Diffusion Morning Report 04/18/12

Ted Berg tberg at stanford.edu
Wed Apr 18 06:35:10 PDT 2012


Good Morning All,
     Looking OK this morning. I hope everyone got their taxes done. No 
new issues overnight. SiGe pump is back-we will install and re-assemble. 
HCl cylinder changed and HCl seems to be OK but heater contactor is 
tripping out for water flow.
     Leftovers POCl3 and BBr3 sensor issues, Thermco Nitride leak, No 
TLC on Thermco 3 and 4, Epi Issues, no other major problems at this time.

					
	Date: 	4/18/12 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*yellow* 	*tgo sensor issue-ran BBr3 run-observed* 	** 
** 	**
Tylan 6-POCl3 	*yellow* 	*tgo sensor issue tube reinstalled-ran POCl3 
run* 	** 	** 	**
Tylan 7-TEOS2 	*yellow* 	*needs test* 	*14.39/30* 	** 	**
Tylan 8-SiGe 	*down* 	*pump is back-will re-assemble* 	*3.4/30* 	** 	*3*
Tylan 9-Poly 	*up* 	** 	*15.78/30* 	** 	**
Tylan 10-Nitride 	*up* 	** 	*14.22/30* 	** 	**
Tylan 11-LTO 	*up* 	** 	*0./30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*down* 	*loader issue* 	** 	** 	*2*
Thermco 3 	*yellow* 	*testing TLC* 	** 	** 	**
Thermco4 	*yellow* 	*bad source controller-no TLC* 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	*
* 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*down* 	*leak* 	** 	** 	*4*
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi Cham. A 	*yellow* 	*hclissues-water flow* 	** 	** 	*1*
AMAT Epi Cham. B 	*down* 	** 	** 	** 	**
TEL Spa 	*yellow* 	*needs test* 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
SEM 4160 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	*on* 	*crossover ok* 	*changeover working well* 	** 	**


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