Diffusion Morning Report 03/04/11

Ted Berg tberg at stanford.edu
Fri Mar 4 08:49:49 PST 2011


Good Morning All,
     Looking good this morning .Thermco LTO and TEOs pumps are bad. 
Ebeam cryo compressor is going out for repair. Thermco 2 no TLC flow. 
Burn box cleaned this morning. No other major issues at this time.

> 					
> 	Date: 	3/4/11 	THICKNESS-Change at 		Priority
> Tube Name/Number 	Status 				
> Tylan 1 	*up* 	** 	** 	** 	**
> Tylan 2 	*up* 	** 	** 	** 	**
> Tylan 3 	*up* 	** 	** 	** 	**
> Tylan 4 	*up* 	** 	** 	** 	**
> Tylan 5-BBr3 	*up* 	** 	** 	** 	**
> Tylan 6-POCl3 	*up* 	** 	** 	** 	**
> Tylan 7-TEOS2 	*down* 	*pump bad* 	*.25/30* 	** 	**
> Tylan 8-SiGe 	*up* 	** 	*.88/30* 	** 	**
> Tylan 9-Poly 	*up* 	** 	*11.67/30* 	** 	**
> Tylan 10-Nitride 	*yellow* 	*door close issue* 	*4.51/30* 	** 	**
> Tylan 11-LTO 	*up* 	*a bit thin* 	*15.75/30* 	** 	**
> Tylan 12-FGA 	*up* 	** 	** 	** 	**
> Thermco 1 	*up* 	** 	** 	** 	**
> Thermco 2 	*yellow* 	*no tlc flow* 	** 	** 	**
> Thermco 3 	*future* 	** 	** 	** 	**
> Thermco4 	*future* 	** 	** 	** 	**
> Thermco Poly1 	*up* 	** 	** 	** 	**
> Thermco Poly2 	*up* 	** 	** 	** 	**
> Thermco Nitride1 	*up* 	** 	** 	** 	**
> Thermco bpsg 	*down* 	*bad pump-out for repair* 	** 	** 	**
> AMAT Epi 	*up* 	** 	** 	** 	**
> TEL Spa 	*up* 	** 	** 	** 	**
> Burn Box 	*up* 	** 	** 	** 	**
> Ebeam 	*down* 	*cryo compresssor going out for repair* 	** 	** 	**
> ZYGO 	*up* 	*
> * 	** 	** 	**
> FGA2 	*up* 	** 	** 	** 	**
> SiH4 for furnaces 	** 	*B on line 224 PSI* 	*changeover working 
> well* 	** 	**
>

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