Diffusion Morning Report 04/06/12

Ted Berg tberg at stanford.edu
Fri Apr 6 08:10:12 PDT 2012


Good Morning All,
     Looking better this morning. No new issues overnight. Good news Epi 
chamber A had a coat and test this morning a user will likely run a 
process qual today.
     Leftovers:Thermco1 TLC is back,2,3,4 still in progress. Tylan 1 is 
back in N2. B2H6 reg is installed and in leak check. SiGe pump is still 
out for repair. POCl3 and BBr3 sensor issues. No other major issues at 
this time.


					
	Date: 	4/6/12 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	*back in N2* 	** 	** 	**
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*yellow* 	*tgo sensor issue-ran BBr3 run-observed* 	** 
** 	*3*
Tylan 6-POCl3 	*yellow* 	*tgo sensor issue tube reinstalled-ran POCl3 
run* 	** 	** 	**
Tylan 7-TEOS2 	*down* 	*mfs error* 	*14.39/30* 	** 	*1*
Tylan 8-SiGe 	*down* 	*broken tube-bad pump-out for repair* 
*3.4/30* 	** 	**
Tylan 9-Poly 	*up* 	** 	*15.78/30* 	** 	**
Tylan 10-Nitride 	*up* 	** 	*14.22/30* 	** 	**
Tylan 11-LTO 	*up* 	** 	*0./30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*yellow* 	*no tlc* 	** 	** 	**
Thermco 3 	*yellow* 	*testing TLC* 	** 	** 	**
Thermco4 	*up* 	** 	** 	** 	**
Thermco Poly1 	*yellow* 	*reg is here installing-B2H6* 	** 	*
* 	*2*
Thermco Poly2 	*yellow* 	*reg is here installing-B2H6* 	** 	** 	**
Thermco Nitride1 	*yellow* 	*leak* 	** 	** 	**
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi 	*down* 	*starting up,scrubber issues resolved* 	** 	** 	**
TEL Spa 	*yellow* 	*needs test* 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
SEM 4160 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	*on* 	*crossover ok* 	*changeover working well* 	** 	**


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