From rseymour at stanford.edu Mon Apr 2 07:06:06 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Mon, 02 Apr 2012 07:06:06 -0700 Subject: Diffusion Morning Report Message-ID: <4F79B24E.4090903@stanford.edu> Good Morning All, Ted is out today. Looking OK this morning- thermco Poly1 has boat issues. TEOS2 has MFS alarms. Tylan BPSG pull and clean tomorrow. Leftovers: Reg for B2 H6 ordered, Thermco 1and 2 TLC issues, Thermco Nitride waiting for orings, POCl3 still running only when staff present, SIGe pump out for repair,Epi second chamber in progress. No other major issues at this time. Date: 4/2/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* * * ** ** * * Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *Down* *MFS alarm * *14.39/30* ** * 1 * Tylan 8-SiGe *down* *broken tube-bad pump-out for repair* *0/30* ** ** Tylan 9-Poly *up* ** *11.9/30* ** ** Tylan 10-Nitride *up* ** *0/30* ** ** Tylan 11-LTO *yellow* *thickness* *22./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *no tlc* ** ** ** Thermco 2 *yellow* *no tlc* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *up* ** ** ** * * Thermco Poly1 *yellow* *no B2H6-reg ordered* ** * * * 2 * Thermco Poly2 *yellow* *no B2H6-reg ordered* ** ** * 3 * Thermco Nitride1 *yellow* *leak waiting for o-rings* ** ** * * Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up,scrubber prob on Chamber 2* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Apr 3 11:35:17 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 03 Apr 2012 11:35:17 -0700 Subject: Diffusion Morning Report 04/03/12 Message-ID: <4F7B42E5.80203@stanford.edu> Good morning All, Looking OK this morning. New items:LTO is down for pull and clean. Leftovers: Thermco TLC issues,SiGe pump out for repair,POCl3 andBBr3 sensor issues,Epi chamber 2 install-ongoing,TEOS-mfs issues,Thermco Nitride leak. No other major issues at this time. Date: 4/3/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** * 2* Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *mfs error* *14.39/30* ** ** Tylan 8-SiGe *down* *broken tube-bad pump-out for repair* *3.4/30* ** ** Tylan 9-Poly *up* ** *15.78/30* ** ** Tylan 10-Nitride *up* ** *14.22/30* ** ** Tylan 11-LTO *down* *pull and clean* *0./30* ** * 1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *no tlc* ** ** * 3* Thermco 2 *yellow* *no tlc* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *yellow* *no B2H6-reg ordered* ** * * ** Thermco Poly2 *yellow* *no B2H6-reg ordered* ** ** ** Thermco Nitride1 *yellow* *leak waiting for o-rings* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up,scrubber prob on Chamber 2* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Apr 4 06:43:13 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 04 Apr 2012 06:43:13 -0700 Subject: Diffusion Morning Report 04/04/12 Message-ID: <4F7C4FF1.20907@stanford.edu> Good Morning All, Looking OK this morning. New Issues: FGA2 end cap stuck, No other new issues. Leftovers: Thermco Nitride leak, B2H6 regulator change, LTO pull and clean. TEOS MFS alarms, SiGe pump out for repair, Thermco TLC issues, POCl3 sensor issues, Epi 2 startup. No other issues at this time. Date: 4/4/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** * 4* Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *mfs error* *14.39/30* ** ** Tylan 8-SiGe *down* *broken tube-bad pump-out for repair* *3.4/30* ** ** Tylan 9-Poly *up* ** *15.78/30* ** ** Tylan 10-Nitride *up* ** *14.22/30* ** ** Tylan 11-LTO *down* *pull and clean in progress* *0./30* ** * 1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *no tlc* ** ** ** Thermco 2 *yellow* *no tlc* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *yellow* *reg is here installing* ** * * * 2* Thermco Poly2 *yellow* *reg is here installing* ** ** ** Thermco Nitride1 *yellow* *leak* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up,scrubber issues resolved* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *yellow* *end cap stuck* ** ** * 3* SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Apr 5 07:03:39 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 05 Apr 2012 07:03:39 -0700 Subject: Diffusion Morning Report 04/05/12 Message-ID: <4F7DA63B.50204@stanford.edu> Good Morning All, Looking Ok this morning. New issues: Tylan 1 switched to Ar for user, LTO back up after pull and clean. Working on getting gases back up for first Epi chamber. Leftovers: Thermco TLC issues, Thermco Nitride leak, SiGe pump is out for repair, B2H6 regulator install in progress, TEOS MFS issues. No other major problems. Date: 4/4/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *in Ar for user* ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *mfs error* *14.39/30* ** * 3* Tylan 8-SiGe *down* *broken tube-bad pump-out for repair* *3.4/30* ** * 4* Tylan 9-Poly *up* ** *15.78/30* ** ** Tylan 10-Nitride *up* ** *14.22/30* ** ** Tylan 11-LTO *up* *p &C completed* *0./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *no tlc* ** ** ** Thermco 2 *yellow* *no tlc* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *yellow* *reg is here installing* ** * * * 1* Thermco Poly2 *yellow* *reg is here installing* ** ** ** Thermco Nitride1 *yellow* *leak* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up,scrubber issues resolved* ** ** * 2* TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Apr 6 08:10:12 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 06 Apr 2012 08:10:12 -0700 Subject: Diffusion Morning Report 04/06/12 Message-ID: <4F7F0754.2000403@stanford.edu> Good Morning All, Looking better this morning. No new issues overnight. Good news Epi chamber A had a coat and test this morning a user will likely run a process qual today. Leftovers:Thermco1 TLC is back,2,3,4 still in progress. Tylan 1 is back in N2. B2H6 reg is installed and in leak check. SiGe pump is still out for repair. POCl3 and BBr3 sensor issues. No other major issues at this time. Date: 4/6/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* *back in N2* ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** *3* Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *mfs error* *14.39/30* ** *1* Tylan 8-SiGe *down* *broken tube-bad pump-out for repair* *3.4/30* ** ** Tylan 9-Poly *up* ** *15.78/30* ** ** Tylan 10-Nitride *up* ** *14.22/30* ** ** Tylan 11-LTO *up* ** *0./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *yellow* *reg is here installing-B2H6* ** * * *2* Thermco Poly2 *yellow* *reg is here installing-B2H6* ** ** ** Thermco Nitride1 *yellow* *leak* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up,scrubber issues resolved* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Apr 9 06:46:12 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 09 Apr 2012 06:46:12 -0700 Subject: Diffusion Morning Report 04/09/12 Message-ID: <4F82E824.5050601@stanford.edu> Good Morning All, Looking OK this morning. New issues: Tylan Nitride failed leak check. Leftovers: POCl3 and BBr3 sensor issues, Epi chamber needs test, No TLC on Thermcos 2,3,4,SiGe pump out for repair, Thermco Nitride leak. Date: 4/9/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** *2* Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *mfs error* *14.39/30* ** ** Tylan 8-SiGe *down* *broken tube-bad pump-out for repair* *3.4/30* ** ** Tylan 9-Poly *up* ** *15.78/30* ** ** Tylan 10-Nitride *yellow* *failed leak check* *14.22/30* ** *1* Tylan 11-LTO *up* ** *0./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc* ** ** *4* Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *leak* ** ** *3* Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up,scrubber issues resolved* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Apr 10 06:44:01 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 10 Apr 2012 06:44:01 -0700 Subject: Diffusion Morning Report 04/10/12 Message-ID: <4F843921.7060807@stanford.edu> Good Morning All, Looking good this morning. Epi is up for undoped-will turn on dopants today. New problems: Thermco 2 loader issues. Leftovers: POCl3 and BBr3 sensor issues, TEOS MFS issues, TLC in Thermco 3 and 4,SiGe pump out for repair, Thermco Nitride leak.No other major issues at this time. Date: 4/10/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *mfs error* *14.39/30* ** *3* Tylan 8-SiGe *down* *broken tube-bad pump-out for repair* *3.4/30* ** ** Tylan 9-Poly *up* ** *15.78/30* ** ** Tylan 10-Nitride *up* ** *14.22/30* ** ** Tylan 11-LTO *up* ** *0./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *down* *loader issue* ** ** *2* Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *leak* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *up without dopants* ** ** *1* AMAT Epi Cham. B *down* *starting up,scrubber issues resolved* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Apr 11 06:30:46 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 11 Apr 2012 06:30:46 -0700 Subject: Diffusion Morning Report 04/11/12 Message-ID: <4F858786.1010307@stanford.edu> Good Morning All, Looking OK this morning. New issues: HCL had tripped off for EPI-Is reset now. Tylan burn box exhaust issue, LPs down-AGC coming to repair. Leftovers: Epi chamber B startup, POCL3 and BBr3 sensor issues,TLC issues on Thermco 3 and 4, Thermco Nitride leak, TEOS MFS issues, SiGe pump out for repair-back this week? Date: 4/11/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *mfs error* *14.39/30* ** *2* Tylan 8-SiGe *down* *broken tube-bad pump-out for repair* *3.4/30* ** ** Tylan 9-Poly *down* *burn box down* *15.78/30* ** *1* Tylan 10-Nitride *down* *burn box down* *14.22/30* ** ** Tylan 11-LTO *down* *burn box down* *0./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *down* *loader issue* ** ** *3* Thermco 3 *yellow* *testing TLC* ** ** *4* Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *leak* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *dopants on* ** ** ** AMAT Epi Cham. B *down* *dopants on* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Apr 12 06:18:15 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 12 Apr 2012 06:18:15 -0700 Subject: Diffusion Morning Report 04/12/12 Message-ID: <4F86D617.8060502@stanford.edu> Good Morning All, Looking OK this morning. New issues: Silane for Epi and ICP is empty -new cylinder is on order. HCl for Epi tripped off again. Leftovers: Thermco Nitride-leak, POCl3 and BBr3 sensor issue, SiGe pump out for repair, No TLC on Thermco 3 and 4, Thermco 2 loader issue, TEOS needs a test. No other major issues at this time. Date: 4/12/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *broken tube-bad pump-out for repair* *3.4/30* ** ** Tylan 9-Poly *up* ** *15.78/30* ** ** Tylan 10-Nitride *up* ** *14.22/30* ** ** Tylan 11-LTO *up* ** *0./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *down* *loader issue* ** ** *3* Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *leak* ** ** *2* Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *hcl and silane issues* ** ** *1* AMAT Epi Cham. B *down* *dopants on* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Apr 13 07:10:35 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 13 Apr 2012 07:10:35 -0700 Subject: Diffusion Morning Report Message-ID: <4F8833DB.20607@stanford.edu> Good Morning All, Ted is out today. Silane for Epi and ICP cylinder is .on leak check. HCl for Epi tripped off again. Leftovers: Thermco Nitride-leak, POCl3 and BBr3 sensor issue, SiGe pump out for repair, No TLC on Thermco 3 and 4, Thermco 2 loader issue, TEOS needs a test. No other major issues at this time. Date: 4/13/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *broken tube-bad pump-out for repair* *3.4/30* ** ** Tylan 9-Poly *up* ** *15.78/30* ** ** Tylan 10-Nitride *up* ** *14.22/30* ** ** Tylan 11-LTO *up* ** *0./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *down* *loader issue* ** ** *3* Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *leak* ** ** *2* Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *hcl and silane issues* ** ** *1* AMAT Epi Cham. B *down* *dopants on* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Apr 16 08:29:42 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 16 Apr 2012 08:29:42 -0700 Subject: Diffusion Morning Report 04/16/12 Message-ID: <4F8C3AE6.5050106@stanford.edu> Good Morning All, Looking OK this morning. New issues: HCl problem on Epi, MFS alarm on Tylan 2 Leftovers: POCl3 and BBr sensor issues, Thermco nitride leak, Thermco 2 loader issue,SiGe pump out for repair, No TLC on Thermco 3 and 4. No other major issues at this time Date: 4/16/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *MFS alarms* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *broken tube-bad pump-out for repair* *3.4/30* ** ** Tylan 9-Poly *up* ** *15.78/30* ** ** Tylan 10-Nitride *up* ** *14.22/30* ** ** Tylan 11-LTO *up* ** *0./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *down* *loader issue* ** ** *1* Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *leak* ** ** *3* Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *hclissues* ** ** *2* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Apr 17 07:27:36 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 17 Apr 2012 07:27:36 -0700 Subject: Diffusion Morning Report 04/17/12 Message-ID: <4F8D7DD8.6050107@stanford.edu> Good Morning All, Looking OK this morning. No new issues overnight. Changed HCL cylinder to try and address HCl drop issue. Leftovers: Thermco nitride leak, POCl3 and BBr3 sensor issues, Thermco 2 loader issues, SiGe pump out for repair, Thermco 3 ND 4 no TLC.. No other issues at this time. Date: 4/17/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *broken tube-bad pump-out for repair* *3.4/30* ** ** Tylan 9-Poly *up* ** *15.78/30* ** ** Tylan 10-Nitride *up* ** *14.22/30* ** ** Tylan 11-LTO *up* ** *0./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *down* *loader issue* ** ** *1* Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *leak* ** ** *3* Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *hclissues* ** ** *2* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Apr 18 06:35:10 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 18 Apr 2012 06:35:10 -0700 Subject: Diffusion Morning Report 04/18/12 Message-ID: <4F8EC30E.2020305@stanford.edu> Good Morning All, Looking OK this morning. I hope everyone got their taxes done. No new issues overnight. SiGe pump is back-we will install and re-assemble. HCl cylinder changed and HCl seems to be OK but heater contactor is tripping out for water flow. Leftovers POCl3 and BBr3 sensor issues, Thermco Nitride leak, No TLC on Thermco 3 and 4, Epi Issues, no other major problems at this time. Date: 4/18/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *pump is back-will re-assemble* *3.4/30* ** *3* Tylan 9-Poly *up* ** *15.78/30* ** ** Tylan 10-Nitride *up* ** *14.22/30* ** ** Tylan 11-LTO *up* ** *0./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *down* *loader issue* ** ** *2* Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *leak* ** ** *4* Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *hclissues-water flow* ** ** *1* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Apr 19 06:52:31 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 19 Apr 2012 06:52:31 -0700 Subject: Diffusion Morning Report 04/19/12 Message-ID: <4F90189F.8030008@stanford.edu> Good Morning All, Looking OK this morning. Epi is back down for water flow issues. tel has monitor problems. Leftovers: SiGepump is back reinstalling, Thermco Nitride leak, Thermco 2 loader issues, Thermco 3 and 4 no TLC, POCl3 and BBr3 sensor issues. No other major issues at this time. \ Date: 4/19/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *pump is back-will re-assemble* *3.4/30* ** * 3* Tylan 9-Poly *up* ** *15.78/30* ** ** Tylan 10-Nitride *up* ** *14.22/30* ** ** Tylan 11-LTO *up* ** *0./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *down* *loader issue* ** ** * 2* Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *leak* ** ** * 4* Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *water flow-SiH4issues* ** ** * 1* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test-Monitor Problem* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Apr 20 06:26:11 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 20 Apr 2012 06:26:11 -0700 Subject: Diffusion Morning Report 04/20/12 Message-ID: <4F9163F3.1070508@stanford.edu> Good Morning all, not looking great this morning. New issues: Tylan burn box-water leak, Epi lifter issues, TEOS flow issues, Tylan LPs down for burn box issues Leftovers: Sige assembly, Thermco 3 and 4 no TLC,POCl3 and BBr3 sensor issues,No other major issues at this time. Date: 4/20/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *flow issues* *14.39/30* ** *4* Tylan 8-SiGe *down* *pump is back-will re-assemble* *3.4/30* ** *3* Tylan 9-Poly *down* *burnbox* *15.78/30* ** ** Tylan 10-Nitride *down* *burnbox* *14.22/30* ** ** Tylan 11-LTO *down* *burnbox* *0./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *needs test* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *water flow-SiH4issues-lifter problems* ** ** *2* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *down* *water leak* ** ** *1* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Apr 23 06:49:52 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 23 Apr 2012 06:49:52 -0700 Subject: Diffusion Morning Report 04/23/12 Message-ID: <4F955E00.7080706@stanford.edu> Good Morning All, Looking OK this morning. New issues:Epi mixed dopant flow, Thermco 2 loader issues Leftovers:POCl3 and BBr3 sensor issues, Thermco 3 and 4 no TLC, TEOS -loader issue, SiGe re assembling, Tylan 2 poor uniformity,THERMCO nitride-needs test. No other issues at this time. Date: 4/23/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *bad uniformity* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *loader issues* *14.39/30* ** *2* Tylan 8-SiGe *down* *re-assembling* *3.4/30* ** *3* Tylan 9-Poly *up* ** *15.78/30* ** ** Tylan 10-Nitride *up* ** *14.22/30* ** ** Tylan 11-LTO *yellow* ** *0./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *loader issues* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *needs test* ** ** *4* Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *water flow-SiH4 issues -dopant flow* ** ** *1* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Apr 24 06:42:13 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 24 Apr 2012 06:42:13 -0700 Subject: Diffusion Morning Report 04/24/12 Message-ID: <4F96ADB5.708@stanford.edu> Good Morning All, Looking a bit poor this morning. New issues- Epi lift problem, Burn box for Tylans-exhaust problems. Leftovers: Epi Silane MFC-on order, POCl3 and BBr3 sensor issue, SiGe pump is back out, TEOS-waiting parts for loader,Thermco nitride needs a test, Tylan 2 poor uniformity Thermco 3 and 4 no TLC. Resolved-Thermco 2 boat cal Date: 4/24/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *bad uniformity* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *loader issues-waiting parts* *14.39/30* ** *3* Tylan 8-SiGe *down* *re-assembling-pump out again* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *15.78/30* ** *2* Tylan 10-Nitride *down* *burn box* *14.22/30* ** *2* Tylan 11-LTO *down* *burn box* *0./30* ** *2* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* *boat cal completed* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *needs test* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *water flow-SiH4 issues -dopant flow-lift errors* ** ** *1* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Apr 25 06:57:47 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 25 Apr 2012 06:57:47 -0700 Subject: Diffusion Morning Report 04/25/12 Message-ID: <4F9802DB.9060608@stanford.edu> Good Morning All, Looking Ok this morning. No new issues overnight. Lots of leftovers: burn box for LPs is still down waiting for vendor responses, Epi has Silane and mixed dopant issues, POCl3 and BBr sensor issues, SiGe pump out again, Tylan 2 poor uniformity.Thermco 3 and 4 no TLC. No other major issues at this time. TEOS boat loader issues resolved-replaced boat driver board. Date: 4/25/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *bad uniformity* ** ** *3* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *burn box* *14.39/30* ** ** Tylan 8-SiGe *down* *re-assembling-pump out again* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *15.78/30* ** ** Tylan 10-Nitride *down* *burn box* *14.22/30* ** ** Tylan 11-LTO *down* *burn box* *0./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *needs test* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *water flow-SiH4 issues -dopant flow-lift errors* ** ** *1* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *down* *high pressure* ** ** *2* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Apr 26 06:47:20 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 26 Apr 2012 06:47:20 -0700 Subject: Diffusion Morning Report 04/26/12 Message-ID: <4F9951E8.8020605@stanford.edu> Good Morning All, Looking better this morning. New items: Tylan 1 reported low growth rate. Leftovers: POCl3 and BBr3 sensor issues, Epi Silane MFC, Tylan Burn box, Thermco 3 and 4 TLC issues, Tylan 2 poor uniformity Resolved: Dopant and lift issues on Epi resolved, Working on Burn box solution. Date: 4/26/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *low growth rate* ** ** *3* Tylan 2 *yellow* *bad uniformity* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *burn box* *14.39/30* ** ** Tylan 8-SiGe *down* *re-assembling-pump out again* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *15.78/30* ** *1* Tylan 10-Nitride *down* *burn box* *14.22/30* ** *1* Tylan 11-LTO *down* *burn box* *0./30* ** *1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *needs test* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *SiH4 issues* ** ** *2* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *down* *high pressure* ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Apr 27 06:32:57 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 27 Apr 2012 06:32:57 -0700 Subject: Diffusion morning Report 04/27/12 Message-ID: <4F9AA009.1050104@stanford.edu> Good Morning All, Looking OK this morning. No new issues overnight. Leftovers: Epi Silane, Tylan burnbox,POCl3 and BBr3 Sensor issues, Thermco 3 and 4 No TLC, Tylan LPs down for burnbox, Tylan 1 low dep rate, no other major issues at this time. Date: 4/27/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *low growth rate* ** ** *3* Tylan 2 *yellow* *bad uniformity* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *burn box* *14.39/30* ** ** Tylan 8-SiGe *down* *re-assembling-pump out again* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *15.78/30* ** *1* Tylan 10-Nitride *down* *burn box* *14.22/30* ** *1* Tylan 11-LTO *down* *burn box* *0./30* ** *1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *needs test* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *SiH4 issues* ** ** *2* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *down* *high pressure-working on interlocks* ** ** *1* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Apr 30 06:39:34 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 30 Apr 2012 06:39:34 -0700 Subject: Diffusion Morning Report 04/30/12 Message-ID: <4F9E9616.6080700@stanford.edu> Good Morning All, Looking OK this morning. New issues-HCL cylinder for Epi is being Changed, Computer for Thermco bank 1 is locked up Leftovers: Burnbox interlock for Tylan LPs, No TLC on THERMCO 3 and 4, Epi Silane, POCl3 and BBr3 sensor issues, Tylan1 loader issue, Tylan 2 growth rate. No other major issues at this time Date: 4/30/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *low growth rate* ** ** *3* Tylan 2 *yellow* *bad uniformity* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *burn box* *14.39/30* ** ** Tylan 8-SiGe *down* *re-assembling* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *15.78/30* ** ** Tylan 10-Nitride *down* *burn box* *14.22/30* ** ** Tylan 11-LTO *down* *burn box* *0./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *down* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *needs test* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *SiH4 issues-changing HCl* ** ** *1* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *down* *high pressure-working on interlocks* ** ** *2* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: