Diffusion Morning report 01/`19/11

Ted Berg tberg at stanford.edu
Wed Jan 19 06:51:39 PST 2011


Good morning All,
     Looking good this morning . Thermco Poly2 pump is back-will 
install. Tylan 4 is thin on wetox. Epi 2 has intermittent pressure 
issues. Thermco Nitride waiting for TC.Thermco LTO has a leak. SEM 4160 
has tilt problem. No other issues at this time.

					
	Date: 	1/19/11 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*yellow* 	*thin wet* 	** 	** 	*3*
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*up* 	** 	*.25/30* 	** 	**
Tylan 8-SiGe 	*yellow* 	*pull and clean done-needs test* 	*0/30* 	** 	**
Tylan 9-Poly 	*up* 	** 	*2.47/30* 	** 	**
Tylan 10-Nitride 	*up* 	** 	*22.05/30* 	** 	**
Tylan 11-LTO 	*yellow* 	*mfs alarms* 	*21.16/30* 	** 	**
Tylan 12-FGA 	*up* 	*
* 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*future* 	** 	** 	** 	**
Thermco4 	*future* 	** 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	** 	**
Thermco Poly2 	*down* 	*pump back will install* 	** 	** 	*1*
Thermco Nitride1 	*down* 	*waiting TC-ordered* 	** 	** 	**
Thermco bpsg 	*down* 	*leak* 	** 	** 	**
AMAT Epi 	*yellow* 	*pressure issues* 	** 	** 	*2*
TEL Spa 	*up* 	*
* 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
Ebeam 	*down* 	*cryo compresssor dead* 	** 	** 	**
ZYGO 	*up* 	*
* 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	** 	*A on line 326 PSI* 	*changeover working 
well* 	** 	**




-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20110119/5a858071/attachment.html>


More information about the diffusion mailing list