Diffusion Morning Report 10/28/11

Ted Berg tberg at stanford.edu
Fri Oct 28 08:38:01 PDT 2011


Good Morning all,
     Looking good this morning No new problems overnight. Burn box 
cleaned this morning. Forming gas changed.
     Leftovers: Epi Hazy wafers. J is looking into NH3 for FIJIs.

					
	Date: 	10/28/11 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 		
Tylan 2 	*up* 	** 	** 		
Tylan 3 	*up* 	** 	** 		
Tylan 4 	*up* 	** 	** 		
Tylan 5-BBr3 	*up* 	** 	** 		
Tylan 6-POCl3 	*up* 	** 	** 		
Tylan 7-TEOS2 	*up* 	** 	*10.49/30* 		
Tylan 8-SiGe 	*up* 	** 	*3.76/30* 		
Tylan 9-Poly 	*up* 	** 	*4.4/30* 		
Tylan 10-Nitride 	*yellow* 	** 	*2.04/30* 		
Tylan 11-LTO 	*yellow* 	** 	*10.81/30* 		
Tylan 12-FGA 	*up* 	** 	** 		
Thermco 1 	*up* 	** 	** 		
Thermco 2 	*up* 	** 	** 		
Thermco 3 	*down* 	** 	** 		
Thermco4 	*down* 	** 	** 		
Thermco Poly1 	*up* 	** 	** 	
	
Thermco Poly2 	*up* 	** 	** 		
Thermco Nitride1 	*up* 	** 	** 		
Thermco bpsg 	*up* 	** 	** 		
AMAT Epi 	*yellow* 	*lla issues,Hazy wafers* 	** 		
TEL Spa 	*up* 	** 	** 		
Burn Box 	*up* 	** 	** 		
SEM 4160 	*up* 	** 	** 		
ZYGO 	*up* 	** 	** 		
FGA2 	*up* 	** 	** 		
SiH4 for furnaces 	** 	*B on line pressure 733 psi* 	*changeover working 
well* 		


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20111028/27f56a33/attachment.html>


More information about the diffusion mailing list