Diffusion Morning Report 09/13/11G

Ted Berg tberg at stanford.edu
Tue Sep 13 06:27:19 PDT 2011


Good Morning All,
     Looking good this morning. Tylan poly is down for scheduled pull 
and clean.
     Left over issues: Tylan 2 needs a test after repairs, Thermco 2 
possible temp issues, Epi LLa issues, Thermco Poly 1 low GeH4 dep. No 
other issues at this time.

					
	Date: 	9/13/11 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*yellow* 	*MFS alarms-needs test* 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*up* 	** 	*5.9/30* 	** 	**
Tylan 8-SiGe 	*up* 	*User reports test good* 	*3.4/30* 	** 	**
Tylan 9-Poly 	*down* 	*pull and clean* 	*0/30* 	** 	*1*
Tylan 10-Nitride 	*up* 	** 	*9.9/30* 	** 	**
Tylan 11-LTO 	*up* 	** 	*15.7/30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*yellow* 	*Possible temp issues* 	** 	** 	**
Thermco 3 	*future* 	** 	** 	** 	**
Thermco4 	*future* 	** 	** 	** 	**
Thermco Poly1 	*yellow* 	*no Ge dep?* 	** 	*
* 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi 	*yellow* 	*lla issues-no GeH4-Waiting ETA* 	** 	** 	**
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
Ebeam 	*down* 	*cryo compresssor dead* 	** 	** 	**
ZYGO 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	** 	*B on line pressure 817 psi* 	*changeover working 
well* 	** 	**


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