Diffusion Morning Report 09/09/11

Ted Berg tberg at stanford.edu
Fri Sep 9 07:05:43 PDT 2011


Good Morning All,
     Looking good this Morning. SiGe pump is back and installed-checking 
leak rate. Thermco Poly1 had no apparent Ge dep. Nitride checking leak rate.
     Left overs: Sige pump-leak rate, Nitride leak rate, TEOS-needs 
test, Tylan 2 mfs issues, Thermco 2 possible temp issues. No other 
problems at this time.

					
	Date: 	9/9/11 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*yellow* 	*MFS alarms* 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*yellow* 	*needs test* 	*5.9/30* 	** 	**
Tylan 8-SiGe 	*down* 	*pump replaced checking leak rate* 	*1.94/30* 
** 	*2*
Tylan 9-Poly 	*up* 	** 	*28.91/30* 	** 	**
Tylan 10-Nitride 	*down* 	*high leak rate* 	*8.2/30* 	** 	**
Tylan 11-LTO 	*up* 	** 	*14.43/30* 	** 	*1*
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*yellow* 	*Possible temp issues* 	** 	** 	**
Thermco 3 	*future* 	** 	** 	** 	**
Thermco4 	*future* 	** 	** 	** 	**
Thermco Poly1 	*yellow* 	*no Ge dep?* 	** 	*
* 	*3*
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi 	*yellow* 	*lla issues* 	** 	** 	**
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
Ebeam 	*down* 	*cryo compresssor dead* 	** 	** 	**
ZYGO 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	** 	*B on line pressure 817 psi* 	*changeover working 
well* 	** 	**


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