From tberg at stanford.edu Wed Jun 1 06:18:22 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 01 Jun 2011 06:18:22 -0700 Subject: Diffusion Morning Report 06/01/11 Message-ID: <4DE63C1E.9020200@stanford.edu> Good Morning All, Looking good this morning. Epi is the major issue this morning. Broken wafers in the transfer chamber. No TLC flow in thermco 2. No other issues at this time. Date: 6/1/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *4.13/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *12.7/30* ** ** Tylan 10-Nitride *up* ** *15.62/30* ** ** Tylan 11-LTO *up* ** *21.16/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *broken wafers* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 262 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jun 2 06:13:31 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 02 Jun 2011 06:13:31 -0700 Subject: Diffusion morning Report 06/02/11 Message-ID: <4DE78C7B.9010201@stanford.edu> Good Morning All, Looking good this morning. Tylan 2 failed wet qual-looking into it. thermco 2 no tlc flow. No other issues at this time. Date: 6/2/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *Failed wet qual* ** ** *1* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *4.32/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *12.7/30* ** ** Tylan 10-Nitride *up* ** *15.62/30* ** ** Tylan 11-LTO *up* ** *22.76/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 141 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jun 3 06:31:28 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 03 Jun 2011 06:31:28 -0700 Subject: Diffusion Morning Report 06/03/11 Message-ID: <4DE8E230.6050102@stanford.edu> Good Morning All. Looking good this morning. Epi Germane is low- please monitor before running. Tylan needs a test after melted o-ring change. Tylan 2 has torch issues. No other problems at this time. Date: 6/3/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *Failed wet qual-checking torch* ** ** *1* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *4.32/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *12.7/30* ** ** Tylan 10-Nitride *down* *needs test* *15.62/30* ** ** Tylan 11-LTO *up* ** *24.73/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 141 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jun 6 06:10:42 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 06 Jun 2011 06:10:42 -0700 Subject: Diffusion Morning Report 06/06/11 Message-ID: <4DECD1D2.4080208@stanford.edu> Good Morning All, Looking good this morning. TEOS had high pressure. Therrmco Nitride high pressure.Tylan 2 needs atest after torch change. Thermco 2 no tlc flow. no other issues at this time. Date: 6/6/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs test after torch change* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *pressure issues* *5.63/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *12.7/30* ** ** Tylan 10-Nitride *up* ** *15.88/30* ** ** Tylan 11-LTO *up* ** *24.96/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 113 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jun 7 06:41:20 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 07 Jun 2011 06:41:20 -0700 Subject: Diffusion Morning Report Message-ID: <4DEE2A80.5010308@stanford.edu> Good Morning All, Looking good this morning. Epi had dopant flow issues-B2H6 100PPM is low. TEOS has particle issues. Thermco Nitride had pressure control issues. Tylan 2 needs a test after torch change. Thermco 2 no TLC flow. No other issues at this time. Date: 6/7/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs test after torch change* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *PARTICLES* *6.7/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *12.7/30* ** ** Tylan 10-Nitride *up* ** *15.88/30* ** ** Tylan 11-LTO *up* ** *25.86/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *dopant flow issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 113 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jun 8 06:11:58 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 08 Jun 2011 06:11:58 -0700 Subject: Diffusion Morning Report 06/08/11 Message-ID: <4DEF751E.1090604@stanford.edu> Good Morning All, Looking good this morning. B2H6 for Epi should be here today. Tylan 2 testing after torch change. Thermco Nitride has higher dep pressure than previous. Thermco 2 no TLC flow. No other issues at this time. Date: 6/8/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs test after torch change* ** ** *1* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *6.7/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *12.7/30* ** ** Tylan 10-Nitride *up* ** *15.88/30* ** ** Tylan 11-LTO *up* ** *26.00/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *dopant flow issues* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 104 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jun 9 06:13:31 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 09 Jun 2011 06:13:31 -0700 Subject: Diffusion Morning Report 06/09/11 Message-ID: <4DF0C6FB.4090206@stanford.edu> Good Morning All, Looking good this morning. B2H6 passed leak check and is back on line. Tylan 2 has loader issues. Thermco Niotride has higher pressure during dep than previous. Thermco 2 no TLC flow. TGO testing this morning. No other issues at this time. Date: 6/9/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *down* *Loader issue* ** ** *1* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *6.7/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *12.7/30* ** ** Tylan 10-Nitride *up* ** *15.88/30* ** ** Tylan 11-LTO *up* ** *26.09/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 104 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Jun 10 08:48:04 2011 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 10 Jun 2011 08:48:04 -0700 Subject: Diffusion Morning Report Message-ID: <4DF23CB4.80205@stanford.edu> Good Morning All, Ted is out today. Tylan 2 has loader issues. Thermco Nitride has higher pressure during dep than previous. Thermco 2 no TLC flow. No other issues at this time. Date: 6/10/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *down* *Loader issue* ** ** *1* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *6.7/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *12.7/30* ** ** Tylan 10-Nitride *up* ** *16.07/30* ** ** Tylan 11-LTO *up* ** *28.14/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* *Cleaned this morning * ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 69 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jun 13 06:22:47 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 13 Jun 2011 06:22:47 -0700 Subject: Diffusion Morning Report 06/13/11 Message-ID: <4DF60F27.3040207@stanford.edu> Good Morning All, Looking good this morning. Epi has a stuck wafer. Tylan lto going down tomorrow for pull and clean. Tylan 2 has a loader issue. Thermco 2 has no TLC flow. No other issues at this time. Date: 6/13011 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *down* *Loader issue* ** ** *1* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *6.7/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *14.0/30* ** ** Tylan 10-Nitride *up* ** *16.01/30* ** ** Tylan 11-LTO *up* ** *28.14/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *stuck wafer* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 104 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jun 14 06:01:30 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 14 Jun 2011 06:01:30 -0700 Subject: Diffusion Morning Report 06/14/11 Message-ID: <4DF75BAA.9070005@stanford.edu> Good Morning All, Looking good this morning. Tylan LTo is down for scheduled Pull and clean. Tylan 2 waiting for loader burn chamber. Thermco 2 no TLC flow. Thermco nitride has higher than previous dep pressure. No other issues at this time. Date: 6/14011 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *down* *Loader issue* ** ** *2* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *6.7/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *18.0/30* ** ** Tylan 10-Nitride *up* ** *16.01/30* ** ** Tylan 11-LTO *down* *Scheduled pull and clean* *0/30* ** *1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 586 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jun 15 06:25:24 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 15 Jun 2011 06:25:24 -0700 Subject: Diffusion Morning Report 06/15/11 Message-ID: <4DF8B2C4.2000202@stanford.edu> Good Morning All, Looking good this morning. Tylan LTO is back up-great job Ray and Maurice. Tylan 2 waiting for burn chamber. Thermco 2 no TLC flow. Thermco Nitride had higher pressure than before. No other issues at this time. Date: 6/15/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *down* *Loader issue* ** ** *1* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *6.7/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *20.0/30* ** ** Tylan 10-Nitride *up* ** *16.01/30* ** ** Tylan 11-LTO *up* ** *1.68/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 938 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jun 16 06:06:03 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 16 Jun 2011 06:06:03 -0700 Subject: Diffusion Morning Report 06/16/11 Message-ID: <4DF9FFBB.6090107@stanford.edu> Good Morning All, Looking good this morning. Tylan 2 burn chamber installed , TLC clean completed-needs test. Thermco 2 No TLC. THermco Nitride higher than before pressure. No other problems at this time. Date: 6/16/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *down* *burn chamber replaced,Tlc clean completed* ** ** *1* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *6.7/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *20.0/30* ** ** Tylan 10-Nitride *up* ** *16.01/30* ** ** Tylan 11-LTO *up* ** *1.68/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 938 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jun 17 06:27:03 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 17 Jun 2011 06:27:03 -0700 Subject: Diffusion Morning Report 06/17/11 Message-ID: <4DFB5627.3030409@stanford.edu> Good morning All, Looking good this morning Tylan 2 is back up after burn chamber and torch change. Burn box clean this morning. Thermco 2 no TLC flow. Thermco Nitride has pressure issues. No other problems at this time. Date: 6/16/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* *test ok* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *6.7/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *22.0/30* ** ** Tylan 10-Nitride *up* ** *16.01/30* ** ** Tylan 11-LTO *up* ** *4.7/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 938 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jun 20 06:48:33 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 20 Jun 2011 06:48:33 -0700 Subject: Diffusion Morning Report 06/20/11 Message-ID: <4DFF4FB1.4010501@stanford.edu> Good morning All, Looking good this morning. Tylan 2 had poor uniformity. Thermco 1 low growth rate. Thermco 2 temp not stable. FIJI ALD inspection today-horns and strobes. THermco nitride higher pressure during dep. No other issues at this time. Date: 6/20/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 up Tylan 2 yellow poor uniformity Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 6.7/30 Tylan 8-SiGe up 1.94/30 Tylan 9-Poly up 22.0/30 Tylan 10-Nitride up 16.01/30 Tylan 11-LTO up 4.9/30 Tylan 12-FGA up Thermco 1 yellow Low growth rate Thermco 2 yellow no tlc flow Thermco 3 future Thermco4 future Thermco Poly1 up up Thermco Nitride1 yellow pressure issues Thermco bpsg up AMAT Epi up TEL Spa up Burn Box up Ebeam down cryo compresssor dead ZYGO up FGA2 up SiH4 for furnaces B on line pressure 938 psi changeover working well From tberg at stanford.edu Tue Jun 21 06:24:22 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 21 Jun 2011 06:24:22 -0700 Subject: Diffusion Morning Report 06/21/11 Message-ID: <4E009B86.2010706@stanford.edu> Good Morning All, Looking good this morning. The Thermco oxides had issues because the H2 was off during sensor testing from 10:30am until 1:15pm. Sorry for that problem . Epi was also down same reason. Thermco nitride has higher dep pressure. Tylan 2 needs a test. No other issues at this time. Date: 6/21/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *slightly low growth* ** ** ** Tylan 2 *yellow* *poor uniformity-needs test* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *6.7/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *22.0/30* ** ** Tylan 10-Nitride *up* ** *16.01/30* ** ** Tylan 11-LTO *up* ** *4.9/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *Low growth rate* ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 938 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jun 22 06:16:25 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 22 Jun 2011 06:16:25 -0700 Subject: Diffusion Morning Report 06/22/11 Message-ID: <4E01EB29.9010805@stanford.edu> Good Morning All, Looking good this morning. Thermco 2 has no TLC flow. Thermco Nitride has higher than before pressure. TEOS needs a test after canister change. No other issues at this time. Date: 6/22/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *TEOS canister changed* *6.7/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *22.0/30* ** ** Tylan 10-Nitride *up* ** *16.01/30* ** ** Tylan 11-LTO *up* ** *4.9/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* *Maurice's test looks normal* ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 938 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jun 23 06:47:55 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 23 Jun 2011 06:47:55 -0700 Subject: Diffusion Morning Report 06/23/11 Message-ID: <4E03440B.2070707@stanford.edu> Good Morning All, Looking good this morning. Thermco 2 has no TLC flow, Thermco Nitride has higher pressure than previous. No other major problems at this time. Date: 6/23/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *TEOS canister changed-needs test* *8.3/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *22.3/30* ** ** Tylan 10-Nitride *up* ** *16.21/30* ** ** Tylan 11-LTO *up* ** *7.07/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 938 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jun 24 06:24:31 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 24 Jun 2011 06:24:31 -0700 Subject: Diffusion Morning Report 06/24/11 Message-ID: <4E04900F.5020501@stanford.edu> Good Morning All, Looking good this morning. Epi's dome is coated and not coming clean. Thermco 1 has reported low growth rate. TEOS2 needs test after canister change. Thermco nitride has higher dep pressure than before. Thermco 2 no TLC flow. No other issues at this time. Date: 6/24/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *TEOS canister changed-needs test* *8.3/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *22.3/30* ** ** Tylan 10-Nitride *up* ** *16.21/30* ** ** Tylan 11-LTO *up* ** *8.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low growth rate* ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *dome coated* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 938 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jun 27 06:11:18 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 27 Jun 2011 06:11:18 -0700 Subject: Diffusion Morning Report 06/27/11 Message-ID: <4E088176.7000706@stanford.edu> Good Morning All, Looking good this morning. Epi is down waiting for the upper dome. SEM 4160 had trouble loading sample. Thermco 1 low growth rate. Thermco 2 no tlc flow. Thermco nitride dep pressure higher than previous. No otjher issues at this time. Date: 6/27/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *9.35/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *22.3/30* ** ** Tylan 10-Nitride *up* ** *16.51/30* ** ** Tylan 11-LTO *up* ** *8.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low growth rate* ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *dome cracked-on order* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 938 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jun 28 07:46:23 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 28 Jun 2011 07:46:23 -0700 Subject: Diffusion Morning Report 06/28/11 Message-ID: <4E09E93F.6050100@stanford.edu> Good Morning all, Looking good this morning. Dome for epi is installed and cycle purging(we borrowed one from the new kit). TEOS had pressure issues-checking it out. Thermco 2 no TLC flow. Thermco 1 low growth. CDA to the fab was off this morning so some tools may have been down. No other issues at this time. Date: 6/28/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *pressure issues* *10.14/30* ** *2* Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *22.3/30* ** ** Tylan 10-Nitride *up* ** *16.51/30* ** ** Tylan 11-LTO *up* ** *10.4/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low growth rate* ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *yellow* *pressure issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *dome installed-cycle purging* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 938 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jun 29 06:21:42 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 29 Jun 2011 06:21:42 -0700 Subject: Diffusion Morning Report 06/29/11 Message-ID: <4E0B26E6.8080809@stanford.edu> Good morning All, Looking good this morning. Epi had HCL flow issues. TEOS tube changed- going back together. LTO had low dep rate. Thermco 1 low growth rate-adjusting door. Thermco 2 no tlc flow. Thermco Nitride higher pressure during dep. Date: 6/29/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow tube change 0/30 2 Tylan 8-SiGe up 1.94/30 Tylan 9-Poly up 22.3/30 Tylan 10-Nitride up 16.51/30 Tylan 11-LTO yellow low dep rate 10.4/30 Tylan 12-FGA up Thermco 1 yellow low growth rate- Adjusted Door Thermco 2 yellow no tlc flow Thermco 3 future Thermco4 future Thermco Poly1 up up Thermco Nitride1 yellow pressure issues Thermco bpsg up AMAT Epi yellow HCL flow 1 TEL Spa up Burn Box up Ebeam down cryo compresssor dead ZYGO up FGA2 up SiH4 for furnaces B on line pressure 938 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Thu Jun 30 07:17:25 2011 From: rseymour at stanford.edu (Ray Seymour) Date: Thu, 30 Jun 2011 07:17:25 -0700 Subject: Diffusion Morning Report Message-ID: <4E0C8575.6050004@stanford.edu> Good morning All, Ted is out today LTO had low dep rate.Thermco 1 low growth rate-adjusting door. Thermco 2 no tlc flow. Thermco Nitride higher pressure during dep. Thermcopoly1 not pumping down. TEOS needs a test. Date: 6/30/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 Needs testing 0/30 2 Tylan 8-SiGe up 1.94/30 Tylan 9-Poly up 22.3/30 Tylan 10-Nitride up 17.61/30 Tylan 11-LTO down low dep rate 10.4/30 Tylan 12-FGA up Thermco 1 yellow low growth rate- Adjusted Door Thermco 2 yellow no tlc flow Thermco 3 future Thermco4 future Thermco Poly1 down Not pumping down up Thermco Nitride1 yellow pressure issues Thermco bpsg up AMAT Epi up 1 TEL Spa up Burn Box up Ebeam down cryo compresssor dead ZYGO up FGA2 up SiH4 for furnaces B on line pressure 929 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: