Diffusion Morning Report 06/17/11

[Ted Berg]

Good morning All,
     Looking good this morning Tylan 2 is back up after burn chamber and 
torch change. Burn box clean this morning. Thermco 2 no TLC flow. 
Thermco Nitride has pressure issues. No other problems at this time.

					
	Date: 	6/16/11 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*up* 	*test ok* 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*up* 	** 	*6.7/30* 	** 	**
Tylan 8-SiGe 	*up* 	** 	*1.94/30* 	** 	**
Tylan 9-Poly 	*up* 	** 	*22.0/30* 	** 	**
Tylan 10-Nitride 	*up* 	** 	*16.01/30* 	** 	**
Tylan 11-LTO 	*up* 	** 	*4.7/30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*yellow* 	*no tlc flow* 	** 	** 	**
Thermco 3 	*future* 	** 	** 	** 	**
Thermco4 	*future* 	** 	** 	** 	**
Thermco Poly1 	*up* 	*
* 	** 	** 	**
	*up* 	** 	** 	** 	**
Thermco Nitride1 	*yellow* 	*pressure issues* 	** 	** 	**
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi 	*up* 	** 	** 	** 	**
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
Ebeam 	*down* 	*cryo compresssor dead* 	** 	** 	**
ZYGO 	*up* 	*
* 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	** 	*B on line pressure 938 psi* 	*changeover working 
well* 	** 	**



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