From tberg at stanford.edu Tue Feb 1 06:37:17 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 01 Feb 2011 06:37:17 -0800 Subject: Diffusion morning report 02/01/11 Message-ID: <4D481A9D.70107@stanford.edu> Good Morning All, Looking good this morning. Epi pump is out for repair. Will install new tip for 4160 today, it will be down for a couple of days for pump and bake. Tylan LTo and Thermco Nitride need tests. Thermco LTO has a leak. Ebeam compressor is dead. No other major problems at this time. Ray is out for the week. Date: 2/1/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin wet* ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *5.1/30* ** ** Tylan 10-Nitride *up* ** *25.45/30* ** ** Tylan 11-LTO *yellow* *mfs alarms-needs test* *24.0/30* ** *1* Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *needs test* ** ** *3* Thermco bpsg *down* *leak* ** ** ** AMAT Epi *yellow* *pump out for repair* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 249 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Feb 2 06:23:15 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 02 Feb 2011 06:23:15 -0800 Subject: Diffusion Morning Report 02/02/11 Message-ID: <4D4968D3.6010404@stanford.edu> Good Morning All, Looking good this morning. Epi pump should be back this morning and will be installed. SEM 4160 looks OK now. Tylan LTO and Thermco Nitride need tests. Tylan 4 has thin wet ox. Thermco LTO has a leak. No other problems at this time. Date: 2//2011 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin wet* ** ** *2* Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *5.1/30* ** ** Tylan 10-Nitride *up* ** *25.49/30* ** ** Tylan 11-LTO *yellow* *mfs alarms-needs test* *25.1/30* ** *3* Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *needs test* ** ** ** Thermco bpsg *down* *leak* ** ** ** AMAT Epi *yellow* *pump out for repair* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line 652 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Feb 3 08:05:42 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 03 Feb 2011 08:05:42 -0800 Subject: Diffusion Morning Report 02/03/11 Message-ID: <4D4AD256.2010800@stanford.edu> Good morning All, Looking good this morning. Pump is back in Epi . Tylan 4 has thin Wet ox. Thermco LTO has a leak. Ebeam compressor is dead. No other major issues at this time. Date: 2/3/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin wet* ** ** *1* Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *5.1/30* ** ** Tylan 10-Nitride *up* ** *25.49/30* ** ** Tylan 11-LTO *yellow* *mfs alarms-needs test* *26.45/30* ** *2* Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *leak* ** ** ** AMAT Epi *yellow* *pump is back looking OK* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line 652 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Feb 4 06:49:55 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 04 Feb 2011 06:49:55 -0800 Subject: Diffusion Morning Report 02/04/11 Message-ID: <4D4C1213.2000105@stanford.edu> Good Morning All, Looking good this morning. Epi is having pressure control issues. Tylan 4 tests with higher H2 was thicker-still investigating. Thermco LTO has a leak. Tylan LTO had O2 MFS alarm. Ebeam compressor is dead. No other issues at this time. Date: 2/4/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin wet* ** ** *2* Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *5.1/30* ** ** Tylan 10-Nitride *up* ** *25.49/30* ** ** Tylan 11-LTO *yellow* *mfs alarms-needs test* *27.17/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *leak* ** ** ** AMAT Epi *yellow* *pumping issues* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line 652 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Feb 7 06:48:40 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 07 Feb 2011 06:48:40 -0800 Subject: Diffusion Morning Report 02/07/11 Message-ID: <4D500648.30400@stanford.edu> Good Morning All, Looking good this morning. Epi is having pressure control issues. Tylan LTO is going down tomorrow for pull and clean. Tylan 4 has thin ox. Thermco 2 has no TLC flow- looks like a recipe issue. Ebeam compressor is dead. Thermco LTO has a leak. no other issues at this time. Date: 2/7/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin wet* ** ** *2* Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *5.1/30* ** ** Tylan 10-Nitride *up* ** *25.49/30* ** ** Tylan 11-LTO *yellow* *going down tomorrow-pull and clean* *30.22/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** *3* Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *leak* ** ** ** AMAT Epi *yellow* *pumping issues* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line 600 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Feb 8 06:10:12 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 08 Feb 2011 06:10:12 -0800 Subject: Diffusion Morning Report 02/08/11 Message-ID: <4D514EC4.8000900@stanford.edu> Good Morning All, looking good this morning.Tylan LTO is down for pull and clean. Epi had a LLA issue.Thermco LTO has a leak. Ebeam cro compressor is dead.Thermco 2 has no TLC flow- looks like a recipe issue. Tylan 4 has thin wet ox. No other issues at this time. Date: 2/8/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin wet* ** ** *2* Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *5.1/30* ** ** Tylan 10-Nitride *up* ** *26.42/30* ** ** Tylan 11-LTO *down* *pull and clean* *0/30* ** *1* Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *leak* ** ** ** AMAT Epi *yellow* *LLA issue?* ** ** *3* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line 600 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Feb 9 06:24:58 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 09 Feb 2011 06:24:58 -0800 Subject: Diffusion Morning Report 02/09/11 Message-ID: <4D52A3BA.1000605@stanford.edu> Good Morning All, Looking good this morning. Tylan LTO is back after pull and clean good job Ray-test came out a bit thin. Tylan 4 has thin wet ox. Tylan 1 was in standby-reset and loaded recipe.Thermco LTO has a leak. Ebeam compressor is dead. SEM 4160 alignment issues. Thermco 2 no TLC flow. No other problems at this time. Date: 2/9/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *was in standby* ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin wet* ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *8.1/30* ** ** Tylan 10-Nitride *up* ** *26.62/30* ** ** Tylan 11-LTO *down* *pull and clean completed* *.13/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *leak* ** ** ** AMAT Epi *yellow* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line 600 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Feb 10 06:29:38 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 10 Feb 2011 06:29:38 -0800 Subject: Diffusion Morning Report 02/10/11 Message-ID: <4D53F652.3090205@stanford.edu> Good Morning All, Looking good this morning. Tylan 4 had O2 hi leak. Epi has pressure control issues at high pressures around 600T. Thermco LTO has a bad pump. Ebeam compressor is dead. Tylan 1 had I/O error. Thermco 2 had no TLC flow- looks like a recipe issue. No other major issues at this time. Date: 2/10/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *was in standby* ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin wet* ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *8.1/30* ** ** Tylan 10-Nitride *up* ** *26.62/30* ** ** Tylan 11-LTO *up* *a bit thin* *2.93/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *bad pump* ** ** ** AMAT Epi *yellow* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line 600 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Feb 11 06:27:37 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 11 Feb 2011 06:27:37 -0800 Subject: Diffusion Morning Report 02/11/11 Message-ID: <4D554759.6030104@stanford.edu> Good Morning All, Looking good this morning. Thermco Lto has a bad pump-out for repair. Ebeam compressor is dead. Tylan 4 had thickness issues and flow issues. Tylan LTO had MFS alarms. Epi seems to be behaving. Thermco 2 had no TLC flow-looks like a recipe issue. No other issues at this time. Date: 2/11/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *was in standby* ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *door not opening* ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *8.1/30* ** ** Tylan 10-Nitride *up* ** *28.02/30* ** ** Tylan 11-LTO *up* *a bit thin* *3.66/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *bad pump* ** ** ** AMAT Epi *yellow* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line 600 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Feb 14 06:40:49 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 14 Feb 2011 06:40:49 -0800 Subject: Diffusion Morning Report 02/14/11 Message-ID: <4D593EF1.2010300@stanford.edu> Good Morning All, Looking good this morning. Tylan 2 was in manual. Thermco Nitride door won't open. Epi running Ok. Thermco LTO pump out for repair. Tylan 4 thin wet ox. Ebeam compressor is dead. No other issues at this time. Date: 2/14/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *was in standby* ** ** ** Tylan 2 *up* *MFS was in Manual* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin ox* ** ** *2* Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *8.1/30* ** ** Tylan 10-Nitride *up* ** *28.11/30* ** ** Tylan 11-LTO *up* *a bit thin* *5.57/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *door not opening* ** ** *1* Thermco bpsg *down* *bad pump-out for repair* ** ** ** AMAT Epi *yellow* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line 600 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Feb 15 06:22:23 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 15 Feb 2011 06:22:23 -0800 Subject: Diffusion Morning Report 02/15/11 Message-ID: <4D5A8C1F.305@stanford.edu> Good Morning All, Looking OK this morning. Tylan Nitride down for pull and clean. Thermco Lto down for pump repair. Thermco Nitride down no DCS. Epi in yellow no DCS. Tylan 4v wet ox a bit thin. Ebeam compressor is dead. Thermco 2 no TLC flow. No other issues at this time. Date: 2/15/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin ox* ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *8.1/30* ** ** Tylan 10-Nitride *down* *going down for pull and clean* *0/30* ** *1* Tylan 11-LTO *up* *a bit thin* *5.57/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *no DCS* ** ** ** Thermco bpsg *down* *bad pump-out for repair* ** ** ** AMAT Epi *yellow* *No DCS* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line 600 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Feb 16 06:47:21 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 16 Feb 2011 06:47:21 -0800 Subject: Diffusion Morning Report 02/16/11 Message-ID: <4D5BE379.6000705@stanford.edu> Good Morning All, Looking OK this morning. EPI is down waiting for DCS and HCl leak checks. Tylan Nitride down for pull and clean and Thermco Nitride down for DCS. Thermco LTO down for pump rebuild. Ebeam compressor is dead. Tylan 4 had thin wet ox. No other issues at this time. Date: 2/16/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin ox* ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *8.1/30* ** ** Tylan 10-Nitride *down* *pull and clean* *0/30* ** *2* Tylan 11-LTO *up* *a bit thin* *5.88/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *no DCS* ** ** ** Thermco bpsg *down* *bad pump-out for repair* ** ** ** AMAT Epi *yellow* *No DCS* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line 600 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Feb 17 07:32:47 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 17 Feb 2011 07:32:47 -0800 Subject: Diffusion Morning Report 02/17/11 Message-ID: <4D5D3F9F.9000204@stanford.edu> Good Morning All, Looking good this morning. Thermco Poly1 is down for a leak. Tylan Nitride is down for pull and clean. Thermco LTO pump is out for repair. Epi is running. Ebeam compressor is dead. Tylan 4 wet ox is a bit thin. Thermco 2 no tlc-recipe issue?? Date: 2/17/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin ox* ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *8.1/30* ** ** Tylan 10-Nitride *down* *pull and clean* *0/30* ** *1* Tylan 11-LTO *up* *a bit thin* *6.21/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *down* *leak* ** ** *2* Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *bad pump-out for repair* ** ** ** AMAT Epi *yellow* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line 224 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Feb 18 08:31:27 2011 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 18 Feb 2011 08:31:27 -0800 Subject: Diffusion Morning Report Message-ID: <4D5E9EDF.50208@stanford.edu> Good Morning All, Ted is out today. Thermco Poly1 is down for a leak. Tylan Nitride is down a test after pull and clean. Thermco LTO pump is out for repair. Epi is running. Ebeam compressor is dead. Tylan 4 wet ox is a bit thin. Thermco 2 no tlc-recipe issue?? Date: 2/18/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin ox* ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *8.1/30* ** ** Tylan 10-Nitride *down* *needs test * *0/30* ** *1* Tylan 11-LTO *up* *a bit thin* *6.21/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *down* *leak* ** ** *2* Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *bad pump-out for repair* ** ** ** AMAT Epi *yellow* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line 224 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Feb 23 09:02:23 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 23 Feb 2011 09:02:23 -0800 Subject: Diffusion Morning Report 02/23/11 Message-ID: <4D653D9F.5020903@stanford.edu> Good Morning All, looking OK this morning. A few issues this morning. Ray is out for a couple of weeks. Epi2 has broken wafer and blade-FS will be here today.Thermco Poly1 has a leak as does TEOS. Thermco LTO pump is out for rebuild. Ebeam compressor is dead. Thermco 2 has no TLC flow. No other major issues. Date: 2/23/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin ox* ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *leak* *.25/30* ** *3* Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *up* ** *8.12/30* ** ** Tylan 10-Nitride *yellow* *mfs alarm* *2.0/30* ** ** Tylan 11-LTO *up* *a bit thin* *8.84/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *down* *leak* ** ** *2* Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *bad pump-out for repair* ** ** ** AMAT Epi *down* *broken wafer and blade* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line 224 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Feb 24 06:18:22 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 24 Feb 2011 06:18:22 -0800 Subject: Diffusion Morning Report 02/24/11 Message-ID: <4D6668AE.90506@stanford.edu> Good Morning All, Looking OK this morning. Epi blade and pins replaced FS is addressing handling issues. Thermco Poly1 and TEOS have leaks. Thermco LTO pump is out for repair. Ebeam compressor going out for repair. Thermco 2 no TLC flow. Tylan 4 is a bit thin on wet ox. Tylan Poly lost Date: 2/24/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin ox* ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *leak* *.25/30* ** *3* Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *down* *lost comm* *9.12/30* ** ** Tylan 10-Nitride *yellow* *mfs alarm* *2.0/30* ** ** Tylan 11-LTO *up* *a bit thin* *9.82/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *down* *leak* ** ** *2* Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *bad pump-out for repair* ** ** ** AMAT Epi *down* *blade and pins replaced-fs back today* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor going out for repair* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line 224 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Feb 25 06:19:47 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 25 Feb 2011 06:19:47 -0800 Subject: Diffusion Morning Report 02/25/11 Message-ID: <4D67BA83.8040103@stanford.edu> Good Morning All, Looking OK this morning. Epi is back up. Thermco Poly-changing the tube. Tylan 1 had GeH4 run in it-down until clean. Thermco Poly1 and TEOS have leaks. Thermco LTO pump out for repair. Ebeam compressor going out for repair. Thermco 2 no tlc flow. Tylan 4 thin wet ox. No other issues at this time. > > Date: 2/25/11 THICKNESS-Change at Priority > Tube Name/Number Status > Tylan 1 *down* *GeH4 contamination* ** ** *2* > Tylan 2 *up* ** ** ** ** > Tylan 3 *up* ** ** ** ** > Tylan 4 *yellow* *thin ox* ** ** ** > Tylan 5-BBr3 *up* ** ** ** ** > Tylan 6-POCl3 *up* ** ** ** ** > Tylan 7-TEOS2 *down* *leak* *.25/30* ** *3* > Tylan 8-SiGe *up* ** *.88/30* ** ** > Tylan 9-Poly *up* ** *9.27/30* ** ** > Tylan 10-Nitride *yellow* *mfs alarm* *2.0/30* ** ** > Tylan 11-LTO *up* *a bit thin* *10.91/30* ** ** > Tylan 12-FGA *up* * > * ** ** ** > Thermco 1 *up* ** ** ** ** > Thermco 2 *yellow* *no tlc flow* ** ** ** > Thermco 3 *future* ** ** ** ** > Thermco4 *future* ** ** ** ** > Thermco Poly1 *down* *leak* ** ** *1* > Thermco Poly2 *up* ** ** ** ** > Thermco Nitride1 *up* ** ** ** ** > Thermco bpsg *down* *bad pump-out for repair* ** ** ** > AMAT Epi *yellow* *watching handling* ** ** ** > TEL Spa *up* ** ** ** ** > Burn Box *up* ** ** ** ** > Ebeam *down* *cryo compresssor going out for repair* ** ** ** > ZYGO *up* * > * ** ** ** > FGA2 *up* ** ** ** ** > SiH4 for furnaces ** *B on line 224 PSI* *changeover working > well* ** ** > -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Mon Feb 28 08:12:21 2011 From: maurice at stanford.edu (maurice stevens) Date: Mon, 28 Feb 2011 08:12:21 -0800 Subject: Diffusion Morning Report 02/25/11 In-Reply-To: <4D67BA83.8040103@stanford.edu> References: <4D67BA83.8040103@stanford.edu> Message-ID: <4D6BC965.7070509@stanford.edu> Good Morning All, Ray and Ted are out this morning. Epi is having intermittent load lock and lift problems. Thermco Poly1 is back up. Mike is installing a new tube in Tylan 1 after GeH4 contamination. TEOS has a leak. Thermco LTO pump out for repair. Ebeam compressor going out for repair. Thermco 2 no tlc flow. Tylan 4 thin wet ox. No other issues at this time. > > >> >> Date: 2/25/11 THICKNESS-Change at Priority >> Tube Name/Number Status >> Tylan 1 *down* *GeH4 contamination* ** ** *2* >> Tylan 2 *up* ** ** ** ** >> Tylan 3 *up* ** ** ** ** >> Tylan 4 *yellow* *thin ox* ** ** ** >> Tylan 5-BBr3 *up* ** ** ** ** >> Tylan 6-POCl3 *up* ** ** ** ** >> Tylan 7-TEOS2 *down* *leak* *.25/30* ** *3* >> Tylan 8-SiGe *up* ** *.88/30* ** ** >> Tylan 9-Poly *up* ** *9.27/30* ** ** >> Tylan 10-Nitride *yellow* *mfs alarm* *2.0/30* ** ** >> Tylan 11-LTO *up* *a bit thin* *10.91/30* ** ** >> Tylan 12-FGA *up* * >> * ** ** ** >> Thermco 1 *up* ** ** ** ** >> Thermco 2 *yellow* *no tlc flow* ** ** ** >> Thermco 3 *future* ** ** ** ** >> Thermco4 *future* ** ** ** ** >> Thermco Poly1 *up* * >> * ** ** *1* >> Thermco Poly2 *up* ** ** ** ** >> Thermco Nitride1 *up* ** ** ** ** >> Thermco bpsg *down* *bad pump-out for repair* ** ** ** >> AMAT Epi *yellow* *watching handling* ** ** ** >> TEL Spa *up* ** ** ** ** >> Burn Box *up* ** ** ** ** >> Ebeam *down* *cryo compresssor going out for repair* ** ** ** >> ZYGO *up* * >> * ** ** ** >> FGA2 *up* ** ** ** ** >> SiH4 for furnaces ** *B on line 224 PSI* *changeover working >> well* ** ** >> > -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. 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