Diffusion Morning Report 03/31/11

Ted Berg tberg at stanford.edu
Thu Mar 31 06:20:14 PDT 2011


Good Morning All,
     Looking good this morning. Tylan poly going down tomorrow after 
several LOng runs. TEOS pump is back and we are leak checking. PO for 
SEM4160 is in Purchasing. Thermco LTO needs a test after repair. Ebeam 
compressor is dead.  Sensors for ICP and CCP installed. No other issues 
at this time.

					
	Date: 	3/31/11 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*down* 	*installing pump and checkout* 	*.25/30* 	** 	*1*
Tylan 8-SiGe 	*up* 	** 	*.88/30* 	** 	**
Tylan 9-Poly 	*up* 	*going down tomorrow for pull and clean* 
*32.2/30* 	** 	**
Tylan 10-Nitride 	*up* 	** 	*9.6/30* 	** 	**
Tylan 11-LTO 	*yellow* 	** 	*4.58/30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*yellow* 	*no tlc flow* 	** 	** 	**
Thermco 3 	*future* 	** 	** 	** 	**
Thermco4 	*future* 	** 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	** 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	*yellow* 	*needs test after repair* 	** 	** 	**
AMAT Epi 	*yellow* 	*running* 	** 	** 	**
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
Ebeam 	*down* 	*cryo compresssor dead* 	** 	** 	**
ZYGO 	*up* 	*
* 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	** 	*A on line 600 PSI* 	*changeover working 
well* 	** 	**


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