From tberg at stanford.edu Tue Nov 1 06:32:40 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 01 Nov 2011 06:32:40 -0700 Subject: Diffusion Morning Report 11/01/11 Message-ID: <4EAFF4F8.9010601@stanford.edu> Good Morning All, Looking good this morning. No new issues overnight. Plasmatherm here today to startup ICP and CCP. Leftovers:Epi haze, J is working on getting NH3 for Fijis. Date: 11/1/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *4.4/30* ** ** Tylan 10-Nitride *yellow* ** *2.32/30* ** ** Tylan 11-LTO *yellow* ** *14.58/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *down* ** ** ** ** Thermco4 *down* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues,Hazy wafers* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 693 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Nov 2 07:24:30 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 02 Nov 2011 07:24:30 -0700 Subject: Diffusion Morning report 11/02/11 Message-ID: <4EB1529E.9010800@stanford.edu> Good Morning All, Looking good this morning. TYCOM terminal replaced this morning. Removed trapped wafer from Epi. Plasmatherm FS is here starting up ICP and CCP. No other new issues. Leftovers: J is looking into NH3 for FiJis. Epi Haze. Date: 11/2/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *4.98/30* ** ** Tylan 10-Nitride *yellow* ** *2.32/30* ** ** Tylan 11-LTO *yellow* ** *14.7/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *down* ** ** ** ** Thermco4 *down* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues,Hazy wafers* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 693 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Nov 3 07:01:51 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 03 Nov 2011 07:01:51 -0700 Subject: Diffusion Morning Report 11/03/11 Message-ID: <4EB29ECF.8030403@stanford.edu> Good Morning All, Looking good this morning. No new problems overnight. From tberg at stanford.edu Thu Nov 3 07:18:22 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 03 Nov 2011 07:18:22 -0700 Subject: Fwd: Diffusion Morning Report 11/03/11 In-Reply-To: <4EB29ECF.8030403@stanford.edu> References: <4EB29ECF.8030403@stanford.edu> Message-ID: <4EB2A2AE.3040303@stanford.edu> -------- Original Message -------- Subject: Diffusion Morning Report 11/03/11 Date: Thu, 03 Nov 2011 07:01:51 -0700 From: Ted Berg To: tberg at stanford.edu, Mary Tang , Maurice Stevens , Nancy Latta , John Shott , Ray Seymour , Mike Dickey , Ed Myers , diffusion at snf.stanford.edu, John Bumgarner Good Morning All, Looking good this morning. No new problems overnight. Leftovers: Epi Haze, J is working on Ammonia for FIJIs Date: 11/3/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *4.98/30* ** ** Tylan 10-Nitride *yellow* ** *2.43/30* ** ** Tylan 11-LTO *yellow* ** *14.7/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *down* ** ** ** ** Thermco4 *down* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues,Hazy wafers* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 693 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Nov 4 06:27:38 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 04 Nov 2011 06:27:38 -0700 Subject: Diffusion morning Report 11/04/11 Message-ID: <4EB3E84A.9030109@stanford.edu> Good Morning all, Looking good this morning. No new problems overnight. Burn box clean this morning. Leftovers: J is working on getting NH3 for FIJIs. Epi Hazy wafers? Date: 11/4/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *10.5/30* ** ** Tylan 10-Nitride *yellow* ** *3.43/30* ** ** Tylan 11-LTO *yellow* ** *14.7/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *down* ** ** ** ** Thermco4 *down* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues,Hazy wafers* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 693 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Nov 7 06:23:40 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 07 Nov 2011 06:23:40 -0800 Subject: Diffusion Morning Report 11/07/11 Message-ID: <4EB7E9EC.5060308@stanford.edu> Good Morning All, Looking good this morning. Tylan 2 has reading of 400 degrees in the source zone. Epi is down for low water flow and contactor issues. All lower lamps were changed over the weekend. Left overs Hazy wafers on Epi and J is trying to get NH3 for FIJIs. No other issues at this time. Date: 11/7/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *source zone reading 400* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *11.5/30* ** ** Tylan 10-Nitride *yellow* ** *3.83/30* ** ** Tylan 11-LTO *yellow* ** *15.2/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *down* ** ** ** ** Thermco4 *down* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *lla issues,Hazy wafers,water flow, contactor error* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 693 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Nov 8 06:26:54 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 08 Nov 2011 06:26:54 -0800 Subject: Diffusion Morning Report 11/08/11 Message-ID: <4EB93C2E.4080409@stanford.edu> Good Morning All, Looking good this morning. Epi Slot 7 melted. user put hot wafer into slot 7. No other issues overnight. Left overs: Hazy wafers on Epi Date: 11/8/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *13.5/30* ** ** Tylan 10-Nitride *yellow* ** *4.51/30* ** ** Tylan 11-LTO *yellow* ** *19.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *down* ** ** ** ** Thermco4 *down* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *lla issues,Hazy wafers* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 609 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Nov 9 06:17:38 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 09 Nov 2011 06:17:38 -0800 Subject: Diffusion Morning Report 11/09/11 Message-ID: <4EBA8B82.8020109@stanford.edu> Good Morning All, Looking good this morning. No new problems overnight. Leftovers; EPI hazy wafers, J is getting NH3 for FIJIs. No other issues at this time. Date: 11/9/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *14.5/30* ** ** Tylan 10-Nitride *yellow* ** *4.61/30* ** ** Tylan 11-LTO *yellow* ** *20.45/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *down* ** ** ** ** Thermco4 *down* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *lla issues,Hazy wafers* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 609 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Nov 10 06:28:25 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 10 Nov 2011 06:28:25 -0800 Subject: Diffusion Morning Report 11/10/11 Message-ID: <4EBBDF89.6010705@stanford.edu> Good Morning All, Looking good this morning. No new issues overnight. Leftovers:Epi Haze, J getting NH3 for FiJis. No other issues at this time. Date: 11/10/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** Tylan 2 *up* ** ** ** Tylan 3 *up* ** ** ** Tylan 4 *up* ** ** ** Tylan 5-BBr3 *up* ** ** ** Tylan 6-POCl3 *up* ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** Tylan 8-SiGe *up* ** *3.76/30* ** Tylan 9-Poly *up* ** *18.4/30* ** Tylan 10-Nitride *yellow* ** *4.61/30* ** Tylan 11-LTO *yellow* ** *20.45/30* ** Tylan 12-FGA *up* ** ** ** Thermco 1 *up* ** ** ** Thermco 2 *up* ** ** ** Thermco 3 *down* ** ** ** Thermco4 *down* ** ** ** Thermco Poly1 *up* ** ** * * Thermco Poly2 *up* ** ** ** Thermco Nitride1 *up* ** ** ** Thermco bpsg *up* ** ** ** AMAT Epi *yellow* *lla issues,Hazy wafers* ** ** TEL Spa *up* ** ** ** Burn Box *up* ** ** ** SEM 4160 *up* ** ** ** ZYGO *up* ** ** ** FGA2 *up* ** ** ** SiH4 for furnaces ** *B on line pressure 609 psi* *changeover working well* ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Nov 11 06:10:46 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 11 Nov 2011 06:10:46 -0800 Subject: Diffusion Morning report 11/11/11 Message-ID: <4EBD2CE6.5060507@stanford.edu> Good Morning all, Looking good this morning. TEL has an arm issue. No other new problems Overnight. SC county EH & S signed off on ICP and CCP. Fire and BLD on Monday for final inspections. Burn box clean this morning. Leftovers: Epi Haze, J is trying to get NH3 for FIJIs. Date: 11/11/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *24.4/30* ** ** Tylan 10-Nitride *yellow* ** *4.61/30* ** ** Tylan 11-LTO *yellow* ** *22.45/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *down* ** ** ** ** Thermco4 *down* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues,Hazy wafers* ** ** ** TEL Spa *yellow* *arm issues* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 609 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Nov 14 06:20:09 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 14 Nov 2011 06:20:09 -0800 Subject: Diffusion Morning Report 11/14/11 Message-ID: <4EC12399.4060209@stanford.edu> Good Morning All, Looking good this morning. Tylan Poly has a tipped baffle and Tylan LTO has low dep rate. Inspections for ICP and CCp this morning. Leftover issues: Epi Haze, J is trying to get NH3 for Fijis. Ray is out today. No other issues at this time. Date: 11/14/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *yellow* *baffle tipped over* *24.4/30* ** ** Tylan 10-Nitride *yellow* ** *4.61/30* ** ** Tylan 11-LTO *yellow* *low dep rate* *23.0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *down* ** ** ** ** Thermco4 *down* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues,Hazy wafers* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 609 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Nov 15 06:26:14 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 15 Nov 2011 06:26:14 -0800 Subject: Diffusion Morning Report 11/15/11 Message-ID: <4EC27686.4060107@stanford.edu> Good Morning All, Looking good this morning. Tylan Poly is down for scheduled pull and clean. Tylan LTO- broken injector replaced-needs a test. TYLAN Nitride possible temp issues. ICP and CCP signed off by county-FS is checking out deps. Left overs: Epi Haze. No other issues at this time. Date: 11/15/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *down* *scheduled pull and clean* *0/30* ** * 1* Tylan 10-Nitride *yellow* *Possible temp issues* *4.61/30* ** * 2* Tylan 11-LTO *yellow* *Replaced broken O2 injector* *23.0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *down* ** ** ** ** Thermco4 *down* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues,Hazy wafers* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 609 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Nov 16 06:19:14 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 16 Nov 2011 06:19:14 -0800 Subject: Diffusion Morning Report 11/16/11 Message-ID: <4EC3C662.6070409@stanford.edu> Good Morning All, Looking OK this morning. Tylan poly is going back together after tube clean. Tylan Nitride has possible temp issues. Thermco Nitride has possible boat issues. Leftover issues: Epi Haze. No other issues at this time. Date: 11/16/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *down* *scheduled pull and clean* *0/30* ** *1* Tylan 10-Nitride *down* *Possible temp issues* *5.09/30* ** *2* Tylan 11-LTO *yellow* ** *23.0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *down* ** ** ** ** Thermco4 *down* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *boat issues?* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues,Hazy wafers* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 564 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Nov 17 06:49:07 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 17 Nov 2011 06:49:07 -0800 Subject: Diffusion Morning Report 11/17/11 Message-ID: <4EC51EE3.4010501@stanford.edu> Good Morning All, Looking good this morning. Tylan Poly needs a test after pull and clean. Tylan Nitride has a Bad SCR fan-it should be here today. Leftovers: Epi Haze. No other issues at this time. Date: 11/1/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *down* *needs test* *0/30* ** *1* Tylan 10-Nitride *down* *bad SCR fan-on order* *5.09/30* ** *2* Tylan 11-LTO *yellow* ** *23.5/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *down* ** ** ** ** Thermco4 *down* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues,Hazy wafers* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 564 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Nov 18 06:25:36 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 18 Nov 2011 06:25:36 -0800 Subject: Diffusion Morning Report 11/18/11 Message-ID: <4EC66AE0.5010208@stanford.edu> Good Morning All, Looking good this morning. No new issues this morning. Leftovers: Epi Haze Date: 11/18/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *.11/30* ** ** Tylan 10-Nitride *up* ** *5.56/30* ** ** Tylan 11-LTO *yellow* ** *27/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *down* ** ** ** ** Thermco4 *down* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues,Hazy wafers* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 564 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Mon Nov 21 07:19:19 2011 From: rseymour at stanford.edu (Ray Seymour) Date: Mon, 21 Nov 2011 07:19:19 -0800 Subject: Diffusion Morning Report Message-ID: <4ECA6BF7.9050301@stanford.edu> Good Morning All, Ted is out today.Tylan 2 has display problem. LTO no deposition. Leftover issues: Epi Haze. No other issues at this time. Date: 11/16/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* * no display * ** ** * 2 * Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up * *6.11/30* ** * * Tylan 10-Nitride *down* * * *5.56/30* ** * * Tylan 11-LTO *yellow* ** *27.0/30* ** * 1 * Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *down* ** ** ** ** Thermco4 *down* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *boat issues?* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *lower dome replacement * ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 547 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Mon Nov 21 07:21:20 2011 From: rseymour at stanford.edu (Ray Seymour) Date: Mon, 21 Nov 2011 07:21:20 -0800 Subject: Diffusion Morning Report Message-ID: <4ECA6C70.4060309@stanford.edu> Good Morning All, Ted is out today.Tylan 2 has display problem. LTO no deposition. The right date this time. Leftover issues: Epi Haze. No other issues at this time. Date: 11/21/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* * no display * ** ** * 2 * Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up * *6.11/30* ** * * Tylan 10-Nitride *down* * * *5.56/30* ** * * Tylan 11-LTO *yellow* ** *27.0/30* ** * 1 * Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *down* ** ** ** ** Thermco4 *down* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *boat issues?* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *lower dome replacement * ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 547 psi* *changeover working well* ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Tue Nov 22 07:22:56 2011 From: rseymour at stanford.edu (Ray Seymour) Date: Tue, 22 Nov 2011 07:22:56 -0800 Subject: Diffusion Morning Report Message-ID: <4ECBBE50.6080408@stanford.edu> Good Morning All, Ted is out today. TEOS2 has pressure issues. No other new issues Leftover issues: Epi Haze. Date: 11/22/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* * * ** ** * * Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* ** *10.96/30* ** * 1 * Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up * *6.11/30* ** * * Tylan 10-Nitride *up* * * *5.56/30* ** * * Tylan 11-LTO *yellow* ** *27.9/30* ** * * Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *down* ** ** ** ** Thermco4 *down* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *boat issues?* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *lower dome replacement * ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 547 psi* *changeover working well* ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Wed Nov 23 07:09:28 2011 From: rseymour at stanford.edu (Ray Seymour) Date: Wed, 23 Nov 2011 07:09:28 -0800 Subject: Diffusion Morning Report Message-ID: <4ECD0CA8.9030008@stanford.edu> Good Morning All, Ted is out today. TEOS2 pump failure, vendor has picked it up for repair. No other new issues. Leftover issues: Epi Haze. Date: 11/23/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* * * ** ** * * Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* ** *10.96/30* ** * 1 * Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up * *6.11/30* ** * * Tylan 10-Nitride *up* * * *5.56/30* ** * * Tylan 11-LTO *yellow* ** *28.9/30* ** * * Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *down* ** ** ** ** Thermco4 *down* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *boat issues?* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *lower dome replacement * ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 547 psi* *changeover working well* ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Nov 29 07:24:41 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 29 Nov 2011 07:24:41 -0800 Subject: Diffusion morning Report 11/29/11 Message-ID: <4ED4F939.4090708@stanford.edu> Good morning All, Looking good this morning. Tylan LTO in pull and clean. TEOS pump out for checkout and leak. No other new issues. Leftovers: TEL MW unit tripped off no cooling water, it has been reset. > > Date: 11/29/11 THICKNESS-Change at Priority > Tube Name/Number Status > Tylan 1 *up* ** ** ** > Tylan 2 *up* ** ** ** > Tylan 3 *up* ** ** ** > Tylan 4 *up* ** ** ** > Tylan 5-BBr3 *up* ** ** ** > Tylan 6-POCl3 *up* ** ** ** > Tylan 7-TEOS2 *down* *leak* *10.49/30* ** > Tylan 8-SiGe *up* ** *3.76/30* ** > Tylan 9-Poly *up* ** *8.1/30* ** > Tylan 10-Nitride *up* ** *5.74/30* ** > Tylan 11-LTO *down* *Pull and clean* *0/30* ** > Tylan 12-FGA *up* ** ** ** > Thermco 1 *up* ** ** ** > Thermco 2 *up* ** ** ** > Thermco 3 *down* ** ** ** > Thermco4 *down* ** ** ** > Thermco Poly1 *up* ** ** * > * > Thermco Poly2 *up* ** ** ** > Thermco Nitride1 *up* ** ** ** > Thermco bpsg *up* ** ** ** > AMAT Epi *yellow* *lla issues* ** ** > TEL Spa *up* *MW unit had shut off during cooling waterb > issue* ** ** > Burn Box *up* ** ** ** > SEM 4160 *up* ** ** ** > ZYGO *up* ** ** ** > FGA2 *up* ** ** ** > SiH4 for furnaces ** *B on line pressure 521 psi* *changeover > working well* ** > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Nov 30 06:20:40 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 30 Nov 2011 06:20:40 -0800 Subject: Diffusion Morning Report 11/30/11 Message-ID: <4ED63BB8.6050708@stanford.edu> Good morning All, Looking good this morning. SEM4160 has an issue with sample holder-Stage? Leftovers: LTO pull and clean, TEOS leak and Pump issues. No other issues at this time Date: 11/30/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *leak-pump is out* *10.96/30* ** *2* Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *8.28/30* ** ** Tylan 10-Nitride *up* ** *6.04/30* ** ** Tylan 11-LTO *down* *Pull and clean* *0/30* ** *1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *down* ** ** ** ** Thermco4 *down* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 521 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... 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