856 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Aug 23 06:13:29 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 23 Aug 2011 06:13:29 -0700 Subject: Diffusion Morning Report 08/23/11 Message-ID: <4E53A779.3040809@stanford.edu> Good Morning All, Looking ok this morning. No new problems that i know of. Left over problems-Tylan Nitride-looks like the pump is dead, tylan LTO tube is broken.SiGe pump is out for repair. Epi LLA still has issues. Thermco 2 has possible temp issues. No other problems at this time. Date: 8/23/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *2.95/30* ** ** Tylan 8-SiGe *down* *Mech Pump problems-out for repair* *1.94/30* ** ** Tylan 9-Poly *up* ** *27.69/30* ** ** Tylan 10-Nitride *down* *bad pump* *.26/30* ** *1* Tylan 11-LTO *down* *Broken cantilever sheaths and tube* *4.58/30* ** *2* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *Possible temp issues* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 856 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Wed Aug 24 07:35:27 2011 From: rseymour at stanford.edu (Ray Seymour) Date: Wed, 24 Aug 2011 07:35:27 -0700 Subject: Diffusion Morning Report Message-ID: <4E550C2F.9080707@stanford.edu> Good Morning All, Ted is out today. Thermcopoly 1 has some flaking. The EPI2 burnbox has fuel pressure fault. No other problems at this time. Date: 8/24/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *2.95/30* ** ** Tylan 8-SiGe *down* *Mech Pump problems-out for repair* *1.94/30* ** ** Tylan 9-Poly *up* ** *27.69/30* ** ** Tylan 10-Nitride *up* * * *1.58/30* ** * * Tylan 11-LTO *up* * * *1.5/30* ** * * Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *Possible temp issues* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *lla issues burtnbox faults * ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 856 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Aug 25 07:19:32 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 25 Aug 2011 07:19:32 -0700 Subject: Diffusion Morning Report 08/25/11 Message-ID: <4E5659F4.3080903@stanford.edu> Good Morning All, Looking good this morning. No new issues. Left over isssues. LLA for Epi still has issues. SiGe pump out for repair. Tylan LTO testing PH3. Thermco 2 possible temp issues. No other issues at this time. Date: 8/25/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *4.4/30* ** ** Tylan 8-SiGe *down* *Mech Pump problems-out for repair* *1.94/30* ** ** Tylan 9-Poly *up* ** *27.69/30* ** ** Tylan 10-Nitride *up* ** *1.58/30* ** ** Tylan 11-LTO *yellow* *No Ph3 until tested* *1.5/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *Possible temp issues* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 856 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Aug 26 06:21:28 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 26 Aug 2011 06:21:28 -0700 Subject: Diffusion Morning Report 08/26/11 Message-ID: <4E579DD8.60109@stanford.edu> Good Morning All, Looking good this morning. The only new issues are Tylan Nitride had burnt orings which were replaced and it still has a slightly high leak rate. Also Epi has had several burn box issues since gas shutdown on Tuesday. Leftover issues: Epi LLA, SiGE pump out for repair-should be back early next week, Thermco 2 possible temp issues. No other issues at this time. Date: 8/26/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *4.4/30* ** ** Tylan 8-SiGe *down* *Mech Pump problems-out for repair* *1.94/30* ** ** Tylan 9-Poly *up* ** *27.69/30* ** ** Tylan 10-Nitride *down* *burnt o-rings-leak* *1.58/30* ** *1* Tylan 11-LTO *up* ** *4.15/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *Possible temp issues* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 856 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Aug 29 06:16:57 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 29 Aug 2011 06:16:57 -0700 Subject: Diffusiom Morning Report 08/29/11 Message-ID: <4E5B9149.3050506@stanford.edu> Good Morning All, Looking good this morning. New issues:Epi is down for bad lamps. TEOS is empty. Tylan 2 had MFS alarms for O2leak-this happens almost every time all 4 tubes are in TLC clean-source cabinet gets too hot. Left overs-Epi LLA, SiGe pump-should be back this week. Thermco 2 possible temp issues. No other issues at this time. Date: 8/29/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *teos empty* *5.9/30* ** *2* Tylan 8-SiGe *down* *Mech Pump problems-out for repair* *1.94/30* ** ** Tylan 9-Poly *up* ** *27.69/30* ** ** Tylan 10-Nitride *yellow* *user test OK* *5.02/30* ** ** Tylan 11-LTO *up* ** *9.99/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *Possible temp issues* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *bad lamps-lla* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 856 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Aug 30 06:06:58 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 30 Aug 2011 06:06:58 -0700 Subject: Diffusion Morning Report 08/30/11 Message-ID: <4E5CE072.1010408@stanford.edu> Good Morning All, Looking good this morning. Tylan Poly is down for a bad SiH4 sensor. TEOS ampule changed. Left overs: SiGe pump still out for repair-should be back this week. Epi LLA issues. Thermco 2 possible Temp issues. No other problems at this time. Date: 8/30/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *5.9/30* ** ** Tylan 8-SiGe *down* *Mech Pump problems-out for repair* *1.94/30* ** ** Tylan 9-Poly *down* *bad sensor on SiH4* *27.69/30* ** *1* Tylan 10-Nitride *yellow* *user test OK* *5.02/30* ** ** Tylan 11-LTO *up* ** *12.42/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *Possible temp issues* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 856 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Aug 31 06:59:46 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 31 Aug 2011 06:59:46 -0700 Subject: Diffusion Morning Report 08/31/11 Message-ID: <4E5E3E52.4050307@stanford.edu> Good Morning All, Looking good this morning. New issues: Tylan 2 baffle scraping. Tylan Poly has slightly higher dep rate. Left over issues: TEOS need test after ampule change. SiGe pump should be back this week. Thermco 2 possible temp issues. No other problems at this time. Date: 8/31/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *Baffle scraping* ** ** *1* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *5.9/30* ** ** Tylan 8-SiGe *down* *Mech Pump problems-out for repair* *1.94/30* ** ** Tylan 9-Poly *yellow* *dep rate* *28.76/30* ** ** Tylan 10-Nitride *yellow* *user test OK* *5.02/30* ** ** Tylan 11-LTO *up* ** *12.42/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *Possible temp issues* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 856 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... 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