Diffusion Morning Report 01/05/11

Ted Berg tberg at stanford.edu
Wed Jan 5 06:32:27 PST 2011


Good Morning All,
     Still recovering from the shutdown. Epi lamps were changed 
yesterday- checking it out. Tylan poly is aborting recipes-looking into 
reason. Tylans 1 and 2 have MFS460 errors. Thermco poly 1 had procedure 
error. Thermco Poly 2 pump out for repair. Thermco nitride waiting for a 
TC. Thermco LTO has a leak. SiGe tube replaced. Enough problems for now.

					
	Date: 	1/5/11 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*down* 	*MFS 460 issues-out for repair* 	** 	** 	**
Tylan 2 	*down* 	*mfs issues* 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*yellow* 	*thin* 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*up* 	** 	*.25/30* 	** 	**
Tylan 8-SiGe 	*down* 	*pull and clean* 	*0/30* 	** 	**
Tylan 9-Poly 	*down* 	*aborting program* 	*.42/30* 	** 	**
Tylan 10-Nitride 	*up* 	** 	*21.22/30* 	** 	**
Tylan 11-LTO 	*yellow* 	*mfs alarms* 	*18.26/30* 	** 	**
Tylan 12-FGA 	*up* 	*
* 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*future* 	** 	** 	** 	**
Thermco4 	*future* 	** 	** 	** 	**
Thermco Poly1 	*down* 	*procedure error* 	** 	** 	**
Thermco Poly2 	*down* 	*Pump out for repair* 	** 	** 	**
Thermco Nitride1 	*down* 	*waiting TC-ordered* 	** 	** 	**
Thermco bpsg 	*down* 	*leak* 	** 	** 	**
AMAT Epi 	*down* 	*Lamps changed-checking it out* 	** 	** 	**
TEL Spa 	*up* 	*
* 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
Ebeam 	*down* 	*computer issues* 	** 	** 	**
ZYGO 	*up* 	*
* 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	** 	*A on line 461 PSI* 	*changeover working 
well* 	** 	**


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