Diffusion Morning Report

Ray Seymour rseymour at stanford.edu
Mon Apr 2 07:06:06 PDT 2012


Good Morning All,
Ted is out today.  Looking OK this morning- thermco Poly1 has boat 
issues. TEOS2 has MFS alarms. Tylan BPSG pull and clean tomorrow.
  Leftovers: Reg for B2 H6 ordered, Thermco 1and 2 TLC issues, Thermco 
Nitride waiting for orings, POCl3 still running only when staff present,
SIGe pump out for repair,Epi second chamber in progress. No other major 
issues at this time.

					
	Date: 	4/2/12 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*up*
	*
* 	** 	** 	*
*
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*yellow* 	*tgo sensor issue-ran BBr3 run-observed* 	** 
** 	**
Tylan 6-POCl3 	*yellow* 	*tgo sensor issue tube reinstalled-ran POCl3 
run* 	** 	** 	**
Tylan 7-TEOS2 	*Down*
	*MFS alarm
* 	*14.39/30* 	** 	*             1
*
Tylan 8-SiGe 	*down* 	*broken tube-bad pump-out for repair* 	*0/30* 	** 	**
Tylan 9-Poly 	*up* 	** 	*11.9/30* 	** 	**
Tylan 10-Nitride 	*up* 	** 	*0/30* 	** 	**
Tylan 11-LTO 	*yellow* 	*thickness* 	*22./30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*yellow* 	*no tlc* 	** 	** 	**
Thermco 2 	*yellow* 	*no tlc* 	** 	** 	**
Thermco 3 	*yellow* 	*testing TLC* 	** 	** 	**
Thermco4 	*up* 	** 	** 	** 	*
*
Thermco Poly1 	*yellow* 	*no B2H6-reg ordered* 	** 	*
* 	*             2
*
Thermco Poly2 	*yellow* 	*no B2H6-reg ordered* 	** 	** 	*             3
*
Thermco Nitride1 	*yellow* 	*leak waiting for o-rings* 	** 	** 	*
*
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi 	*down* 	*starting up,scrubber prob on Chamber 2* 	** 	** 	**
TEL Spa 	*yellow* 	*needs test* 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
SEM 4160 	*up* 	** 	** 	** 	**
ZYGO 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	*on* 	*crossover ok* 	*changeover working well* 	**

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