Diffusion Morning report 10/06/11

Ted Berg tberg at stanford.edu
Thu Oct 6 06:34:06 PDT 2011


Good Morning All,
     Looking good this morning. Tylan 2 is down for a broken cantilever 
sheath.
     Left overs: SEM4160 is still down no stage movement-found a bad 24v 
power supply-ordered.-don't know what else is wrong.  Epi LLa still has 
issues. Tylan LTO one user reported poor uniformity on a long run, three 
users since no comment?? No other issues at this time.

					
	Date: 	10/6/11 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*down* 	*broken cantilever sheath* 	** 	** 	*1*
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*up* 	** 	*10.49/30* 	** 	**
Tylan 8-SiGe 	*up* 	** 	*3.76/30* 	** 	**
Tylan 9-Poly 	*up* 	** 	*2.25/30* 	** 	**
Tylan 10-Nitride 	*up* 	** 	*19.6/30* 	** 	**
Tylan 11-LTO 	*yellow* 	*poor uniformity ?* 	*28.83/30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*future* 	** 	** 	** 	**
Thermco4 	*future* 	** 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	*
* 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi 	*yellow* 	*lla issues* 	** 	** 	**
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
Ebeam 	*down* 	*cryo compresssor dead* 	** 	** 	**
ZYGO 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	** 	*B on line pressure 798 psi* 	*changeover working 
well* 	** 	**


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