From tberg at stanford.edu Wed Mar 2 07:55:55 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 02 Mar 2011 07:55:55 -0800 Subject: Diffusion morning Report 03/02/11 Message-ID: <4D6E688B.2090306@stanford.edu> Good Morning All, Looking OK this morning. Tylan 1 needs TLC clean after tube and quartz clean. Tylan FGA has Temp problems. Epi has intermittent lifter issues. TEOS has a leak. Tylan 4 had thin wet ox. Thermco LTO pump out for repair. Ebeam cryo compressor going out for repair. No other major issues at this time. Date: 3/2/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *tube replaced needs TLC clean* ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin ox* ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *leak* *.25/30* ** *2* Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *up* ** *11.67/30* ** ** Tylan 10-Nitride *yellow* *door close issue* *4.51/30* ** ** Tylan 11-LTO *up* *a bit thin* *15.75/30* ** ** Tylan 12-FGA *down* *temp problems* ** ** *1* Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *bad pump-out for repair* ** ** ** AMAT Epi *yellow* *watching handling* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor going out for repair* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line 224 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Mar 3 07:13:48 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 03 Mar 2011 07:13:48 -0800 Subject: Diffusion Morning Report 03/03/11 Message-ID: <4D6FB02C.7020302@stanford.edu> Good Morning All, Looking Ok this morning. Epi is the problem de jeur- handling. Thermco LTO pump out for repair. TEOS has a leak. Ebeam compressor going out for repair. Tylan 4 wet ox a bit thin. Thermco 2 no TLC. No other major problems at this time. Date: 3/3/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *thin ox* ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *leak* *.25/30* ** *2* Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *up* ** *11.67/30* ** ** Tylan 10-Nitride *yellow* *door close issue* *4.51/30* ** ** Tylan 11-LTO *up* *a bit thin* *15.75/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *bad pump-out for repair* ** ** ** AMAT Epi *down* *handling* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor going out for repair* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line 224 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Mar 4 08:49:49 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 04 Mar 2011 08:49:49 -0800 Subject: Diffusion Morning Report 03/04/11 Message-ID: <4D71182D.4080602@stanford.edu> Good Morning All, Looking good this morning .Thermco LTO and TEOs pumps are bad. Ebeam cryo compressor is going out for repair. Thermco 2 no TLC flow. Burn box cleaned this morning. No other major issues at this time. > > Date: 3/4/11 THICKNESS-Change at Priority > Tube Name/Number Status > Tylan 1 *up* ** ** ** ** > Tylan 2 *up* ** ** ** ** > Tylan 3 *up* ** ** ** ** > Tylan 4 *up* ** ** ** ** > Tylan 5-BBr3 *up* ** ** ** ** > Tylan 6-POCl3 *up* ** ** ** ** > Tylan 7-TEOS2 *down* *pump bad* *.25/30* ** ** > Tylan 8-SiGe *up* ** *.88/30* ** ** > Tylan 9-Poly *up* ** *11.67/30* ** ** > Tylan 10-Nitride *yellow* *door close issue* *4.51/30* ** ** > Tylan 11-LTO *up* *a bit thin* *15.75/30* ** ** > Tylan 12-FGA *up* ** ** ** ** > Thermco 1 *up* ** ** ** ** > Thermco 2 *yellow* *no tlc flow* ** ** ** > Thermco 3 *future* ** ** ** ** > Thermco4 *future* ** ** ** ** > Thermco Poly1 *up* ** ** ** ** > Thermco Poly2 *up* ** ** ** ** > Thermco Nitride1 *up* ** ** ** ** > Thermco bpsg *down* *bad pump-out for repair* ** ** ** > AMAT Epi *up* ** ** ** ** > TEL Spa *up* ** ** ** ** > Burn Box *up* ** ** ** ** > Ebeam *down* *cryo compresssor going out for repair* ** ** ** > ZYGO *up* * > * ** ** ** > FGA2 *up* ** ** ** ** > SiH4 for furnaces ** *B on line 224 PSI* *changeover working > well* ** ** > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Mar 7 06:25:33 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 07 Mar 2011 06:25:33 -0800 Subject: Diffusion Morning Report 03/07/11 Message-ID: <4D74EADD.3080006@stanford.edu> Good Morning All, Looking Ok this morning . A few issues: Epi is down for chamber clean after Dome was coated, Tylan FGA is down for Temp issues, Tylan 1 is down for Power fail on MFS. TEOS pump and Thermco LTO pumps out for repair.mco 2 no TLC flow. No other major issues at this time. Date: 3/7/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *power faIL* ** ** *3* Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *pump bad-out for repair* *.25/30* ** ** Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *up* ** *15.53/30* ** ** Tylan 10-Nitride *yellow* *door close issue* *7.89/30* ** ** Tylan 11-LTO *up* *a bit thin* *20.26/30* ** ** Tylan 12-FGA *down* *temp problems* ** ** *1* Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *bad pump-out for repair* ** ** ** AMAT Epi *down* *chamber coated* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor going out for repair* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line 224 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Mar 8 07:12:39 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 08 Mar 2011 07:12:39 -0800 Subject: Diffusion Morning Report 03/08/11 Message-ID: <4D764767.4030301@stanford.edu> Good Morning All, Looking good this morning Epi is down for chamber clean and broken parts. Tylan 1 is down for power fail on MFS. TEOS pump and Thermco LTO pumps are out for repair. Compressor for ebeam going out for repair.No TLC flow on Therrmco 1. No other major issues at this time. Date: 3/8/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *power faIL* ** ** *2* Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *pump bad-out for repair* *.25/30* ** ** Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *up* ** *15.53/30* ** ** Tylan 10-Nitride *yellow* *door close issue* *7.89/30* ** ** Tylan 11-LTO *up* *a bit thin* *20.26/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *bad pump-out for repair* ** ** ** AMAT Epi *down* *chamber clean* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor going out for repair* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 673 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Mar 9 06:35:42 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 09 Mar 2011 06:35:42 -0800 Subject: Diffusion Morning Report 03/09/11 Message-ID: <4D77903E.5010001@stanford.edu> Good Morning All, Looking good this morning. Epi is down waiting parts. TEOS and Thermco LTO pumps are out for repair. tylan 1 had Power fail on MFS 460. Thermco 2 no tlc flow. Ebeam compressor going out for repair. No other major problems at this time. Date: 3/9/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *power faIL* ** ** *2* Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *pump bad-out for repair* *.25/30* ** ** Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *up* ** *15.53/30* ** ** Tylan 10-Nitride *yellow* *door close issue* *7.89/30* ** ** Tylan 11-LTO *up* *a bit thin* *20.41/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *bad pump-out for repair* ** ** *3* AMAT Epi *down* *chamber clean* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor going out for repair* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 673 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Mar 10 09:56:15 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 10 Mar 2011 09:56:15 -0800 Subject: Diffusion Morning Report 03/10/11 Message-ID: <4D7910BF.7050704@stanford.edu> Good Morning All, Looking good this morning. Epi is back together and being checked out. Thermco LTO is back and will be installed. TEOS pump and Cryo compressor out for repair. Tylan 1 power fail on MFS 460. Thermco 2 no tlc flow. No other major problems at this time. Date: 3/10/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *power faIL* ** ** *2* Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *pump bad-out for repair* *.25/30* ** ** Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *up* ** *20.35/30* ** ** Tylan 10-Nitride *yellow* *door close issue* *7.89/30* ** ** Tylan 11-LTO *up* *a bit thin* *21.71/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *bad pump-out for repair* ** ** *3* AMAT Epi *down* *re-assembled need conditioning and CO* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor out for repair* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 673 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Mar 11 06:03:31 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 11 Mar 2011 06:03:31 -0800 Subject: Diffusion Morning Report 03/11/11 Message-ID: <4D7A2BB3.4000509@stanford.edu> Good Morning All, Looking good this morning. Epi is back up. Tylan 1 has power fail on MFS 460. Thermco LTO pump is back-reinstalling. TEOS pump out for repair. Ebeam compressor may not be repairable. Thermco 2 no tlc flow. No other major issues at this time. Date: 3/11/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *power faIL* ** ** *1* Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *pump bad-out for repair* *.25/30* ** ** Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *up* ** *20.35/30* ** ** Tylan 10-Nitride *yellow* *door close issue* *7.89/30* ** ** Tylan 11-LTO *up* *a bit thin* *21.71/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *bad pump-out for repair* ** ** *2* AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor may not be fixable* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 617 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Mar 14 09:07:07 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 14 Mar 2011 09:07:07 -0700 Subject: Diffusion Morning Report 03/14/11 Message-ID: <4D7E3D2B.2000109@stanford.edu> Good Morning All, Looking OK this morning. Epi is having trouble unloading Wafers. Tylan 1 has power fail on MFS. Thermco LTo pump is back installing. TEOS pump out for repair. Several furnaces have loader issues. No other major issues at this time. Date: 3/14/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *power faIL* ** ** *3* Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *door open issue* ** ** *2* Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *pump bad-out for repair* *.25/30* ** ** Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *up* ** *20.5/30* ** ** Tylan 10-Nitride *yellow* *door close issue* *8.99/30* ** ** Tylan 11-LTO *up* *a bit thin* *23.23/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *bad pump-out for repair* ** ** ** AMAT Epi *yellow* *cannot unload wafer* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor may not be fixable* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 617 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Mar 15 08:03:34 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 15 Mar 2011 08:03:34 -0700 Subject: Diffusion Morning 03/15/11 Message-ID: <4D7F7FC6.30700@stanford.edu> Good Morning All, Looking OK this morning. Epi is having loading/handling issues. Tylan 1 had a power fail on MFS. TEOS pump out for repair. SEM 4160 stage not driving. Thermco LTO-reinstalling pump. No TLC flow on Thermco 2. no other major issues at this time. From tberg at stanford.edu Wed Mar 16 06:18:02 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 16 Mar 2011 06:18:02 -0700 Subject: Diffusion Morning Report 03/16/11 Message-ID: <4D80B88A.40909@stanford.edu> Good Morning All, Looking good this morning. Continuing Epi chamber work. Tylan 1 had Power fail problems.TEOS pump out for repair. Thermco LTO pump being installed. Thermco 2 no tlc flow. Ebeam compressor not likely repairable. No other major problems at this time. Date: 3/16/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *power faIL* ** ** *2* Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *pump bad-out for repair* *.25/30* ** ** Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *up* ** *20.67/30* ** ** Tylan 10-Nitride *yellow* *door close issue* *9.1/30* ** ** Tylan 11-LTO *up* *a bit thin* *23.23/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *installing pump* ** ** *3* AMAT Epi *down* *chamber work* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor may not be fixable* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 617 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Mar 17 06:13:49 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 17 Mar 2011 06:13:49 -0700 Subject: Diffusion Morning Report 03/17/11 Message-ID: <4D82090D.7090809@stanford.edu> Good Morning All, Happy St. Patrick's Day all. Looking good this morning. Tylan 1 controller is out for repair. Epi is back up. Tylan 12 temp cal. Tylan 2 TLC fault. Cryo compressor for ebeam is out for repair/evaluation. TEOS pump is out for repair. Thermco LTO pump is being installed. Thermco 2 no TLC flow. No other major issues at this time. Date: 3/17/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *mfs out for repair* ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *pump bad-out for repair* *.25/30* ** ** Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *up* ** *20.67/30* ** ** Tylan 10-Nitride *yellow* *door close issue* *9.1/30* ** ** Tylan 11-LTO *up* *a bit thin* *23.36/30* ** ** Tylan 12-FGA *down* *temp cal* ** ** *1* Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *installing pump* ** ** *2* AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor evaluating* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 617 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Mar 18 06:42:47 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 18 Mar 2011 06:42:47 -0700 Subject: Diffusion Morning Report 03/18/11 Message-ID: <4D836157.4080702@stanford.edu> Good Morning All, Looking good this morning Tylan 1 MFS is out for repair. TEOS pump is out for repair. Thermco 2 has no TLC flow. Ebeam compressor out for evaluation. Thermco LTO checking out system. No other major problems at this time. Date: 3/1/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *mfs out for repair* ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *pump bad-out for repair* *.25/30* ** ** Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *up* ** *20.67/30* ** ** Tylan 10-Nitride *yellow* *door close issue* *9.1/30* ** ** Tylan 11-LTO *up* *a bit thin* *23.36/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *checking system* ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor evaluating* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 617 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Mar 21 06:36:52 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 21 Mar 2011 06:36:52 -0700 Subject: Diffusion Morning Report 03/21/11 Message-ID: <4D875474.7040305@stanford.edu> Good Morning All, Looking OK this morning. DCS is off investigating. Thermco Nitride and Tylan Nitride down forDCS issues.Tylan 2 had MFS faults O2 flow issues. TEOS pump is out for repair. Tylan 1 MFS out for repair. Ebeam compressor is dead. Epi has no DCS. Thermco 2 has no TLC flow. No other major issues at this time. Date: 3/21/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *mfs out for repair* ** ** ** Tylan 2 *yellow* *mfs alarms-o2 flow* ** ** * 2* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *pump bad-out for repair* *.25/30* ** ** Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *up* ** *20.67/30* ** ** Tylan 10-Nitride *down* *no DCS-door close issue* *9.3/30* ** ** Tylan 11-LTO *up* *a bit thin* *26.7/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* * no DCS * ** ** ** Thermco bpsg *down* *checking system* ** ** ** AMAT Epi *down* *scrubber fault* ** ** * 1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor evaluating* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 617 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Mar 22 06:18:30 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 22 Mar 2011 06:18:30 -0700 Subject: Diffusion Morning Report 03/22/11 Message-ID: <4D88A1A6.60401@stanford.edu> Good Morning All, Looking good this morning. Tylan 1 mfs out for repair. TEOS pump out for repair. Thermco 2 no TLC flow . Thermco LTO checking it out. Ebeam compressor is bad. No other major problems at this time. Date: 3/22/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *mfs out for repair* ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *pump bad-out for repair* *.25/30* ** ** Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *up* ** *20.67/30* ** ** Tylan 10-Nitride *yellow* *door close issue* *9.3/30* ** *1* Tylan 11-LTO *up* *a bit thin* *27.6/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *checking system* ** ** *2* AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor evaluating* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 617 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Mar 23 06:12:43 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 23 Mar 2011 06:12:43 -0700 Subject: Diffusion Morning Report 03/23/11 Message-ID: <4D89F1CB.6010905@stanford.edu> Good Morning All, Looking OK this morning. Epi is down again-Dome devitrified again. Tylan 1 MFS 460 out for repair. TEOS pump out for repair. Thermco LTO is being checked out. Tylan BPSG is going down tomorrow for pull and clean. Thermco 2 no tlc flow. Ebeam compressor is dead. No other major problems at this time. Date: 3/23/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *mfs out for repair* ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *pump bad-out for repair* *.25/30* ** ** Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *up* ** *20.67/30* ** ** Tylan 10-Nitride *up* ** *9.3/30* ** ** Tylan 11-LTO *up* *going down tomorrow for pull and clean* *29.1/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *checking system* ** ** *2* AMAT Epi *down* *dome bad again* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor evaluating* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 617 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Mar 24 06:17:57 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 24 Mar 2011 06:17:57 -0700 Subject: Diffusion Morning Report 03/24/11 Message-ID: <4D8B4485.2050303@stanford.edu> Good Morning All, Looking OK this morning. Epi is down for Dome replacement-still no ETA for Dome, the second in 2 weeks. TEOS pump is still out for repair, Tylan 1 mfs is out for repair. Tylan LTO is down for pull and clean. Thermco LTO needs a test after repairs. Ebeam compressor is not repairable. Thermco 2 No TLC flow. No other major issues at this time. Date: 3/24/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *mfs out for repair* ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *pump bad-out for repair* *.25/30* ** ** Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *up* ** *20.67/30* ** ** Tylan 10-Nitride *up* ** *9.3/30* ** ** Tylan 11-LTO *down* *pull and clean* *0/30* ** *1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *yellow* *needs test after repair* ** ** ** AMAT Epi *down* *dome bad again* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor evaluating* ** ** ** ZYGO *up* * * ** ** ** FGA2 *yellow* *forming gas leak check* ** ** *2* SiH4 for furnaces ** *A on line 617 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Mar 25 06:43:45 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 25 Mar 2011 06:43:45 -0700 Subject: Diffusion Morning Report03/25/11 Message-ID: <4D8C9C11.2080008@stanford.edu> Good Morning All, Looking good this morning. Epi is back together and conditioning. LTO is going back together. Thermco poly1 had low/no dep-investigating. TEOS pump out for repair. Tylan 1 controller is coming back from repair. Thermco BPSG needs a test after repair. Ebeam compressor is dead. Thermco 2 no TLC flow. No other issues at this time. Date: 3/25/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *mfs out for repair* ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *pump bad-out for repair* *.25/30* ** ** Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *up* ** *20.67/30* ** ** Tylan 10-Nitride *up* ** *9.3/30* ** ** Tylan 11-LTO *down* *pull and clean* *0/30* ** *1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *down* *NO DEP* ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *yellow* *needs test after repair* ** ** ** AMAT Epi *down* *conditioning* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 600 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Mar 28 06:45:15 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 28 Mar 2011 06:45:15 -0700 Subject: Diffusion Morning Report 03/28/11 Message-ID: <4D9090EB.5020106@stanford.edu> Good Morning All, Looking good this morning. Tylan 1 controller is back and seems to be working well.TEOS pump should be back today. Tylan LTO failed pump program. Thermco LTO needs a test after repairs. Thermco Poly 1 no dep. Amat Epi was back together on Friday not sure of status. Thermco 2 no TLC flow. No other major issues at this time. Date: 3/28/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *needs test was run over weekend* ** ** *3* Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *pump bad-out for repair* *.25/30* ** ** Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *up* ** *20.67/30* ** ** Tylan 10-Nitride *up* ** *9.6/30* ** ** Tylan 11-LTO *yellow* *pump program failed* *3.28/30* ** *1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *down* *NO DEP* ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *yellow* *needs test after repair* ** ** ** AMAT Epi *yellow* *conditioning* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 600 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Mar 29 06:28:52 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 29 Mar 2011 06:28:52 -0700 Subject: Diffusion Morning Report 03/29/11 Message-ID: <4D91DE94.9060700@stanford.edu> Good Morning All, Looking good this morning. Thermco Poly1 is running after resolution of growth rate issues. Epi is running.TEOS pump is due back today. Thermco LTO needs a test after repairs. Thermco 2 had no TLC flow. Ebeam compressor is dead. No other issues at this time. Date: 3/29/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* *has been run* ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *pump should be back today* *.25/30* ** *1* Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *up* ** *20.67/30* ** ** Tylan 10-Nitride *up* ** *9.6/30* ** ** Tylan 11-LTO *yellow* ** *3.28/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *yellow* *needs test after repair* ** ** ** AMAT Epi *yellow* *running* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 600 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Mar 30 06:29:52 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 30 Mar 2011 06:29:52 -0700 Subject: Diffusion Morning Report 03/30/11 Message-ID: <4D933050.1080306@stanford.edu> Good Morning All, Looking good this morning . TEOS pump is back and being installed.Thermco BPSG need a test after repair. Thermco 2 no TLC flow. Ebeam compressor is dead. No other major issues at this time. > > Date: 3/30/11 THICKNESS-Change at Priority > Tube Name/Number Status > Tylan 1 *up* ** ** ** ** > Tylan 2 *up* ** ** ** ** > Tylan 3 *up* ** ** ** ** > Tylan 4 *up* ** ** ** ** > Tylan 5-BBr3 *up* ** ** ** ** > Tylan 6-POCl3 *up* ** ** ** ** > Tylan 7-TEOS2 *down* *installing pump and checkout* *.25/30* ** *1* > Tylan 8-SiGe *up* ** *.88/30* ** ** > Tylan 9-Poly *up* ** *20.96/30* ** ** > Tylan 10-Nitride *up* ** *9.6/30* ** ** > Tylan 11-LTO *yellow* ** *4.58/30* ** ** > Tylan 12-FGA *up* ** ** ** ** > Thermco 1 *up* ** ** ** ** > Thermco 2 *yellow* *no tlc flow* ** ** ** > Thermco 3 *future* ** ** ** ** > Thermco4 *future* ** ** ** ** > Thermco Poly1 *up* ** ** ** ** > Thermco Poly2 *up* ** ** ** ** > Thermco Nitride1 *up* ** ** ** ** > Thermco bpsg *yellow* *needs test after repair* ** ** ** > AMAT Epi *yellow* *running* ** ** ** > TEL Spa *up* ** ** ** ** > Burn Box *up* ** ** ** ** > Ebeam *down* *cryo compresssor dead* ** ** ** > ZYGO *up* * > * ** ** ** > FGA2 *up* ** ** ** ** > SiH4 for furnaces ** *A on line 600 PSI* *changeover working > well* ** ** > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Mar 31 06:20:14 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 31 Mar 2011 06:20:14 -0700 Subject: Diffusion Morning Report 03/31/11 Message-ID: <4D947F8E.7060109@stanford.edu> Good Morning All, Looking good this morning. Tylan poly going down tomorrow after several LOng runs. TEOS pump is back and we are leak checking. PO for SEM4160 is in Purchasing. Thermco LTO needs a test after repair. Ebeam compressor is dead. Sensors for ICP and CCP installed. No other issues at this time. Date: 3/31/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *installing pump and checkout* *.25/30* ** *1* Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *up* *going down tomorrow for pull and clean* *32.2/30* ** ** Tylan 10-Nitride *up* ** *9.6/30* ** ** Tylan 11-LTO *yellow* ** *4.58/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *yellow* *needs test after repair* ** ** ** AMAT Epi *yellow* *running* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 600 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: