Diffusion Morning Report 06/14/11

Ted Berg tberg at stanford.edu
Tue Jun 14 06:01:30 PDT 2011


Good Morning All,
     Looking good this morning. Tylan LTo is down for scheduled Pull and 
clean. Tylan 2 waiting for loader burn chamber. Thermco 2 no TLC flow. 
Thermco nitride has higher than previous dep pressure. No other issues 
at this time.


					
	Date: 	6/14011 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*down* 	*Loader issue* 	** 	** 	*2*
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*up* 	** 	*6.7/30* 	** 	**
Tylan 8-SiGe 	*up* 	** 	*1.94/30* 	** 	**
Tylan 9-Poly 	*up* 	** 	*18.0/30* 	** 	**
Tylan 10-Nitride 	*up* 	** 	*16.01/30* 	** 	**
Tylan 11-LTO 	*down* 	*Scheduled pull and clean* 	*0/30* 	** 	*1*
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*yellow* 	*no tlc flow* 	** 	** 	**
Thermco 3 	*future* 	** 	** 	** 	**
Thermco4 	*future* 	** 	** 	** 	**
Thermco Poly1 	*up* 	*
* 	** 	** 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*yellow* 	*pressure issues* 	** 	** 	**
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi 	*up* 	** 	** 	** 	**
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
Ebeam 	*down* 	*cryo compresssor dead* 	** 	** 	**
ZYGO 	*up* 	*
* 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	** 	*B on line pressure 586 psi* 	*changeover working 
well* 	** 	**

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20110614/0307d22f/attachment.html>


More information about the diffusion mailing list