Diffusion Morning Report 10/11/11

Ted Berg tberg at stanford.edu
Tue Oct 11 06:38:58 PDT 2011


Good Morning All,
     Looking good this morning. LTO is cleaned and reassembled-coating. 
Will need a test. Nitride had bubbles and pressure  rise. Burn box 
pressure high after long Nitride run-cleaning.
     Leftover issues: tylan 2 possible low oxidation rate. Epi low 
Arsine. Fiji J wants Ammonia. No other issues at this time.

					
	Date: 	10/11/11 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*yellow* 	*low oxidation rate?* 	** 	** 	*3*
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*up* 	** 	*10.49/30* 	** 	**
Tylan 8-SiGe 	*up* 	** 	*3.76/30* 	** 	**
Tylan 9-Poly 	*up* 	** 	*2.44/30* 	** 	**
Tylan 10-Nitride 	*yellow* 	*Possible process issues-bubbles* 
*23.78/30* 	** 	*2*
Tylan 11-LTO 	*down* 	*pull and clean done needs coat and test* 
*0/30* 	** 	*1*
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*future* 	** 	** 	** 	**
Thermco4 	*future* 	** 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	*
* 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi 	*yellow* 	*lla issues, Low Arsine* 	** 	** 	**
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	*Cleaned this morning* 	** 	** 	**
SEM 4160 	*up* 	** 	** 	** 	**
ZYGO 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	** 	*B on line pressure 770 psi* 	*changeover working 
well* 	** 	**


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