Diffusion Morning Report 04/30/12

Ted Berg tberg at stanford.edu
Mon Apr 30 06:39:34 PDT 2012


Good Morning All,
     Looking OK this morning.  New issues-HCL cylinder for Epi is being 
Changed, Computer for Thermco bank 1 is locked up
     Leftovers: Burnbox interlock for Tylan LPs, No TLC on THERMCO 3 and 
4, Epi Silane, POCl3 and BBr3 sensor issues, Tylan1 loader issue, Tylan 
2 growth rate. No other major issues at this time


					
	Date: 	4/30/12 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*yellow* 	*low growth rate* 	** 	** 	*3*
Tylan 2 	*yellow* 	*bad uniformity* 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*yellow* 	*tgo sensor issue-ran BBr3 run-observed* 	** 
** 	**
Tylan 6-POCl3 	*yellow* 	*tgo sensor issue tube reinstalled-ran POCl3 
run* 	** 	** 	**
Tylan 7-TEOS2 	*down* 	*burn box* 	*14.39/30* 	** 	**
Tylan 8-SiGe 	*down* 	*re-assembling* 	*3.4/30* 	** 	**
Tylan 9-Poly 	*down* 	*burn box* 	*15.78/30* 	** 	**
Tylan 10-Nitride 	*down* 	*burn box* 	*14.22/30* 	** 	**
Tylan 11-LTO 	*down* 	*burn box* 	*0./30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*down* 	*testing TLC* 	** 	** 	**
Thermco4 	*yellow* 	*bad source controller-no TLC* 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	*
* 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*yellow* 	*needs test* 	** 	** 	**
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi Cham. A 	*yellow* 	*SiH4 issues-changing HCl* 	** 	** 	*1*
AMAT Epi Cham. B 	*down* 	** 	** 	** 	**
TEL Spa 	*yellow* 	*needs test* 	** 	** 	**
Burn Box 	*down* 	*high pressure-working on interlocks* 	** 	** 	*2*
SEM 4160 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	*on* 	*crossover ok* 	*changeover working well* 	** 	**


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