Diffusion Morning Report 10/25/11

Ted Berg tberg at stanford.edu
Tue Oct 25 07:07:02 PDT 2011


Good Morning All,
     Looking good this morning. Lots of tools down for process cooling 
water work. Water work for PWS and Tylan 1 bank is completed. Tylan Poly 
had MFS alarms. SEM4160 stage is stuck.
     Leftover issues: J is working on NH3 for Fijis. GeH4 to Thermco 
POly1 and2 and SiGe are  down for sensor issues.

					
	Date: 	10/25/11 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*down* 	*Water work\* 	** 	** 	**
Tylan 6-POCl3 	*down* 	*Water work\* 	** 	** 	**
Tylan 7-TEOS2 	*down* 	*Water work\* 	*10.49/30* 	** 	**
Tylan 8-SiGe 	*down* 	*Water work\* 	*3.76/30* 	** 	**
Tylan 9-Poly 	*down* 	*Water work\mfs alarms* 	*3.87/30* 	** 	**
Tylan 10-Nitride 	*down* 	*Water work\* 	*.29/30* 	** 	**
Tylan 11-LTO 	*down* 	*Water work\* 	*10.25/30* 	** 	**
Tylan 12-FGA 	*down* 	*Water work\* 	** 	** 	**
Thermco 1 	*down* 	*Water work\* 	** 	** 	**
Thermco 2 	*down* 	*Water work\* 	** 	** 	**
Thermco 3 	*down* 	*Water work\* 	** 	** 	**
Thermco4 	*down* 	*Water work\* 	** 	** 	**
Thermco Poly1 	*down* 	*Water work\* 	** 	*
* 	**
Thermco Poly2 	*down* 	*Water work\* 	** 	** 	**
Thermco Nitride1 	*down* 	*Water work\* 	** 	** 	**
Thermco bpsg 	*down* 	*Water work\* 	** 	** 	**
AMAT Epi 	*yellow* 	*lla issues* 	** 	** 	**
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
SEM 4160 	*down* 	*Stage not homed* 	** 	** 	**
ZYGO 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	** 	*B on line pressure 733 psi* 	*changeover working 
well* 	** 	**


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