From tberg at stanford.edu Tue Jan 4 06:24:04 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 04 Jan 2011 06:24:04 -0800 Subject: Diffusion Morning Report 01/04/11 Message-ID: <4D232D84.2000703@stanford.edu> Good Morning All, Welcome back and Happy New Year. Tools are coming back up with a few issues. Epi has bad lamps and hopefully they will be replaced today and back up by tomorrow. Thermco poly 1 needs testing as does TEOS. Tylan 1 and 2 are down for MFS issues. Thermco Poly2 has a bad pump -out for repair. Thermco LTO has a leak. Tylan 4 came out a bit thin on test. SiGe has a leak and tube is being replaced. Thermco Nitride is waiting for a new thermocouple. Both SEMs are back up. No other problems i know of at this time. Date: 1/4/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *MFS 460 issues* ** ** ** Tylan 2 *down* *mfs issues* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin* ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *down* *leak* *0/30* ** ** Tylan 9-Poly *up* ** *.11/30* ** ** Tylan 10-Nitride *up* ** *20.99/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *16.07/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *down* *Pump out for repair* ** ** ** Thermco Nitride1 *down* *waiting TC-ordered* ** ** ** Thermco bpsg *down* *leak* ** ** ** AMAT Epi *down* *Bad lamps* ** ** ** TEL Spa *up* * * ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *computer issues* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 461 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jan 5 06:32:27 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 05 Jan 2011 06:32:27 -0800 Subject: Diffusion Morning Report 01/05/11 Message-ID: <4D2480FB.2030002@stanford.edu> Good Morning All, Still recovering from the shutdown. Epi lamps were changed yesterday- checking it out. Tylan poly is aborting recipes-looking into reason. Tylans 1 and 2 have MFS460 errors. Thermco poly 1 had procedure error. Thermco Poly 2 pump out for repair. Thermco nitride waiting for a TC. Thermco LTO has a leak. SiGe tube replaced. Enough problems for now. Date: 1/5/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *MFS 460 issues-out for repair* ** ** ** Tylan 2 *down* *mfs issues* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin* ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *down* *pull and clean* *0/30* ** ** Tylan 9-Poly *down* *aborting program* *.42/30* ** ** Tylan 10-Nitride *up* ** *21.22/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *18.26/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *down* *procedure error* ** ** ** Thermco Poly2 *down* *Pump out for repair* ** ** ** Thermco Nitride1 *down* *waiting TC-ordered* ** ** ** Thermco bpsg *down* *leak* ** ** ** AMAT Epi *down* *Lamps changed-checking it out* ** ** ** TEL Spa *up* * * ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *computer issues* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 461 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jan 6 06:11:29 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 06 Jan 2011 06:11:29 -0800 Subject: Diffusion Morning Report 01/06/11 Message-ID: <4D25CD91.3010500@stanford.edu> Good Morning All, looking OK this morning. Testing HCL gas panel for Epi. Tylan1 460 is at vendor being tested/repaired. Tylan2 has MFS issues. Waiting for TC for Thermco Nitride. Thermco Poly2 pump is out for repair. Thermco LTO has a leak. SiGe being reassembled. Ebeam Compressor is dead. Tylan 4 is a bit thin. No other major problems at this time. Date: 1/6/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *MFS 460 issues-out for repair* ** ** ** Tylan 2 *down* *mfs issues* ** ** *3* Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin* ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *down* *pull and clean* *0/30* ** *2* Tylan 9-Poly *up* ** *.42/30* ** ** Tylan 10-Nitride *up* ** *21.22/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *18.26/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *down* *Pump out for repair* ** ** ** Thermco Nitride1 *down* *waiting TC-ordered* ** ** ** Thermco bpsg *down* *leak* ** ** ** AMAT Epi *down* *Lamps changed-checking it out* ** ** *1* TEL Spa *up* * * ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *computer issues* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 461 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jan 7 07:10:04 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 07 Jan 2011 07:10:04 -0800 Subject: Diffusion Morning Report 01/07/11 Message-ID: <4D272CCC.1080001@stanford.edu> Good Morning All, Looking a bit better this morning. Epi HCL panel looks OK will turn on and test Epi. Tylans 1 and 2 MFS issues. SiGe needs test after pull and clean. Thermco Nitride TC ordered. Thermco Poly2 pump out for repair. Thermco LTO has a leak. Ebeam cryo compressor is dead. No other issues at this time. Date: 1/7/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *MFS 460 issues-out for repair* ** ** *2* Tylan 2 *down* *mfs issues* ** ** *3* Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin* ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** *4* Tylan 9-Poly *up* ** *.57/30* ** ** Tylan 10-Nitride *up* ** *21.22/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *18.26/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *down* *Pump out for repair* ** ** ** Thermco Nitride1 *down* *waiting TC-ordered* ** ** ** Thermco bpsg *down* *leak* ** ** ** AMAT Epi *down* *HCl panel test* ** ** *1* TEL Spa *up* * * ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 451 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jan 10 07:54:43 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 10 Jan 2011 07:54:43 -0800 Subject: Diffusion Morning Report 01/10/11 Message-ID: <4D2B2BC3.3030902@stanford.edu> Good Morning All, Looking OK this Morning. Tylan 1 MFS460 out for repair. Tylan 2 has O2Hi flow issue. Tylan 4 came out thin. SiGe needs test after pull and clean. Thermco Poly2 pump out for repair. Thermco nitride TC on Order. Ebeam compressor dead. Thermco LTO has a leak. no other issues at this time. Date: 1/10/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *MFS 460 issues-out for repair* ** ** ** Tylan 2 *down* *o2Hi Flow issues* ** ** *1* Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin* ** ** *2* Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** *3* Tylan 9-Poly *up* ** *.72/30* ** ** Tylan 10-Nitride *up* ** *21.32/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *18.26/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *down* *Pump out for repair* ** ** ** Thermco Nitride1 *down* *waiting TC-ordered* ** ** ** Thermco bpsg *down* *leak* ** ** *4* AMAT Epi *yellow* *Possible pressure issues* ** ** ** TEL Spa *up* * * ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 451 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jan 11 06:17:10 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 11 Jan 2011 06:17:10 -0800 Subject: Diffusion Morning Report 01/11/11 Message-ID: <4D2C6666.7000000@stanford.edu> Good Morning All, Looking good this morning. Tylan 1 mfs460 is out for repair. Tylan 4 is down for tube change. Thermco Poly2 pump is out for repair. Thermco Nitride waiting for TC. Thermco LTO has a leak. SEM 4160 tilt issues. No other issues at this time. Date: 1/11/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *MFS 460 issues-out for repair* ** ** *2* Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *down* *tube change* ** ** *1* Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *.72/30* ** ** Tylan 10-Nitride *up* ** *21.52/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *19.39/30* ** *3* Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *down* *Pump out for repair* ** ** ** Thermco Nitride1 *down* *waiting TC-ordered* ** ** ** Thermco bpsg *down* *leak* ** ** ** AMAT Epi *yellow* *Possible pressure issues* ** ** ** TEL Spa *up* * * ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 399 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jan 12 06:17:59 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 12 Jan 2011 06:17:59 -0800 Subject: Diffusion Morning Report 01/12/11 Message-ID: <4D2DB817.9010900@stanford.edu> Good Morning All, Looking good this morning. Tylan 1 460 is out for repair. Tylan 4 tube will be installed today. Thermco Poly2 pump out for repair. Thermco Nitride TC on order. Thermco LTO has a leak. GeH4 for Epi replaced. Ebeam Cryo Dead. No other issues at this time. Date: 1/12/11 THICKNESS-Change at Priority Tube Name/Number *Status* ** ** ** ** Tylan 1 *down* *MFS 460 issues-out for repair* ** ** *2* Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *down* *element replaced tube install* ** ** *1* Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *.72/30* ** ** Tylan 10-Nitride *up* ** *21.52/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *19.39/30* ** *3* Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *down* *Pump out for repair* ** ** ** Thermco Nitride1 *down* *waiting TC-ordered* ** ** ** Thermco bpsg *down* *leak* ** ** ** AMAT Epi *yellow* *GeH4 replaced* ** ** ** TEL Spa *up* * * ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 399 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jan 13 07:13:25 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 13 Jan 2011 07:13:25 -0800 Subject: Diffusion Morning Report 01/13/11 Message-ID: <4D2F1695.2090309@stanford.edu> Good Morning All, Looking good this morning. tylan 4 is ready for a test after element and tube change. Tylan2 is down for tube clean. Thermco poly 2 pump is out for repair, Thermco Nitride is waiting for a TC. Thermco LTO has a leak. Tylan 1 MFS 460 is out for repair. Ebeam Cryo compressor is dead. No other issues at this time. Date: 1/13/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 down MFS 460 issues-out for repair 3 Tylan 2 *down* *tube clean* ** ** *2* Tylan 3 *up* ** ** ** ** Tylan 4 *down* *tlc clean done needs test* ** ** *1* Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *.72/30* ** ** Tylan 10-Nitride *up* ** *21.52/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *19.39/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *down* *Pump out for repair* ** ** ** Thermco Nitride1 *down* *waiting TC-ordered* ** ** ** Thermco bpsg *down* *leak* ** ** ** AMAT Epi *yellow* ** ** ** ** TEL Spa *up* * * ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 399 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jan 14 07:00:39 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 14 Jan 2011 07:00:39 -0800 Subject: Diffusion Morning Report 01/14/11 Message-ID: <4D306517.4010702@stanford.edu> Good Morning All, Looking OK this morning. Tylan 2 is ready for a test after tube clean. Tylan needs tube adjusted. Thermco Poly2 pump should be back early next week. Thermco Nitride waiting for TC. Thermco LTO has a leak. SEM 4160 tilt not working. Epi has pressure issues. Tylan 1 MFS 460 is out for repair should be back early next week. No other issues at this time. Date: 1/14/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *MFS 460 issues-out for repair* ** ** *4* Tylan 2 *down* *needs test* ** ** *2* Tylan 3 *up* ** ** ** ** Tylan 4 *down* *tube moved* ** ** *1* Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *.72/30* ** ** Tylan 10-Nitride *up* ** *21.57/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *20.89/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *down* *Pump out for repair* ** ** ** Thermco Nitride1 *down* *waiting TC-ordered* ** ** ** Thermco bpsg *down* *leak* ** ** ** AMAT Epi *yellow* *pressure issues* ** ** *3* TEL Spa *up* * * ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 326 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jan 18 06:13:29 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 18 Jan 2011 06:13:29 -0800 Subject: Diffusion Morning Report 01/18/11 Message-ID: <4D35A009.2040405@stanford.edu> Good Morning All, Looking good this morning. Ray is out sick today. Tylan 4 is a bit thin on wet ox. Epi had some pressure control issues. Thermco Poly 2 pump is supposed to be back today. Thermco Nitride TC should arrive this week. Thermco LTO has a leak. SEM 4160 has a tilt issue. Ebeam compressor is dead. No other issues at this time. Date: 1/18/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin wet* ** ** *3* Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *.72/30* ** ** Tylan 10-Nitride *up* ** *21.57/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *21.09/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *down* *Pump out for repair* ** ** *2* Thermco Nitride1 *down* *waiting TC-ordered* ** ** ** Thermco bpsg *down* *leak* ** ** ** AMAT Epi *yellow* *pressure issues* ** ** *1* TEL Spa *up* * * ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 326 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jan 19 06:51:39 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 19 Jan 2011 06:51:39 -0800 Subject: Diffusion Morning report 01/`19/11 Message-ID: <4D36FA7B.1030505@stanford.edu> Good morning All, Looking good this morning . Thermco Poly2 pump is back-will install. Tylan 4 is thin on wetox. Epi 2 has intermittent pressure issues. Thermco Nitride waiting for TC.Thermco LTO has a leak. SEM 4160 has tilt problem. No other issues at this time. Date: 1/19/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin wet* ** ** *3* Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *2.47/30* ** ** Tylan 10-Nitride *up* ** *22.05/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *21.16/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *down* *pump back will install* ** ** *1* Thermco Nitride1 *down* *waiting TC-ordered* ** ** ** Thermco bpsg *down* *leak* ** ** ** AMAT Epi *yellow* *pressure issues* ** ** *2* TEL Spa *up* * * ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 326 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jan 20 06:34:11 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 20 Jan 2011 06:34:11 -0800 Subject: Diffusion Morning Report 01/21/11 Message-ID: <4D3847E3.2070200@stanford.edu> Good Morning All, Looking good this morning. Tylan 1 MFS460 had issues again-returned to vendor. Epi has pressure control issues. Thermco Poly 2 pump is back and being installed. thermco Nitride TC is ordered waiting Thermco LTO has a leak. SEM 4160 has tilt issues Tylan4 thin wet ox. Ebeam compressor is dead. No other major issues at this time. Date: 1/20/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *out for re-repair* ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin wet* ** ** *3* Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *2.47/30* ** ** Tylan 10-Nitride *up* ** *22.05/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *21.16/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *down* *pump back will install* ** ** *2* Thermco Nitride1 *down* *waiting TC-ordered* ** ** ** Thermco bpsg *down* *leak* ** ** ** AMAT Epi *yellow* *pressure issues* ** ** *1* TEL Spa *up* * * ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 249 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jan 21 06:24:33 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 21 Jan 2011 06:24:33 -0800 Subject: Diffusion Morning Report 01/21/11 Message-ID: <4D399721.9010002@stanford.edu> Good Morning All, Looking OK this morning. Epi 2 is having pressure control issues. Tylan 1 460 out for repair. Tylan 4 still thin on wet ox. SEM 4160 is having tilt issues. Thermco Poly 2 has a broken TC sheath. Thermco Nitride waiting for TC. Ebeam cryo compressor is dead. Thermco 2 no TLC flow. Thermco LTO has a leak. no other issues at this time. Date: 1/21/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *out for re-repair* ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin wet* ** ** *2* Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *2.57/30* ** ** Tylan 10-Nitride *up* ** *22.05/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *21.16/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *down* *broken tc sheath* ** ** *3* Thermco Nitride1 *down* *waiting TC-ordered* ** ** ** Thermco bpsg *down* *leak* ** ** ** AMAT Epi *yellow* *pressure issues* ** ** *1* TEL Spa *up* * * ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 249 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jan 24 06:12:14 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 24 Jan 2011 06:12:14 -0800 Subject: Diffusion Morning Report 01/24/11 Message-ID: <4D3D88BE.2060607@stanford.edu> Good MorningAll, Looking good this morning. TC for Thermco Nitride is here, we will be installing it. Thermco Poly2 is back together and needs a test. Thermco LTO has a leak. Epi 2 has pressure control issues. Tylan 1 MFS 460 is out for repair. Tylan4 had a temp cal Friday and needs a test. Ebeam compressor is dead. no other major issues at this time. Date: 1/24/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *out for re-repair* ** ** *4* Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin wet* ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *2.8/30* ** ** Tylan 10-Nitride *up* ** *22.05/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *21.16/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *yellow* *needs test* ** ** *3* Thermco Nitride1 *down* *tc here will be installed* ** ** *2* Thermco bpsg *down* *leak* ** ** ** AMAT Epi *yellow* *pressure issues* ** ** *1* TEL Spa *up* * * ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 249 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jan 25 06:16:17 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 25 Jan 2011 06:16:17 -0800 Subject: Diffusion Morning Report 01/25/11 Message-ID: <4D3EDB31.1050805@stanford.edu> Good Morning All, Looking OK this morning. Tel has a stuck wafer. Epi 2 has pressure control issues. Tylan 1 and 2 down for MFS issues. Thermco Nitride TC coming back. Thermco LTO has a leak. SEM 4160 has tilt issue. Tylan 4 is thin on wet ox. Ebeam compressor is dead. No other issues at this time. Date: 1/25/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *out for re-repair* ** ** ** Tylan 2 *down* *lo o2 mfc not zero* ** ** *1* Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin wet* ** ** *3* Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *2.8/30* ** ** Tylan 10-Nitride *up* ** *22.6/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *21.16/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *tc here will be installed* ** ** *4* Thermco bpsg *down* *leak* ** ** ** AMAT Epi *yellow* *pressure issues* ** ** *2* TEL Spa *down* *wafer inside* ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 249 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jan 26 06:23:45 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 26 Jan 2011 06:23:45 -0800 Subject: Diffusion Morning Report 01/26/11 Message-ID: <4D402E71.50502@stanford.edu> Good Morning All, Looking OK this morning. Replacing the pump on Epi2. Tylan 1 controller is back wlii install and test. TC for Thermco Nitride should be back today. SEM 4160 has tilt issues and tip issues-calling FS.Thermco LTO has a leak. Ebeam compressor is dead. No other major issues at this time. Date: 1/26/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *controller is back will install* ** ** *2* Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin wet* ** ** *4* Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *2.8/30* ** ** Tylan 10-Nitride *up* ** *22.6/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *21.21/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *tc here will be installed* ** ** *3* Thermco bpsg *down* *leak* ** ** ** AMAT Epi *down* *pump replacement* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 249 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jan 27 06:42:34 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 27 Jan 2011 06:42:34 -0800 Subject: Diffusion Morning Report 01/27/11 Message-ID: <4D41845A.5040206@stanford.edu> Good Morning All, Looking good this morning. Tylan 2 and 4 have thin oxide. Thermco Niotride TC should be back today. Thermco LTO has a leak. SEM4160-tip ordered. No other issues at this time. Date: 1/27/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin wet* ** ** *1* Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** Tylan 9-Poly *up* ** *3.8/30* ** ** Tylan 10-Nitride *up* ** *22.6/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *21.21/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *tc here will be installed* ** ** *2* Thermco bpsg *down* *leak* ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 249 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jan 28 08:37:07 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 28 Jan 2011 08:37:07 -0800 Subject: Diffusion Morning Report 01/28/11 Message-ID: <4D42F0B3.5080305@stanford.edu> Good morning All, Looking good this morning. Thermco Nitride TC is installed- needs test. Tylan LTO had broken sheaths-back together. Tip for 4160 SEM is ordered. Looking into furnace thickness differences. Cryo compressor for ebeam is dead. No other issues at this time. > Date: 1/282011 THICKNESS-Change at Priority > Tube Name/Number Status > Tylan 1 *up* ** ** ** ** > Tylan 2 *up* ** ** ** ** > Tylan 3 *up* ** ** ** *2* > Tylan 4 *yellow* *thin wet* ** ** ** > Tylan 5-BBr3 *up* ** ** ** ** > Tylan 6-POCl3 *up* ** ** ** ** > Tylan 7-TEOS2 *up* ** *.25/30* ** ** > Tylan 8-SiGe *yellow* *pull and clean done-needs test* *0/30* ** ** > Tylan 9-Poly *up* ** *4.85/30* ** ** > Tylan 10-Nitride *up* ** *22.66/30* ** ** > Tylan 11-LTO *down* *Broken cantilever sheaths* *21.24/30* ** *1* > Tylan 12-FGA *up* * > * ** ** ** > Thermco 1 *up* ** ** ** ** > Thermco 2 *up* ** ** ** ** > Thermco 3 *future* ** ** ** ** > Thermco4 *future* ** ** ** ** > Thermco Poly1 *up* ** ** ** ** > Thermco Poly2 *up* ** ** ** ** > Thermco Nitride1 *yellow* *tc installed, heating up, needs test* > ** ** *3* > Thermco bpsg *down* *leak* ** ** ** > AMAT Epi *yellow* ** ** ** ** > TEL Spa *up* ** ** ** ** > Burn Box *up* ** ** ** ** > Ebeam *down* *cryo compresssor dead* ** ** ** > ZYGO *up* * > * ** ** ** > FGA2 *up* ** ** ** ** > SiH4 for furnaces ** *A on line 169 PSI* *changeover working > well* ** ** > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jan 31 06:13:31 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 31 Jan 2011 06:13:31 -0800 Subject: Diffusion Morning Report 01/31/11 Message-ID: <4D46C38B.6040609@stanford.edu> Good Morning All, Looking Ok this morning. Epi is having pump and Monitor issues. Thermco Nitride needs a test. SEM 4160 New tip is ordered and will be installed when it arrives. Tylan LTo needs test. Thermco LTO has a leak. Ebeam compressor is dead. Tylan 4 has thin wet ox. No other major issues at this time. Date: 1/31/11 THICKNESS-Change at Priority Tube Name/Number Status *Tylan 1* *up* ** ** ** ** *Tylan 2* *up* ** ** ** ** *Tylan 3* *up* ** ** ** ** *Tylan 4* *yellow* *thin wet* ** ** ** *Tylan 5-BBr3* *up* ** ** ** ** *Tylan 6-POCl3* *up* ** ** ** ** *Tylan 7-TEOS2* *up* ** *.25/30* ** ** *Tylan 8-SiGe* *yellow* *pull and clean done-needs test* *0/30* ** ** *Tylan 9-Poly* *up* ** *4.85/30* ** ** *Tylan 10-Nitride* *up* ** *24.72/30* ** ** *Tylan 11-LTO* *yellow* *mfs alarms-needs test* *23.64/30* ** *1* *Tylan 12-FGA* *up* * * ** ** ** *Thermco 1* *up* ** ** ** ** *Thermco 2* *up* ** ** ** ** *Thermco 3* *future* ** ** ** ** *Thermco4* *future* ** ** ** ** *Thermco Poly1* *up* ** ** ** ** *Thermco Poly2* *up* ** ** ** ** *Thermco Nitride1* *yellow* *needs test* ** ** *3* *Thermco bpsg* *down* *leak* ** ** ** *AMAT Epi* *yellow* *monitor and pump issue* ** ** *2* *TEL Spa* *up* ** ** ** ** *Burn Box* *up* ** ** ** ** *Ebeam* *down* *cryo compresssor dead* ** ** ** *ZYGO* *up* * * ** ** ** *FGA2* *up* ** ** ** ** *SiH4 for furnaces* ** *A on line 249 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... 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