From rseymour at stanford.edu Thu Sep 1 07:09:19 2011 From: rseymour at stanford.edu (Ray Seymour) Date: Thu, 01 Sep 2011 07:09:19 -0700 Subject: Diffusion Morning Report Message-ID: <4E5F920F.8000306@stanford.edu> Good Morning All, Ted is out today. there are no new issues. Left over issues: TEOS need test after ampule change. SiGe pump should be back this week. Thermco 2 possible temp issues. No other problems at this time. Date: 9/1/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *Baffle scraping* ** ** *1* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *5.9/30* ** ** Tylan 8-SiGe *down* *Mech Pump problems-out for repair* *1.94/30* ** ** Tylan 9-Poly * * *28.91/30* ** ** Tylan 10-Nitride *yellow* *user test OK* *5.02/30* ** ** Tylan 11-LTO *up* ** *12.54/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *Possible temp issues* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 856 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Sep 2 08:29:27 2011 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 02 Sep 2011 08:29:27 -0700 Subject: Diffusion Morning Report Message-ID: <4E60F657.9020107@stanford.edu> Good Morning All, Ted is out today. Tylan4 has bad sensor for N2, changing this morning. No other new issues this morning. Left over issues: TEOS need test after ampule change. SiGe pump should be back this week. Thermco 2 possible temp issues. Date: 9/2/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* * * ** ** * * Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *5.9/30* ** ** Tylan 8-SiGe *down* *Mech Pump problems-out for repair* *1.94/30* ** ** Tylan 9-Poly up * * *28.91/30* ** ** Tylan 10-Nitride *up * * * *5.04/30* ** ** Tylan 11-LTO *up* ** *12.59/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *Possible temp issues* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* * cleaned this morning * ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 847 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Sep 6 07:28:57 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 06 Sep 2011 07:28:57 -0700 Subject: Diffusion Morning Report 09/06/11 Message-ID: <4E662E29.3020702@stanford.edu> Good Morning All, Looking OK this morning. New issues: Tylan Nitride not pumping. Tylan 2 and 4 have MFS issues. Left over issues: Epi LLA issues, SiGe pump should have been back last week. TEOS needs test after ampule change. Thermco 2 possible Temp issues. No other issues at this time. Date: 9/6/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *MFS alarms-Temp readout* ** ** *2* Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *MFS alarms* ** ** *3* Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *5.9/30* ** ** Tylan 8-SiGe *down* *Mech Pump problems-out for repair* *1.94/30* ** ** Tylan 9-Poly *up* ** *28.91/30* ** ** Tylan 10-Nitride *down* *Wont Pump* *8.2/30* ** *1* Tylan 11-LTO *up* ** *12.76/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *Possible temp issues* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 817 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Sep 7 06:29:52 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 07 Sep 2011 06:29:52 -0700 Subject: Diffusion morning Report 09/07/11 Message-ID: <4E6771D0.2080609@stanford.edu> Good Morning All, Looking somewhat dismal this morning. All thermco LPs are down because of burn box. Nitride is still down pumping issues. Left overs: SiGe pump should be back today. TEOS still needs a test. Tylan 2 and 4 MFS issues. Epi LLA issues. I guess it could be worse. No other issues at this time. Date: 9/7/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *MFS alarms-Temp readout* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *MFS alarms* ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *5.9/30* ** ** Tylan 8-SiGe *down* *Mech Pump problems-out for repair* *1.94/30* ** ** Tylan 9-Poly *up* ** *28.91/30* ** ** Tylan 10-Nitride *down* *Wont Pump* *8.2/30* ** *2* Tylan 11-LTO *up* ** *13.41/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *Possible temp issues* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *down* *burnbox dead* ** * * *1* Thermco Poly2 *down* *burnbox dead* ** ** *1* Thermco Nitride1 *down* *burnbox dead* ** ** *1* Thermco bpsg *down* *burnbox dead* ** ** *1* AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 817 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Sep 8 06:09:14 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 08 Sep 2011 06:09:14 -0700 Subject: Diffusion Morning Report 09/08/11 Message-ID: <4E68BE7A.6040005@stanford.edu> Good Morning All, Looking good this morning. No new problems this morning. Leftovers are: Nitride pumping issue. Thermco 2 possible temp issue. Sige pump back today. TEOS needs a test. TYlan 2 MFS issues. Epim LLA issues. No other problems at this time. Date: 9/8/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *MFS alarms* ** ** *2* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *5.9/30* ** ** Tylan 8-SiGe *down* *Mech Pump problems-out for repair* *1.94/30* ** ** Tylan 9-Poly *up* ** *28.91/30* ** ** Tylan 10-Nitride *down* *Wont Pump* *8.2/30* ** *1* Tylan 11-LTO *up* ** *13.41/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *Possible temp issues* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 817 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Sep 9 07:05:43 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 09 Sep 2011 07:05:43 -0700 Subject: Diffusion Morning Report 09/09/11 Message-ID: <4E6A1D37.2000100@stanford.edu> Good Morning All, Looking good this Morning. SiGe pump is back and installed-checking leak rate. Thermco Poly1 had no apparent Ge dep. Nitride checking leak rate. Left overs: Sige pump-leak rate, Nitride leak rate, TEOS-needs test, Tylan 2 mfs issues, Thermco 2 possible temp issues. No other problems at this time. Date: 9/9/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *MFS alarms* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *5.9/30* ** ** Tylan 8-SiGe *down* *pump replaced checking leak rate* *1.94/30* ** *2* Tylan 9-Poly *up* ** *28.91/30* ** ** Tylan 10-Nitride *down* *high leak rate* *8.2/30* ** ** Tylan 11-LTO *up* ** *14.43/30* ** *1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *Possible temp issues* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *yellow* *no Ge dep?* ** * * *3* Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 817 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Sep 12 08:57:56 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 12 Sep 2011 08:57:56 -0700 Subject: Diffusion Morning Report 09/12/11 Message-ID: <4E6E2C04.10608@stanford.edu> Good Morning All, Looking Ok this morning. Had MDA alarm and fire responded. Tracking down alarm now. Epi is yellow for no GeH4-getting ETA from Praxair.. Left over issues: MFS alarms on Tylan 2 needs test. Epi LLa issues. Thermco 2 possible temp issues. No other issues at this time. Date: 9/12/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *MFS alarms-needs test* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *5.9/30* ** ** Tylan 8-SiGe *yellow* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *28.91/30* ** ** Tylan 10-Nitride *up* ** *8.2/30* ** ** Tylan 11-LTO *up* ** *14.43/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *Possible temp issues* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *yellow* *no Ge dep?* ** * * *1* Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues-no GeH4-Waiting ETA* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 817 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Sep 13 06:27:19 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 13 Sep 2011 06:27:19 -0700 Subject: Diffusion Morning Report 09/13/11G Message-ID: <4E6F5A37.5020005@stanford.edu> Good Morning All, Looking good this morning. Tylan poly is down for scheduled pull and clean. Left over issues: Tylan 2 needs a test after repairs, Thermco 2 possible temp issues, Epi LLa issues, Thermco Poly 1 low GeH4 dep. No other issues at this time. Date: 9/13/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *MFS alarms-needs test* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *5.9/30* ** ** Tylan 8-SiGe *up* *User reports test good* *3.4/30* ** ** Tylan 9-Poly *down* *pull and clean* *0/30* ** *1* Tylan 10-Nitride *up* ** *9.9/30* ** ** Tylan 11-LTO *up* ** *15.7/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *Possible temp issues* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *yellow* *no Ge dep?* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues-no GeH4-Waiting ETA* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 817 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Sep 14 06:28:23 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 14 Sep 2011 06:28:23 -0700 Subject: Diffusion Morning Report 09/14/11 Message-ID: <4E70ABF7.2090504@stanford.edu> Good Morning All, Looking good this morning. Tylan Poly is in the process of being cleaned. Tylan Nitride has high base pressure. Leftovers: Thermco 2 possible temp issues, Thermco Poly1 low Ge dep. Epi LLA issues and no GeH4-it ships today. No other issues at this time. Date: 9/14/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *5.9/30* ** ** Tylan 8-SiGe *up* ** *3.4/30* ** ** Tylan 9-Poly *down* *pull and clean* *0/30* ** *1* Tylan 10-Nitride *down* *possible burnt orings* *9.9/30* ** *2* Tylan 11-LTO *up* ** *15.7/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *Possible temp issues* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *yellow* *no Ge dep?* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues-no GeH4-Shipped today* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 817 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Sep 15 06:16:22 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 15 Sep 2011 06:16:22 -0700 Subject: Diffusion Morning Report 09/15/11 Message-ID: <4E71FAA6.6040207@stanford.edu> Good Morning All, Looking good this morning. No new issues. Leftovers: Nitride checking out high base. Epi-LLA issues and no GeH4. Thermco 2 Possible temp issues. Thermco Poly 1 low Ge Dep. No other issues at this time. Date: 9/15/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *5.9/30* ** ** Tylan 8-SiGe *up* ** *3.4/30* ** ** Tylan 9-Poly *up* ** *.18/30* ** ** Tylan 10-Nitride *down* *possible burnt orings* *9.9/30* ** *1* Tylan 11-LTO *up* ** *15.7/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *Possible temp issues* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *yellow* *no Ge dep?* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues-no GeH4-Shipped today* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 817 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Sep 16 08:11:29 2011 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 16 Sep 2011 08:11:29 -0700 Subject: Diffusion Morning Report Message-ID: <4E736721.8050306@stanford.edu> Good Morning All, Ted is out today. Looking good this morning. No new issues. Leftover issues Epi-LLA issues. Thermco 2 Possible temp issues. Thermco Poly 1 low Ge Dep. No other issues at this time. Date: 9/15/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *5.9/30* ** ** Tylan 8-SiGe *up* ** *3.4/30* ** ** Tylan 9-Poly *up* ** *.18/30* ** ** Tylan 10-Nitride up * * *12.81/30* ** Tylan 11-LTO *up* ** *15.73/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *Possible temp issues* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *yellow* *no Ge dep?* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* *cleaned this morning * ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 817 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Sep 16 08:13:57 2011 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 16 Sep 2011 08:13:57 -0700 Subject: Diffusion Morning Report Message-ID: <4E7367B5.50800@stanford.edu> Good Morning All, Ted is out today. Looking good this morning. No new issues. Leftover issues Epi-LLA issues. Thermco 2 Possible temp issues. Thermco Poly 1 low Ge Dep. No other issues at this time. Date: 9/16/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *5.9/30* ** ** Tylan 8-SiGe *up* ** *3.4/30* ** ** Tylan 9-Poly *up* ** *.18/30* ** ** Tylan 10-Nitride up * * *12.81/30* ** Tylan 11-LTO *up* ** *15.73/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *Possible temp issues* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *yellow* *no Ge dep?* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* *cleaned this morning * ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 817 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Sep 19 06:43:26 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 19 Sep 2011 06:43:26 -0700 Subject: Diffusion Morning Report 09/19/11 Message-ID: <4E7746FE.8070402@stanford.edu> Good Morning All, Looking good this morning. A few minor issues. MFS alarms on Tylan 2 and Poly. TEOS not pumping. MFS alarms on Nitride. FS work on second chamber install. Left over issues: LLA on Epi. No other issues at this time. Date: 9/19/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 up Tylan 2 *yellow* *O2 lo leak* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *won't pump down* *6.83/30* *1* ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *yellow* *mfs alarms* *.18/30* ** ** Tylan 10-Nitride *yellow* *mfs alarms bubbles* *12.81/30* ** ** Tylan 11-LTO *up* ** *15.7/30* *2* ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 817 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Sep 20 06:10:56 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 20 Sep 2011 06:10:56 -0700 Subject: Diffusion Morning Report 09/20/11 Message-ID: <4E7890E0.1070907@stanford.edu> Good Morning All, Looking very good this morning. No new problems. Left overs:TEOS trap cleaning, Epi LLA. No other issues at this time. Date: 9/20/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *trap cleaning* *6.83/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *.18/30* ** ** Tylan 10-Nitride *up* ** *12.81/30* ** ** Tylan 11-LTO *up* ** *15.7/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 817 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Sep 21 06:15:03 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 21 Sep 2011 06:15:03 -0700 Subject: Diffusion Morning Report 09/21/11 Message-ID: <4E79E357.90907@stanford.edu> Good Morning All, Looking good this morning. Thermco burnbox is the only new issue. We should have the circuit breaker today. The only leftover is Epi LLA. No other issues at this time. Date: 9/21/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *6.83/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *1.16/30* ** ** Tylan 10-Nitride *up* ** *12.81/30* ** ** Tylan 11-LTO *up* ** *16.96/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *down* *burn box issues* ** * * *1* Thermco Poly2 *down* *burn box issues* ** ** ** Thermco Nitride1 *down* *burn box issues* ** ** ** Thermco bpsg *down* *burn box issues* ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 817 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Sep 22 07:04:51 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 22 Sep 2011 07:04:51 -0700 Subject: Diffusion Morning Report 09/22/11 Message-ID: <4E7B4083.4080609@stanford.edu> Good Morning All, Looking good this morning. Thermco Poly has a broken TC sheath. Tylan Nitride possible process problem No other new problems at this time. Left over issues: Epi LLA issues. Date: 9/22/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *8.6/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *7.3/30* ** ** Tylan 10-Nitride *yellow* *Possible process issue* *16.14/30* ** ** Tylan 11-LTO *up* ** *17.54/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *down* *leak* ** * * *1* Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 817 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Sep 23 05:58:59 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 23 Sep 2011 05:58:59 -0700 Subject: Diffusion Morning Report 09/23/11 Message-ID: <4E7C8293.1030806@stanford.edu> Good Morning All, Looking good this morning. No new issues at this time. The only left over issues are Epi LLa and Possible Nitride process issues. Date: 9/23/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *8.6/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *7.3/30* ** ** Tylan 10-Nitride *yellow* *Possible process issue* *16.49/30* ** ** Tylan 11-LTO *up* ** *18.63/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 817 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Sep 26 06:41:24 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 26 Sep 2011 06:41:24 -0700 Subject: Diffusion Morning Report 09/26/11 Message-ID: <4E808104.8010702@stanford.edu> Good Morning All, Looking good this morning. New issues-someone did not know how to switch control of the Epi from front to back. Possible HCl flow issues on Epi. HiO2 leak on Tylan 4. Left over issues: Epi LLA, Nitride Bubbles-Maurice testing this morning. No other issues at this time. Date: 9/26/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *Hi O2 leak-MFS alarm* ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *8.6/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *7.3/30* ** ** Tylan 10-Nitride *yellow* *Possible process issue* *16.67/30* ** ** Tylan 11-LTO *up* ** *22.96/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues, Possible HCl flow issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 817 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Sep 27 07:31:02 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 27 Sep 2011 07:31:02 -0700 Subject: Diffusion Morning Report 09/27/11 Message-ID: <4E81DE26.5090002@stanford.edu> Good Morning All, Looking good this morning. Epi User had an HCL flow issue- I ran the same program no problem. Will leave open for observation. Left over issues:Epi LLA. No other problems at this time. Date: 9/27/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *8.6/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *7.3/30* ** ** Tylan 10-Nitride *up* ** *18.3/30* ** ** Tylan 11-LTO *up* ** *22.96/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues, Possible HCl flow issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 817 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From edmyers at stanford.edu Tue Sep 27 09:22:56 2011 From: edmyers at stanford.edu (Ed Myers) Date: Tue, 27 Sep 2011 09:22:56 -0700 (PDT) Subject: Installation Update In-Reply-To: <4E81DE26.5090002@stanford.edu> Message-ID: <663570085.1361325.1317140576456.JavaMail.root@zm07.stanford.edu> All, You probably noticed Drytek1 has left the building. The system was disconnected and rolled out yesterday. Part 2, the relocation of the Gasonics is scheduled to begin Wednesday morning (tomorrow). The new site between the MRC and Drytek4 has been prep-ed and the expectation is the Gasonics will be back on line Friday. The Oxford III-V etcher has arrived and it will be placed in it's location this week. We will be bringing in contractors to review both Oxfords and get quotes for their installation. I was also informed late last week the two new ALD's have a delivery date of November 1. Regards, Ed From tberg at stanford.edu Wed Sep 28 06:16:20 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 28 Sep 2011 06:16:20 -0700 Subject: Diffusion Morning Report 09/28/11 Message-ID: <4E831E24.8000805@stanford.edu> Good Morning All, Looking good this morning. No new issues at this time. Left overs-Epi LLA and possible HCl flow issues Date: 9/28/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *8.6/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *7.45/30* ** ** Tylan 10-Nitride *up* ** *18.41/30* ** ** Tylan 11-LTO *up* ** *23.37/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues, Possible HCl flow issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 817 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Sep 29 06:42:01 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 29 Sep 2011 06:42:01 -0700 Subject: Diffusion Morning Report 09/29/11 Message-ID: <4E8475A9.1090807@stanford.edu> Good Morning All, Looking good this morning. The only new issue is Tylan 4 temp control-TCU board replced doing temp cal. Left overs Epi LLA. No other issues at this time. Date: 9/29/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *down* *temp control issues* ** ** * 1* Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.09/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *7.45/30* ** ** Tylan 10-Nitride *up* ** *19.25/30* ** ** Tylan 11-LTO *up* ** *23.37/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 798 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Sep 30 06:36:04 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 30 Sep 2011 06:36:04 -0700 Subject: Diffusion Morning Report 09/30/11 Message-ID: <4E85C5C4.50904@stanford.edu> Good Morning All, Looking good this morning. Tylan Burn box will receive special cleaning this morning. No other new issues. Left over issues: Epi LLA. No other issues at this time. Date: 9/30/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *10.09/30* ** ** Tylan 8-SiGe *up* ** *3.76/30* ** ** Tylan 9-Poly *up* ** *7.45/30* ** ** Tylan 10-Nitride *up* ** *19.6/30* ** ** Tylan 11-LTO *up* ** *24.02/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lla issues* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line pressure 798 psi* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... 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