Diffusion Morning Report 03/30/11

Ted Berg tberg at stanford.edu
Wed Mar 30 06:29:52 PDT 2011


Good Morning All,
     Looking good this morning . TEOS pump is back and being 
installed.Thermco BPSG need a test after repair. Thermco 2 no TLC flow. 
Ebeam compressor is dead. No other major issues at this time.

> 					
> 	Date: 	3/30/11 	THICKNESS-Change at 		Priority
> Tube Name/Number 	Status 				
> Tylan 1 	*up* 	** 	** 	** 	**
> Tylan 2 	*up* 	** 	** 	** 	**
> Tylan 3 	*up* 	** 	** 	** 	**
> Tylan 4 	*up* 	** 	** 	** 	**
> Tylan 5-BBr3 	*up* 	** 	** 	** 	**
> Tylan 6-POCl3 	*up* 	** 	** 	** 	**
> Tylan 7-TEOS2 	*down* 	*installing pump and checkout* 	*.25/30* 	** 	*1*
> Tylan 8-SiGe 	*up* 	** 	*.88/30* 	** 	**
> Tylan 9-Poly 	*up* 	** 	*20.96/30* 	** 	**
> Tylan 10-Nitride 	*up* 	** 	*9.6/30* 	** 	**
> Tylan 11-LTO 	*yellow* 	** 	*4.58/30* 	** 	**
> Tylan 12-FGA 	*up* 	** 	** 	** 	**
> Thermco 1 	*up* 	** 	** 	** 	**
> Thermco 2 	*yellow* 	*no tlc flow* 	** 	** 	**
> Thermco 3 	*future* 	** 	** 	** 	**
> Thermco4 	*future* 	** 	** 	** 	**
> Thermco Poly1 	*up* 	** 	** 	** 	**
> Thermco Poly2 	*up* 	** 	** 	** 	**
> Thermco Nitride1 	*up* 	** 	** 	** 	**
> Thermco bpsg 	*yellow* 	*needs test after repair* 	** 	** 	**
> AMAT Epi 	*yellow* 	*running* 	** 	** 	**
> TEL Spa 	*up* 	** 	** 	** 	**
> Burn Box 	*up* 	** 	** 	** 	**
> Ebeam 	*down* 	*cryo compresssor dead* 	** 	** 	**
> ZYGO 	*up* 	*
> * 	** 	** 	**
> FGA2 	*up* 	** 	** 	** 	**
> SiH4 for furnaces 	** 	*A on line 600 PSI* 	*changeover working 
> well* 	** 	**
>

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