Diffusion Morning Report 01/28/11

Ted Berg tberg at stanford.edu
Fri Jan 28 08:37:07 PST 2011


Good morning All,
     Looking good this morning. Thermco Nitride TC is installed- needs 
test. Tylan LTO had broken sheaths-back together. Tip for 4160 SEM is 
ordered. Looking into furnace thickness differences. Cryo compressor for 
ebeam is dead. No other issues at this time.

> 	Date: 	1/282011 	THICKNESS-Change at 		Priority
> Tube Name/Number 	Status 				
> Tylan 1 	*up* 	** 	** 	** 	**
> Tylan 2 	*up* 	** 	** 	** 	**
> Tylan 3 	*up* 	** 	** 	** 	*2*
> Tylan 4 	*yellow* 	*thin wet* 	** 	** 	**
> Tylan 5-BBr3 	*up* 	** 	** 	** 	**
> Tylan 6-POCl3 	*up* 	** 	** 	** 	**
> Tylan 7-TEOS2 	*up* 	** 	*.25/30* 	** 	**
> Tylan 8-SiGe 	*yellow* 	*pull and clean done-needs test* 	*0/30* 	** 	**
> Tylan 9-Poly 	*up* 	** 	*4.85/30* 	** 	**
> Tylan 10-Nitride 	*up* 	** 	*22.66/30* 	** 	**
> Tylan 11-LTO 	*down* 	*Broken cantilever sheaths* 	*21.24/30* 	** 	*1*
> Tylan 12-FGA 	*up* 	*
> * 	** 	** 	**
> Thermco 1 	*up* 	** 	** 	** 	**
> Thermco 2 	*up* 	** 	** 	** 	**
> Thermco 3 	*future* 	** 	** 	** 	**
> Thermco4 	*future* 	** 	** 	** 	**
> Thermco Poly1 	*up* 	** 	** 	** 	**
> Thermco Poly2 	*up* 	** 	** 	** 	**
> Thermco Nitride1 	*yellow* 	*tc installed, heating up, needs test* 
> ** 	** 	*3*
> Thermco bpsg 	*down* 	*leak* 	** 	** 	**
> AMAT Epi 	*yellow* 	** 	** 	** 	**
> TEL Spa 	*up* 	** 	** 	** 	**
> Burn Box 	*up* 	** 	** 	** 	**
> Ebeam 	*down* 	*cryo compresssor dead* 	** 	** 	**
> ZYGO 	*up* 	*
> * 	** 	** 	**
> FGA2 	*up* 	** 	** 	** 	**
> SiH4 for furnaces 	** 	*A on line 169 PSI* 	*changeover working 
> well* 	** 	**
>



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