Diffusion morning Report 09/07/11

Ted Berg tberg at stanford.edu
Wed Sep 7 06:29:52 PDT 2011


Good Morning All,
     Looking somewhat dismal this morning. All thermco LPs are down 
because of burn box. Nitride is still down pumping issues.
     Left overs: SiGe pump should be back today. TEOS still needs a 
test. Tylan 2 and 4 MFS issues. Epi LLA issues. I guess it could be 
worse. No other issues at this time.

					
	Date: 	9/7/11 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*yellow* 	*MFS alarms-Temp readout* 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*yellow* 	*MFS alarms* 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*yellow* 	*needs test* 	*5.9/30* 	** 	**
Tylan 8-SiGe 	*down* 	*Mech Pump problems-out for repair* 	*1.94/30* 
** 	**
Tylan 9-Poly 	*up* 	** 	*28.91/30* 	** 	**
Tylan 10-Nitride 	*down* 	*Wont Pump* 	*8.2/30* 	** 	*2*
Tylan 11-LTO 	*up* 	** 	*13.41/30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*yellow* 	*Possible temp issues* 	** 	** 	**
Thermco 3 	*future* 	** 	** 	** 	**
Thermco4 	*future* 	** 	** 	** 	**
Thermco Poly1 	*down* 	*burnbox dead* 	** 	*
* 	*1*
Thermco Poly2 	*down* 	*burnbox dead* 	** 	** 	*1*
Thermco Nitride1 	*down* 	*burnbox dead* 	** 	** 	*1*
Thermco bpsg 	*down* 	*burnbox dead* 	** 	** 	*1*
AMAT Epi 	*yellow* 	*lla issues* 	** 	** 	**
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
Ebeam 	*down* 	*cryo compresssor dead* 	** 	** 	**
ZYGO 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	** 	*B on line pressure 817 psi* 	*changeover working 
well* 	** 	**


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