Diffusion Morning Report 09/14/11

Ted Berg tberg at stanford.edu
Wed Sep 14 06:28:23 PDT 2011


Good Morning All,
     Looking good this morning. Tylan Poly is in the process of being 
cleaned. Tylan Nitride has high base pressure.
     Leftovers: Thermco 2 possible temp issues, Thermco Poly1 low Ge 
dep. Epi LLA issues and no GeH4-it ships today.
No other issues at this time.

					
	Date: 	9/14/11 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*up* 	** 	*5.9/30* 	** 	**
Tylan 8-SiGe 	*up* 	** 	*3.4/30* 	** 	**
Tylan 9-Poly 	*down* 	*pull and clean* 	*0/30* 	** 	*1*
Tylan 10-Nitride 	*down* 	*possible burnt orings* 	*9.9/30* 	** 	*2*
Tylan 11-LTO 	*up* 	** 	*15.7/30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*yellow* 	*Possible temp issues* 	** 	** 	**
Thermco 3 	*future* 	** 	** 	** 	**
Thermco4 	*future* 	** 	** 	** 	**
Thermco Poly1 	*yellow* 	*no Ge dep?* 	** 	*
* 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi 	*yellow* 	*lla issues-no GeH4-Shipped today* 	** 	** 	**
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
Ebeam 	*down* 	*cryo compresssor dead* 	** 	** 	**
ZYGO 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	** 	*B on line pressure 817 psi* 	*changeover working 
well* 	** 	**


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20110914/64ebff7a/attachment.html>


More information about the diffusion mailing list