Diffusion Morning Report 03/21/11

Ted Berg tberg at stanford.edu
Mon Mar 21 06:36:52 PDT 2011


Good Morning All,
     Looking OK this morning. DCS is off investigating. Thermco Nitride 
and Tylan Nitride down forDCS issues.Tylan 2 had MFS faults O2 flow 
issues. TEOS pump is out for repair. Tylan 1 MFS out for repair. Ebeam 
compressor is dead.   Epi has no DCS. Thermco 2 has no TLC flow. No 
other major issues at this time.


					
	Date: 	3/21/11 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*down* 	*mfs out for repair* 	** 	** 	**
Tylan 2 	*yellow* 	*mfs alarms-o2 flow* 	** 	** 	* 2*
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*down* 	*pump bad-out for repair* 	*.25/30* 	** 	**
Tylan 8-SiGe 	*up* 	** 	*.88/30* 	** 	**
Tylan 9-Poly 	*up* 	** 	*20.67/30* 	** 	**
Tylan 10-Nitride 	*down* 	*no DCS-door close issue* 	*9.3/30* 	** 	**
Tylan 11-LTO 	*up* 	*a bit thin* 	*26.7/30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*yellow* 	*no tlc flow* 	** 	** 	**
Thermco 3 	*future* 	** 	** 	** 	**
Thermco4 	*future* 	** 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	** 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*down* 	* no DCS
* 	** 	** 	**
Thermco bpsg 	*down* 	*checking system* 	** 	** 	**
AMAT Epi 	*down* 	*scrubber fault* 	** 	** 	* 1*
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
Ebeam 	*down* 	*cryo compresssor evaluating* 	** 	** 	**
ZYGO 	*up* 	*
* 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	** 	*A on line 617 PSI* 	*changeover working 
well* 	** 	**

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