Diffusion Morning Report 09/21/11

Ted Berg tberg at stanford.edu
Wed Sep 21 06:15:03 PDT 2011


Good Morning All,
     Looking good this morning. Thermco burnbox  is the only new issue. 
We should have the circuit breaker today.
     The only leftover is Epi LLA. No other issues at this time.

					
	Date: 	9/21/11 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*up* 	** 	*6.83/30* 	** 	**
Tylan 8-SiGe 	*up* 	** 	*3.76/30* 	** 	**
Tylan 9-Poly 	*up* 	** 	*1.16/30* 	** 	**
Tylan 10-Nitride 	*up* 	** 	*12.81/30* 	** 	**
Tylan 11-LTO 	*up* 	** 	*16.96/30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*future* 	** 	** 	** 	**
Thermco4 	*future* 	** 	** 	** 	**
Thermco Poly1 	*down* 	*burn box issues* 	** 	*
* 	*1*
Thermco Poly2 	*down* 	*burn box issues* 	** 	** 	**
Thermco Nitride1 	*down* 	*burn box issues* 	** 	** 	**
Thermco bpsg 	*down* 	*burn box issues* 	** 	** 	**
AMAT Epi 	*yellow* 	*lla issues* 	** 	** 	**
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
Ebeam 	*down* 	*cryo compresssor dead* 	** 	** 	**
ZYGO 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	** 	*B on line pressure 817 psi* 	*changeover working 
well* 	** 	**


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