From tberg at stanford.edu Fri Jul 1 06:20:48 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 01 Jul 2011 06:20:48 -0700 Subject: Diffusion Morning Report 07/01/11 Message-ID: <4E0DC9B0.4020005@stanford.edu> Good Morning All, Looking good this morning. TEOS not pumping. Thermco 1 has low growth rate. Thermco 2 has no TLC flow. Thermco Nitride has higher dep pressure than before. no other issues at this time. Date: 7/1/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *won't pump* *0/30* ** *1* Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *22.3/30* ** ** Tylan 10-Nitride *up* ** *17.6/30* ** ** Tylan 11-LTO *up* ** *10.4/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *down* *low growth rate* ** ** *2* Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 938 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Tue Jul 5 07:27:50 2011 From: rseymour at stanford.edu (Ray Seymour) Date: Tue, 05 Jul 2011 07:27:50 -0700 Subject: Diffusion Morning Report Message-ID: <4E131F66.2060504@stanford.edu> Good Morning All, Ted is out today. Thermco 1 has low growth rate. Thermco 2 has no TLC flow. Thermco Nitride has higher dep pressure than before. TEOS needs testing after repair. Date: 7/5/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* * * *0/30* ** * * Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *22.13/30* ** ** Tylan 10-Nitride *up* ** *17.6/30* ** ** Tylan 11-LTO *up* ** *10.51/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *down* *low growth rate* ** ** * * Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 944 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jul 6 06:56:10 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 06 Jul 2011 06:56:10 -0700 Subject: diffusion Morning Report 07/06/11 Message-ID: <4E14697A.2010406@stanford.edu> Good Morning All, Looking good this morning. Hanging the new chamber on epi today through Friday. TEOS has door issues. Thermco 2 has no TLC flow. Thermco Nitride has higher dep pressure than previous. No other issues at this time. Date: 7/6/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *door stuck* *10.4/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *22.3/30* ** ** Tylan 10-Nitride *up* ** *17.6/30* ** ** Tylan 11-LTO *up* ** *15.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *hanging chamber* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 938 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jul 7 06:04:01 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 07 Jul 2011 06:04:01 -0700 Subject: Diffusion Morning Report 07/07/11 Message-ID: <4E15AEC1.8080905@stanford.edu> Good Morning All, Looking good this morning. Epi is down, main chamber is installed working on electrical. Thermco 2 no TLC flow. Thermco Nitride higher dep pressure than before. No other issues at this time. Date: 7/7/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 10.4/30 Tylan 8-SiGe up 1.94/30 Tylan 9-Poly up 22.3/30 Tylan 10-Nitride up 17.6/30 Tylan 11-LTO up 15.3/30 Tylan 12-FGA up Thermco 1 up Thermco 2 yellow no tlc flow Thermco 3 future Thermco4 future Thermco Poly1 up up Thermco Nitride1 yellow pressure issues Thermco bpsg up AMAT Epi down hanging chamber TEL Spa up Burn Box up Ebeam down cryo compresssor dead ZYGO up FGA2 up SiH4 for furnaces B on line pressure 938 psi changeover working well From tberg at stanford.edu Fri Jul 8 06:15:01 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 08 Jul 2011 06:15:01 -0700 Subject: Diffusion Morning Report 07/08/11 Message-ID: <4E1702D5.6040604@stanford.edu> Looking good this morning. Epi second chamber work is progressing. tylan 2 had a TCU error. Thermco 2 has no TLC flow. Thermco nitride has higher dep rate than previous. SEM 4160 has rotation errors. No other issues at this time. Date: 7/7/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *tcu error 2* ** ** *1* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.93/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *22.3/30* ** ** Tylan 10-Nitride *up* ** *17.6/30* ** ** Tylan 11-LTO *up* ** *15.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *hanging chamber* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 938 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jul 11 06:32:30 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 11 Jul 2011 06:32:30 -0700 Subject: Diffusion Morning Report 07/11/11 Message-ID: <4E1AFB6E.5080606@stanford.edu> Good Morning All, Looking good this morning. DCS had tripped excess flow-reset. TEOS and tylan nitride wont pass leak check.Thermco 2 no TLC flow. Thermco Nitride highr dep pressure than before. No other issues at this time. Date: 7/11/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *wont pass leak* *1.0/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *22.45/30* ** ** Tylan 10-Nitride *down* *wont pass leak* *17.6/30* ** ** Tylan 11-LTO *up* ** *18.8/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 938 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jul 12 06:16:46 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 12 Jul 2011 06:16:46 -0700 Subject: Diffusion Morning Report 07/12/11 Message-ID: <4E1C493E.70609@stanford.edu> Good Morning All, Looking good this morning. Thermco 2 has no TLC flow. Thermco Nitride has higher dep pressure than previous. tylan Nitride has door close issues. No other issues at this time. Date: 7/11/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *1.0/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *22.45/30* ** ** Tylan 10-Nitride *yellow* *have to push door* *17.6/30* ** ** Tylan 11-LTO *up* ** *20.11/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 938 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Wed Jul 13 07:42:33 2011 From: rseymour at stanford.edu (Ray Seymour) Date: Wed, 13 Jul 2011 07:42:33 -0700 Subject: Diffusion Morning Report Message-ID: <4E1DAED9.90902@stanford.edu> Good Morning All, Ted is out today. Thermco 2 has no TLC flow. Thermco Nitride has higher dep pressure than previous. tylan Nitride has door close issues. No other issues at this time. Date: 7/13/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *2.0/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *22.6/30* ** ** Tylan 10-Nitride *yellow* *have to push door* *17.6/30* ** ** Tylan 11-LTO *up* ** *20.11/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 938 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jul 14 07:22:08 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 14 Jul 2011 07:22:08 -0700 Subject: Diffusion morning Report 07/14/11 Message-ID: <4E1EFB90.6080408@stanford.edu> Good Morning All, Looking good this morning. TEOS has Lo N2 flow issues. thermco 2 has an open junction on profile TC. Tylan Nitride has door close issue. SEM 4160 has a broken wafer in load area. Thermco Nitride has higher dep pressure than previous. No other issues at this time. Date: 7/14/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down n2 flow problem 1.0/30 Tylan 8-SiGe up 1.94/30 Tylan 9-Poly up 22.45/30 Tylan 10-Nitride yellow have to push door 17.6/30 Tylan 11-LTO up 20.11/30 Tylan 12-FGA up Thermco 1 up Thermco 2 down Profile TC has open junction Thermco 3 future Thermco4 future Thermco Poly1 up up Thermco Nitride1 yellow pressure issues Thermco bpsg up AMAT Epi up TEL Spa up Burn Box up Ebeam down cryo compresssor dead ZYGO up FGA2 up SiH4 for furnaces B on line pressure 938 psi changeover working well From tberg at stanford.edu Fri Jul 15 07:24:43 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 15 Jul 2011 07:24:43 -0700 Subject: Diffusion Morning Report 07/15/11 Message-ID: <4E204DAB.4070702@stanford.edu> Good Morning All, Looking good this morning. Tylan4 has a N2 leak. Tylan Nitride still has door close issues. Thermco Nitride has highe dep pressure than previous. Thermco 2 no TLC flow. Burn box clean this morning. No other issues at this time. Date: 7/15/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *N2 leak* ** ** *1* Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *1.0/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *22.6/30* ** ** Tylan 10-Nitride *yellow* *have to push door* *17.6/30* ** *2* Tylan 11-LTO *up* ** *23.5/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 907 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jul 18 06:53:02 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 18 Jul 2011 06:53:02 -0700 Subject: Diffusion Morning report 07/18/11 Message-ID: <4E243ABE.5070108@stanford.edu> Good Morning All, Looking good this morning. HCL for Epi is empty-cylinder changed and in leak check.. FGA2 elephant is broken. Thermco 2 no TLC flow. Thermco nitride pressure is higher than before. No other issues at this time. Date: 7/18/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *2.32/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *22.6/30* ** ** Tylan 10-Nitride *up* ** *17.6/30* ** ** Tylan 11-LTO *up* ** *24.45/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *HCl cylinder changed in leak check* ** ** * 1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *yellow* *broken elephant* ** ** * 2* SiH4 for furnaces ** *B on line pressure 907 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jul 19 07:07:10 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 19 Jul 2011 07:07:10 -0700 Subject: Diffusion Morning Report 07/19/11 Message-ID: <4E258F8E.6050105@stanford.edu> Good Morning All, Looking good this morning. A couple of temp problems with furnaces. Thermco 2 is having difficulties getting stabilized. Tylan nitride had load zone reading 400. Thermco nitride has higher pressure than previous. FGA2 elephant out for repair. No other issues at this time. Date: 7/19/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *2.32/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *22.6/30* ** ** Tylan 10-Nitride *down* *temp issues* *17.76/30* ** ** Tylan 11-LTO *up* ** *24.49/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow-temp issues?* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *yellow* *broken elephant-out for repair* ** ** ** SiH4 for furnaces ** *B on line pressure 907 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jul 20 06:17:30 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 20 Jul 2011 06:17:30 -0700 Subject: Diffusion Morning Report 07/20/11 Message-ID: <4E26D56A.4040807@stanford.edu> Good Mrning All, Looking good this morning. Tylan LTO had thin dep and pump issues. thermco 2 no TLC flow Thermco Nitride had higher dep pressure than previous. No other issues at this time Date: 7/20/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *2.32/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *22.7/30* ** ** Tylan 10-Nitride *up* ** *19.07/30* ** ** Tylan 11-LTO *down* *thickness issues* *24.49/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow-temp issues?* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *yellow* *broken elephant-out for repair* ** ** ** SiH4 for furnaces ** *B on line pressure 907 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jul 21 06:24:56 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 21 Jul 2011 06:24:56 -0700 Subject: Diffusion Morning Report 07/21/11 Message-ID: <4E2828A8.9030305@stanford.edu> Good Morning All, Looking good this morning. Thermco 2 had no TLC flow. Thermco nitride had higher dep pressure than previous. Zygo is disconnected from network due to a virus. No other issues at this time. Date: 7/21/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** Tylan 2 *up* ** ** ** Tylan 3 *up* ** ** ** Tylan 4 *up* ** ** ** Tylan 5-BBr3 *up* ** ** ** Tylan 6-POCl3 *up* ** ** ** Tylan 7-TEOS2 *up* ** *2.32/30* ** Tylan 8-SiGe *up* ** *1.94/30* ** Tylan 9-Poly *up* ** *22.7/30* ** Tylan 10-Nitride *up* ** *19.07/30* ** Tylan 11-LTO *yellow* *users have run with no reported problem* *24.54/30* ** Tylan 12-FGA *up* ** ** ** Thermco 1 *up* ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** Thermco 3 *future* ** ** ** Thermco4 *future* ** ** ** Thermco Poly1 *up* * * ** ** *up* ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** Thermco bpsg *up* ** ** ** AMAT Epi *up* ** ** ** TEL Spa *up* ** ** ** Burn Box *up* ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ZYGO *up* *network disabled* ** ** FGA2 *up* *end cap unstuck* ** ** SiH4 for furnaces ** *B on line pressure 907 psi* *changeover working well* ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jul 22 06:17:30 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 22 Jul 2011 06:17:30 -0700 Subject: Diffusion Morning Report 07/22/11 Message-ID: <4E29786A.8050708@stanford.edu> Good Morning All, Looking good this morning. Tylan 2 had temp issues. Thermco 2 had no TLC flow. thermco Nitride had higher than previous dep pressure. No other issues at this time. Burn box clean this morning. Date: 7/22/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *source zone reading low* ** ** *1* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *2.32/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *22.7/30* ** ** Tylan 10-Nitride *up* ** *19.07/30* ** ** Tylan 11-LTO *yellow* ** *24.54/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* *network disabled* ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 907 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jul 25 06:58:12 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 25 Jul 2011 06:58:12 -0700 Subject: Diffusion Mornin g Report 07/25/11 Message-ID: <4E2D7674.4010906@stanford.edu> Good Morning All, Looking good this morning. Tylan LTO down for scheduled pull and clean Tylan Nitride is down for pumping issues. Thermco 2 no TLC flow. Thermco Nitride has higher dep pressure than previous. No other issues at this time. Date: 7/25/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *2.32/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *26.87/30* ** ** Tylan 10-Nitride *down* *Pumping issues* *19.07/30* ** ** Tylan 11-LTO *down* *pull and clean* *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* *network disabled* ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 907 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Tue Jul 26 07:15:29 2011 From: rseymour at stanford.edu (Ray Seymour) Date: Tue, 26 Jul 2011 07:15:29 -0700 Subject: Diffusion Morning Report Message-ID: <4E2ECC01.5030802@stanford.edu> Good Morning All, Ted is out today. Tylan LTO down for scheduled pull and clean Tylan Nitride needs a test after repair. Thermco 2 no TLC flow. Thermco Nitride has higher dep pressure than previous. No other issues at this time. Date: 7/25/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *2.32/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *26.87/30* ** ** Tylan 10-Nitride *yellow* * * *19.07/30* ** ** Tylan 11-LTO *down* *pull and clean* *0/30* ** * 1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* *network disabled* ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 907 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jul 27 06:56:49 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 27 Jul 2011 06:56:49 -0700 Subject: Diffusion Morning Report 07/27/11 Message-ID: <4E301921.7070001@stanford.edu> Good Morning All, looking good this morning. LTO is going back together after pull and clean. Epi is down for work on second chamber. FGA elephant is broken after only 2 days. Zygo computer is back after virus removal. Thermco 2 no tlc flow. Thermco nitride has higher pressure than previous. No other issues at this time. Date: 7/27/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *2.32/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *26.87/30* ** ** Tylan 10-Nitride *up* ** *19.07/30* ** ** Tylan 11-LTO *down* *pull and clean SiH4 flow issues* *0/30* ** *1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *chamber 2 work* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* *network disabled* ** ** ** FGA2 *yellow* *broken elephant- it lasted 2 days* ** ** ** SiH4 for furnaces ** *B on line pressure 907 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jul 28 06:35:44 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 28 Jul 2011 06:35:44 -0700 Subject: Diffusion Morning Report 07/28/11 Message-ID: <4E3165B0.6020301@stanford.edu> Good Morning All, Looking good this morning. Epi is down for work on second chamber. Tylan nitride is down for melted o-rings. FGA2 down for broken elephant-out for repair. Thermco 2 had no TLC flow. Thermco Nitride had higher dep pressure than previous. No other issues at this time. Date: 7/28/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *2.7/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *26.87/30* ** ** Tylan 10-Nitride *down* *melted o-rings* *19.07/30* ** *1* Tylan 11-LTO *yellow* *broken boat* *.47/30* ** *2* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *chamber 2 work* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* *network disabled* ** ** ** FGA2 *yellow* *broken elephant- it lasted 2 days* ** ** ** SiH4 for furnaces ** *B on line pressure 907 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jul 29 06:21:26 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 29 Jul 2011 06:21:26 -0700 Subject: Diffusion Morning Report 07/29/11 Message-ID: <4E32B3D6.7000302@stanford.edu> Good Morning All, Looking good this morning. Epi is down for second chamber work-most of our electrical is done. waiting on AMAT. Tylan Nitride is still down for leak issues. Elephants for FGA2 should be back today. Thermco 2 no TLC flow. Thermco Nitride higher than previous dep pressure. No other issues at this time. Date: 7/29/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *2.7/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *26.87/30* ** ** Tylan 10-Nitride *down* *melted o-rings* *20.34/30* ** *1* Tylan 11-LTO *up* ** *.47/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *chamber 2 work* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* *network disabled* ** ** ** FGA2 *yellow* *broken elephant- it lasted 2 days* ** ** ** SiH4 for furnaces ** *B on line pressure 907 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... 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