Diffusion Morning Report 03/16/11

[Ted Berg]

Good Morning All,
     Looking good this morning. Continuing Epi chamber work. Tylan 1 had 
Power fail problems.TEOS pump out for repair. Thermco LTO pump being 
installed. Thermco 2 no tlc flow. Ebeam compressor not likely 
repairable. No other major problems at this time.

					
	Date: 	3/16/11 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*down* 	*power faIL* 	** 	** 	*2*
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*down* 	*pump bad-out for repair* 	*.25/30* 	** 	**
Tylan 8-SiGe 	*up* 	** 	*.88/30* 	** 	**
Tylan 9-Poly 	*up* 	** 	*20.67/30* 	** 	**
Tylan 10-Nitride 	*yellow* 	*door close issue* 	*9.1/30* 	** 	**
Tylan 11-LTO 	*up* 	*a bit thin* 	*23.23/30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*yellow* 	*no tlc flow* 	** 	** 	**
Thermco 3 	*future* 	** 	** 	** 	**
Thermco4 	*future* 	** 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	** 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	*down* 	*installing pump* 	** 	** 	*3*
AMAT Epi 	*down* 	*chamber work* 	** 	** 	*1*
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
Ebeam 	*down* 	*cryo compresssor may not be fixable* 	** 	** 	**
ZYGO 	*up* 	*
* 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	** 	*A on line 617 PSI* 	*changeover working 
well* 	** 	**


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