Diffusion Morning Report 04/25/12

Ted Berg tberg at stanford.edu
Wed Apr 25 06:57:47 PDT 2012


Good Morning All,
     Looking Ok this morning. No new issues overnight.
     Lots of leftovers: burn box for LPs is still down waiting for 
vendor responses, Epi has Silane and mixed dopant issues, POCl3 and BBr 
sensor issues, SiGe pump out again,
Tylan 2 poor uniformity.Thermco 3 and 4 no TLC. No other major issues at 
this time.
     TEOS boat loader issues resolved-replaced boat driver board.


					
	Date: 	4/25/12 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*yellow* 	*bad uniformity* 	** 	** 	*3*
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*yellow* 	*tgo sensor issue-ran BBr3 run-observed* 	** 
** 	**
Tylan 6-POCl3 	*yellow* 	*tgo sensor issue tube reinstalled-ran POCl3 
run* 	** 	** 	**
Tylan 7-TEOS2 	*down* 	*burn box* 	*14.39/30* 	** 	**
Tylan 8-SiGe 	*down* 	*re-assembling-pump out again* 	*3.4/30* 	** 	**
Tylan 9-Poly 	*down* 	*burn box* 	*15.78/30* 	** 	**
Tylan 10-Nitride 	*down* 	*burn box* 	*14.22/30* 	** 	**
Tylan 11-LTO 	*down* 	*burn box* 	*0./30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*yellow* 	*testing TLC* 	** 	** 	**
Thermco4 	*yellow* 	*bad source controller-no TLC* 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	*
* 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*yellow* 	*needs test* 	** 	** 	**
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi Cham. A 	*yellow* 	*water flow-SiH4 issues -dopant flow-lift 
errors* 	** 	** 	*1*
AMAT Epi Cham. B 	*down* 	** 	** 	** 	**
TEL Spa 	*yellow* 	*needs test* 	** 	** 	**
Burn Box 	*down* 	*high pressure* 	** 	** 	*2*
SEM 4160 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	*on* 	*crossover ok* 	*changeover working well* 	** 	**


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