From tberg at stanford.edu Mon Oct 3 07:05:53 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 03 Oct 2011 07:05:53 -0700 Subject: Diffusion Morning Report 10/03/11 Message-ID: <4E89C141.2030701@stanford.edu> Good Morning All, Looking good this morning. Tylan LTO has a leak. Tylan Poly has MFS alarms for SiH4 leak. Tylan 2 mixing chamber scraping.SEM 4160 has pumping problems. Left overs Epi LLA issues. Date: 10/3/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *Mixing chamber scraping* ** ** *3* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *yellow* *MFS alarms* *7.45/30* ** *2* Tylan 10-Nitride *up* ** *19.6/30* ** ** Tylan 11-LTO *down* *Leak* *24.02/30* ** *1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 798 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Oct 4 06:45:28 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 04 Oct 2011 06:45:28 -0700 Subject: Diffusion Morning Report 10/04/11 Message-ID: <4E8B0DF8.2030701@stanford.edu> Good Morning All, Looking Good this morning Tylan 2 is down for mixing chamber scraping still. SEM4160 is down for an air leak. Epi LLA is still a problem. No new problems today. Date: 10/4/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *Mixing chamber scraping* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *2.25/30* ** ** Tylan 10-Nitride *up* ** *19.6/30* ** ** Tylan 11-LTO *up* ** *24.02/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 798 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Oct 5 06:22:09 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 05 Oct 2011 06:22:09 -0700 Subject: Diffusion Morning Report 10/05/11 Message-ID: <4E8C5A01.9060309@stanford.edu> Good Morning All, Looking good this morning. New issues; SEM4160 killed by James. Tylan LTO possible poor uniformity. Left over issues: Tylan 2 needs test after tube change, Epi LLA still has issues. No other problems at this time. Date: 10/5/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *down* *needs test after repair* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *2.25/30* ** ** Tylan 10-Nitride *up* ** *19.6/30* ** ** Tylan 11-LTO *yellow* *poor uniformity* *27.3/30* ** * 1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 798 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Oct 6 06:34:06 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 06 Oct 2011 06:34:06 -0700 Subject: Diffusion Morning report 10/06/11 Message-ID: <4E8DAE4E.6020505@stanford.edu> Good Morning All, Looking good this morning. Tylan 2 is down for a broken cantilever sheath. Left overs: SEM4160 is still down no stage movement-found a bad 24v power supply-ordered.-don't know what else is wrong. Epi LLa still has issues. Tylan LTO one user reported poor uniformity on a long run, three users since no comment?? No other issues at this time. Date: 10/6/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *down* *broken cantilever sheath* ** ** *1* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *2.25/30* ** ** Tylan 10-Nitride *up* ** *19.6/30* ** ** Tylan 11-LTO *yellow* *poor uniformity ?* *28.83/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 798 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Oct 7 06:22:13 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 07 Oct 2011 06:22:13 -0700 Subject: Diffusion Morning Report 10/07/11 Message-ID: <4E8EFD05.3000207@stanford.edu> Good Morning All, Looking good this morning. Tylan LTO going down for pull and clean on Monday. J wants Ammonia on Fiji. Leftovers: SEM4160-power supply ordered-may not be the only problem-No ETA. Epi has low Arsine-users beware. No other issuers. Date: 10/7/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *2.25/30* ** ** Tylan 10-Nitride *up* ** *21.95/30* ** ** Tylan 11-LTO *yellow* *poor uniformity ?* *31.55/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues, Low Arsine* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 798 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Oct 10 06:27:37 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 10 Oct 2011 06:27:37 -0700 Subject: Diffusion Morning Report 10/10/11 Message-ID: <4E92F2C9.6040901@stanford.edu> Good morning All, Looking good this morning. Tylan LTO is down for scheduled pull and clean. Epi will be down today for facilities work. Tylan 2 had low oxidation rate. Left over issues: LOW Arsine on Epi, FIJI wants NH3. No other issues at this time. Date: 10/10/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *low oxidation rate* ** ** *2* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *2.25/30* ** ** Tylan 10-Nitride *up* ** *22.8/30* ** ** Tylan 11-LTO *down* *pull and clean* *0/30* ** *1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues, Low Arsine* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 770 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Oct 11 06:38:58 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 11 Oct 2011 06:38:58 -0700 Subject: Diffusion Morning Report 10/11/11 Message-ID: <4E9446F2.7020300@stanford.edu> Good Morning All, Looking good this morning. LTO is cleaned and reassembled-coating. Will need a test. Nitride had bubbles and pressure rise. Burn box pressure high after long Nitride run-cleaning. Leftover issues: tylan 2 possible low oxidation rate. Epi low Arsine. Fiji J wants Ammonia. No other issues at this time. Date: 10/11/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *low oxidation rate?* ** ** *3* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *2.44/30* ** ** Tylan 10-Nitride *yellow* *Possible process issues-bubbles* *23.78/30* ** *2* Tylan 11-LTO *down* *pull and clean done needs coat and test* *0/30* ** *1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues, Low Arsine* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* *Cleaned this morning* ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 770 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Oct 12 06:25:34 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 12 Oct 2011 06:25:34 -0700 Subject: Diffusion Morning Report 10/12/11 Message-ID: <4E95954E.1020303@stanford.edu> Good Morning All, Looking good this morning. Tylan Poly had low thickness and MFS alarms. Tylan Nitride has bubbles in the film. FGA 2 has a broken pull Rod. SEM4160 has stage problems. Left over issues: Nitride bubbles, Epi Low arsine, J wants Ammonia for FiJi. No other issues at this time. Date: 10/12/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *yellow* *low dep rate-mfs alarms* *2.44/30* ** *1* Tylan 10-Nitride *yellow* *Possible process issues-bubbles* *25.4/30* ** *2* Tylan 11-LTO *up* ** *.32/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues, Low Arsine* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *down* *stage issues* ** ** ** ZYGO *up* ** ** ** ** FGA2 *down* *broken pull rod* ** ** ** SiH4 for furnaces ** *B on line pressure 770 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Oct 13 06:37:25 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 13 Oct 2011 06:37:25 -0700 Subject: Diffusion Morning Report 11/13/11 Message-ID: <4E96E995.6030804@stanford.edu> Good Morning All, Looking good this morning. No new problems over night. Arsine for Epi was installed yesterday and leak checked overnight. Will be back on line later this morning. Leftovers: possible low dep rate on tylan poly. Bubbles in Tylan nitride. J wants Ammonia on FIJI. Date: 10/13/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *yellow* *low dep rate-mfs alarms* *2.6/30* ** *1* Tylan 10-Nitride *yellow* *Possible process issues-bubbles* *25.4/30* ** *2* Tylan 11-LTO *up* ** *1.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues, Arsine changed-back on today* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 770 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Oct 17 08:10:00 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 17 Oct 2011 08:10:00 -0700 Subject: Diffusion Morning Report 10/17/11 Message-ID: <4E9C4548.2050207@stanford.edu> Good Morning All, Looking good this morning. Nitride is down for pull and clean. Epi had a stuck wafer but its OK now. Left over issues: J wants NH3 for Fiji-J is working on it. No other issues at this time. Date: 10/17/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *3.26/30* ** ** Tylan 10-Nitride *down* *pull and clean* *0/30* ** *1* Tylan 11-LTO *up* ** *3.96/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 770 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Oct 18 06:38:31 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 18 Oct 2011 06:38:31 -0700 Subject: Diffusion Morning Report 10/18/11 Message-ID: <4E9D8157.9050606@stanford.edu> Good Morning All, Looking good this morning. No new issues overnight. Tylan Nitride is back together after pull and clean needs coat and test. Leftover issues: J wants NH3 for FiJi-He is dealing with the vendor. No other issues at this time. Date: 10/18/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *3.26/30* ** ** Tylan 10-Nitride *down* *assembled needs coat and test* *0/30* ** *1* Tylan 11-LTO *up* ** *3.96/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 745 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Oct 19 09:37:05 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 19 Oct 2011 09:37:05 -0700 Subject: Diffusion Morning Report 10/19/11 Message-ID: <4E9EFCB1.3080205@stanford.edu> Good Morning All, Looking good this morning. Thermco Poly 2 tube is broken. Epi is down for gas line tie ins to ICP and CCP. Left overs: Ammonia for Fiji- J is working on it. No othe4r issues at this time. Date: 10/19/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *3.26/30* ** ** Tylan 10-Nitride *yellow* *bubbles* *.11/30* ** ** Tylan 11-LTO *up* ** *7.2/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *down* *tube destroyed* ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *lla issues, gas line tie ins* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 745 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Oct 20 06:51:30 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 20 Oct 2011 06:51:30 -0700 Subject: Diffusion Morning Report 10/20/11 Message-ID: <4EA02762.4090305@stanford.edu> Good Morning All, Looking good this morning. All gas lines for ICP and CCP are tied in and signed off by SCFD. Germane for Epi is changed and will be back on line this morning. Thermco poly 2 tube change in progress. J is working with vendor for NH3 on Fiji. No other issues at this time. Date: 10/20/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *3.41/30* ** ** Tylan 10-Nitride *yellow* *no bubbles* *.22/30* ** ** Tylan 11-LTO *up* ** *7.26/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *down* *tube destroyed* ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 745 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Oct 21 06:41:26 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 21 Oct 2011 06:41:26 -0700 Subject: Diffusion Morning Report 10/21/11 Message-ID: <4EA17686.6050609@stanford.edu> Good Morning All, Looking good this morning. No new issues today. Burn box clean this morning. Leftovers: Thermco Poly2 is back together and in standby. will need coat and test. J is working with vendor on NH3 for Fiji. Date: 10/21/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *3.41/30* ** ** Tylan 10-Nitride *yellow* ** *.29/30* ** ** Tylan 11-LTO *up* ** *8.26/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *down* *re assembled needs coat and test* ** ** * 1* Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 745 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Oct 24 07:15:06 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 24 Oct 2011 07:15:06 -0700 Subject: Diffusion Morning Report 10/24/11 Message-ID: <4EA572EA.3090109@stanford.edu> Good Morning All, Looking Good this morning. Tylans1-4 down for pcw water work. Tycom terminal has intermittent issues-ordering a new one. Germane to Thermco poly 1 and 2 and SiGe is down for sensor issues. Leftover issues: J is working with Cambridge to get NH3. No other issues at this time. Date: 10/24/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *water work* ** ** ** Tylan 2 *down* *water work* ** ** ** Tylan 3 *down* *water work* ** ** ** Tylan 4 *down* *water work* ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *3.87/30* ** ** Tylan 10-Nitride *yellow* ** *.29/30* ** ** Tylan 11-LTO *up* ** *8.28/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *yellow* *needs test after repair* ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 733 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Oct 25 07:07:02 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 25 Oct 2011 07:07:02 -0700 Subject: Diffusion Morning Report 10/25/11 Message-ID: <4EA6C286.3060903@stanford.edu> Good Morning All, Looking good this morning. Lots of tools down for process cooling water work. Water work for PWS and Tylan 1 bank is completed. Tylan Poly had MFS alarms. SEM4160 stage is stuck. Leftover issues: J is working on NH3 for Fijis. GeH4 to Thermco POly1 and2 and SiGe are down for sensor issues. Date: 10/25/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *down* *Water work\* ** ** ** Tylan 6-POCl3 *down* *Water work\* ** ** ** Tylan 7-TEOS2 *down* *Water work\* *10.49/30* ** ** Tylan 8-SiGe *down* *Water work\* *3.76/30* ** ** Tylan 9-Poly *down* *Water work\mfs alarms* *3.87/30* ** ** Tylan 10-Nitride *down* *Water work\* *.29/30* ** ** Tylan 11-LTO *down* *Water work\* *10.25/30* ** ** Tylan 12-FGA *down* *Water work\* ** ** ** Thermco 1 *down* *Water work\* ** ** ** Thermco 2 *down* *Water work\* ** ** ** Thermco 3 *down* *Water work\* ** ** ** Thermco4 *down* *Water work\* ** ** ** Thermco Poly1 *down* *Water work\* ** * * ** Thermco Poly2 *down* *Water work\* ** ** ** Thermco Nitride1 *down* *Water work\* ** ** ** Thermco bpsg *down* *Water work\* ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *down* *Stage not homed* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 733 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Oct 26 06:33:09 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 26 Oct 2011 06:33:09 -0700 Subject: Diffusion Morning Report 10/26/11 Message-ID: <4EA80C15.8000909@stanford.edu> Good Morning All, Looking good this morning. All prep water work for the furnace area is completed. Possible SiH4 flow issues on Epi. Leftover issues: No GeH4 to Thermco Poly1 and 2 and SiGe. J is working on NH3 for FiJi. No other major issues Date: 10/26/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *yellow* ** *3.87/30* ** ** Tylan 10-Nitride *yellow* ** *.29/30* ** ** Tylan 11-LTO *yellow* ** *10.25/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *down* ** ** ** ** Thermco4 *down* ** ** ** ** Thermco Poly1 *yellow* ** ** * * ** Thermco Poly2 *yellow* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues, possible SiH4 flow issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 733 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Oct 27 06:31:23 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 27 Oct 2011 06:31:23 -0700 Subject: Diffusion Morning Report 10/27/11 Message-ID: <4EA95D2B.2060603@stanford.edu> Good Morning all, Looking good this morning. TEL is down for water prep work. Tylan Poly is down for MFS and pressure alarms. Epi had hazy wafers. MST 26 sensor repaired-GeH4 to LPs back on. Leftovers:J is working on NH3 to fijis. No other major issues at this time. Date: 10/27/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *down* *MFS-pressure errors* *3.87/30* ** *1* Tylan 10-Nitride *yellow* ** *2.04/30* ** ** Tylan 11-LTO *yellow* ** *10.25/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *down* ** ** ** ** Thermco4 *down* ** ** ** ** Thermco Poly1 *yellow* ** ** * * ** Thermco Poly2 *yellow* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues,Hazy wafers* ** ** ** TEL Spa *down* *Water Work* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 733 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Oct 28 08:38:01 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 28 Oct 2011 08:38:01 -0700 Subject: Diffusion Morning Report 10/28/11 Message-ID: <4EAACC59.8070602@stanford.edu> Good Morning all, Looking good this morning No new problems overnight. Burn box cleaned this morning. Forming gas changed. Leftovers: Epi Hazy wafers. J is looking into NH3 for FIJIs. Date: 10/28/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** Tylan 2 *up* ** ** Tylan 3 *up* ** ** Tylan 4 *up* ** ** Tylan 5-BBr3 *up* ** ** Tylan 6-POCl3 *up* ** ** Tylan 7-TEOS2 *up* ** *10.49/30* Tylan 8-SiGe *up* ** *3.76/30* Tylan 9-Poly *up* ** *4.4/30* Tylan 10-Nitride *yellow* ** *2.04/30* Tylan 11-LTO *yellow* ** *10.81/30* Tylan 12-FGA *up* ** ** Thermco 1 *up* ** ** Thermco 2 *up* ** ** Thermco 3 *down* ** ** Thermco4 *down* ** ** Thermco Poly1 *up* ** ** Thermco Poly2 *up* ** ** Thermco Nitride1 *up* ** ** Thermco bpsg *up* ** ** AMAT Epi *yellow* *lla issues,Hazy wafers* ** TEL Spa *up* ** ** Burn Box *up* ** ** SEM 4160 *up* ** ** ZYGO *up* ** ** FGA2 *up* ** ** SiH4 for furnaces ** *B on line pressure 733 psi* *changeover working well* -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Oct 31 06:40:17 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 31 Oct 2011 06:40:17 -0700 Subject: Diffusion Morning Report 10/31/11 Message-ID: <4EAEA541.7080502@stanford.edu> Good Morning All, Looking good this morning. No new problems overnight. CORAL seems to be down so there may be possible status issues. Leftovers: J working on NH3 for Fijis. Epi haze on wafers. No other issues at this time. Date: 10/31/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.49/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *4.4/30* ** ** Tylan 10-Nitride *yellow* ** *2.14/30* ** ** Tylan 11-LTO *yellow* ** *12.51/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *down* ** ** ** ** Thermco4 *down* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues,Hazy wafers* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 733 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... 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