Diffusion Morning Report 01/25/11

Ted Berg tberg at stanford.edu
Tue Jan 25 06:16:17 PST 2011


Good Morning All,
     Looking OK this morning. Tel has a stuck wafer. Epi 2 has pressure 
control issues. Tylan 1 and 2 down for MFS issues. Thermco Nitride TC 
coming back. Thermco LTO has a leak. SEM 4160 has tilt issue. Tylan 4 is 
thin on wet ox. Ebeam compressor is dead. No other issues at this time.

					
	Date: 	1/25/11 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*down* 	*out for re-repair* 	** 	** 	**
Tylan 2 	*down* 	*lo o2 mfc not zero* 	** 	** 	*1*
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*yellow* 	*thin wet* 	** 	** 	*3*
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*up* 	** 	*.25/30* 	** 	**
Tylan 8-SiGe 	*yellow* 	*pull and clean done-needs test* 	*0/30* 	** 	**
Tylan 9-Poly 	*up* 	** 	*2.8/30* 	** 	**
Tylan 10-Nitride 	*up* 	** 	*22.6/30* 	** 	**
Tylan 11-LTO 	*yellow* 	*mfs alarms* 	*21.16/30* 	** 	**
Tylan 12-FGA 	*up* 	*
* 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*future* 	** 	** 	** 	**
Thermco4 	*future* 	** 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	** 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*down* 	*tc here will be installed* 	** 	** 	*4*
Thermco bpsg 	*down* 	*leak* 	** 	** 	**
AMAT Epi 	*yellow* 	*pressure issues* 	** 	** 	*2*
TEL Spa 	*down* 	*wafer inside* 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
Ebeam 	*down* 	*cryo compresssor dead* 	** 	** 	**
ZYGO 	*up* 	*
* 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	** 	*A on line 249 PSI* 	*changeover working 
well* 	** 	**


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