Diffusion Morning Report 03/08/11

Ted Berg tberg at stanford.edu
Tue Mar 8 07:12:39 PST 2011


Good Morning All,
     Looking good this morning Epi is down for chamber clean and broken 
parts. Tylan 1 is down for power fail on MFS. TEOS pump and Thermco LTO 
pumps are out for repair. Compressor for ebeam going out for repair.No 
TLC flow on Therrmco 1. No other major issues at this time.

					
	Date: 	3/8/11 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*down* 	*power faIL* 	** 	** 	*2*
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*down* 	*pump bad-out for repair* 	*.25/30* 	** 	**
Tylan 8-SiGe 	*up* 	** 	*.88/30* 	** 	**
Tylan 9-Poly 	*up* 	** 	*15.53/30* 	** 	**
Tylan 10-Nitride 	*yellow* 	*door close issue* 	*7.89/30* 	** 	**
Tylan 11-LTO 	*up* 	*a bit thin* 	*20.26/30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*yellow* 	*no tlc flow* 	** 	** 	**
Thermco 3 	*future* 	** 	** 	** 	**
Thermco4 	*future* 	** 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	** 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	*down* 	*bad pump-out for repair* 	** 	** 	**
AMAT Epi 	*down* 	*chamber clean* 	** 	** 	*1*
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
Ebeam 	*down* 	*cryo compresssor going out for repair* 	** 	** 	**
ZYGO 	*up* 	*
* 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	** 	*A on line 673 PSI* 	*changeover working 
well* 	** 	**


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