From tberg at stanford.edu Wed Aug 1 06:21:42 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 01 Aug 2012 06:21:42 -0700 Subject: Diffusion Morning Report 08/01/12 Message-ID: <50192D66.6030601@stanford.edu> Good Morning All, *1. New Issues:* None overnight *2. Leftovers: *No TLC on Thermco 3 and 4, Thermco 1 low wet ox rate, Tylan Poly rewriting recipes,**Alarms for silane, germane, Tylan Lps down after alarms, Pull and clean on Tylan LTO *3. Resolved*: Tube change and coat on Tylan LTO, Sem 4160 valve didn't open Date: 8/1/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *sih4 alarm* *28.5/30* ** *2* Tylan 11-LTO *yellow* *needs test after pull and clean* *0/30* ** *1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Thu Aug 2 06:26:49 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Thu, 02 Aug 2012 06:26:49 -0700 Subject: Diffusion Morning Report Message-ID: <501A8019.2020307@stanford.edu> Good Morning All, Ted is out today. *1. New Issues:* Wafer in system, unable to remove. *2. Leftovers: *No TLC on Thermco 3 and 4, Thermco 1 low wet ox rate, Tylan Poly rewriting recipes,**Alarms for silane, germane, Tylan Lps down after alarms, *3. Resolved*: Date: 8/2/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *sih4 alarm* *28.5/30* ** *1* Tylan 11-LTO *yellow* *tool being used need thickness *info *0/30* ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Aug 3 06:27:54 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 03 Aug 2012 06:27:54 -0700 Subject: Diffusion Morning Report Message-ID: <501BD1DA.8010004@stanford.edu> Good Morning All, Ted is out today. *1. New Issues:* MFS alarm on Tylan 2, TRANSLC flow on Thermco 2 *2. Leftovers: *No TLC on Thermco 3 and 4, Thermco 1 low wet ox rate, Tylan Poly rewriting recipes,**Alarms for silane, germane, Tylan Lps down after alarms, *3. Resolved*: EPI2 missing wafer Date: 8/3/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* * MFS alarm * ** ** *1 * Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *sih4 alarm* *28.5/30* ** Tylan 11-LTO *yellow* *tool being used need thickness *info *0/30* ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** ** Thermco 2 *yellow* * no TLC * ** ** *2 * Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Aug 6 06:34:58 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 06 Aug 2012 06:34:58 -0700 Subject: Diffusion Morning Report 08/06/12 Message-ID: <501FC802.6040204@stanford.edu> Good Morning All, *1. New Issues:* None over the weekend *2. Leftovers: *No TLC on Thermco 3 and 4, Thermco 1 low wet ox rate,No TLC flow on Thermco 2 Tylan Poly rewriting recipes,** TylanNitride down after alarms, *3. Resolved*: Date: 8/1/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *sih4 alarm* *28.5/30* ** ** Tylan 11-LTO *yellow* *up* *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** *2* Thermco 2 *yellow* *no TLC* ** ** *1* Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Aug 7 06:11:09 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 07 Aug 2012 06:11:09 -0700 Subject: Diffusion Morning Report 08/07/12 Message-ID: <502113ED.1040702@stanford.edu> Good Morning All, *1. New Issues:* None over night *2. Leftovers: *No TLC on Thermco 3 and 4, Thermco 1 low wet ox rate,No TLC flow on Thermco 2 Tylan Poly rewriting recipes,** TylanNitride down after alarms, *3. Resolved*: Date: 8/7/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *sih4 alarm* *28.5/30* ** ** Tylan 11-LTO *yellow* *up* *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** *2* Thermco 2 *yellow* *no TLC* ** ** *1* Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Aug 8 06:15:17 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 08 Aug 2012 06:15:17 -0700 Subject: Diffusion Morning Report 08/09/12 Message-ID: <50226665.8020905@stanford.edu> Good Morning All, *1. New Issues:* None over night *2. Leftovers: *No TLC on Thermco 3 and 4, Thermco 1 low wet ox rate,No TLC flow on Thermco 2 Tylan Poly rewriting recipes,** TylanNitride down after alarms, *3. Resolved*: Date: 8/8/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *sih4 alarm* *28.5/30* ** ** Tylan 11-LTO *yellow* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** *2* Thermco 2 *yellow* *no TLC* ** ** *1* Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Aug 9 06:15:29 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 09 Aug 2012 06:15:29 -0700 Subject: Diffusion Morning Report 08/09/12 Message-ID: <5023B7F1.7050403@stanford.edu> Good Morning All, *1. New Issues:* None over night *2. Leftovers: *No TLC on Thermco 3 and 4, Thermco 1 low wet ox rate,No TLC flow on Thermco 2 Tylan Poly rewriting recipes,** TylanNitride down after alarms, *3. Resolved*: Date: 8/9/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *sih4 alarm* *28.5/30* ** ** Tylan 11-LTO *yellow* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** *2* Thermco 2 *yellow* *no TLC* ** ** *1* Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Aug 10 06:32:17 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 10 Aug 2012 06:32:17 -0700 Subject: Diffusion Morning Report 08/10/12 Message-ID: <50250D61.4030707@stanford.edu> Good Morning All, *1. New Issues:* All tools associated with CL96 monitor are down-Calcon working on the system *2. Leftovers: *No TLC on Thermco 3 and 4, Thermco 1 low wet ox rate,No TLC flow on Thermco 2 Tylan Poly rewriting recipes,** TylanNitride down after alarms, *3. Resolved*: Date: 8/10/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *down* *cl96* ** ** ** Tylan 6-POCl3 *down* *cl96* ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *sih4 alarm* *28.5/30* ** ** Tylan 11-LTO *down* *cl96* *0/30* ** *1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** *2* Thermco 2 *yellow* *no TLC* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *down* *cl96* ** * * ** Thermco Poly2 *down* *cl96* ** ** ** Thermco Nitride1 *down* *cl96* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *cl96* ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Aug 13 06:38:34 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 13 Aug 2012 06:38:34 -0700 Subject: Diffusion Morning Report 08/13/12 Message-ID: <5029035A.5040000@stanford.edu> Good Morning All, *1. New Issues:* All tools associated with CL96 monitor are down-Calcon working on the system*PARTS SHOULD ARRIVE TODAY* *2. Leftovers: *No TLC on Thermco 3 and 4, Thermco 1 low wet ox rate,No TLC flow on Thermco 2 Tylan Poly rewriting recipes,** TylanNitride down after alarms, *3. Resolved*: Date: 8/13/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *down* *cl96* ** ** ** Tylan 6-POCl3 *down* *cl96* ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *sih4 alarm* *28.5/30* ** ** Tylan 11-LTO *down* *cl96* *12/30/2012* ** *1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** *2* Thermco 2 *yellow* *no TLC* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *down* *cl96* ** * * ** Thermco Poly2 *down* *cl96* ** ** ** Thermco Nitride1 *down* *cl96* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *cl96* ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Aug 14 06:26:58 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 14 Aug 2012 06:26:58 -0700 Subject: Diffusion Morning Report 08/14/12 Message-ID: <502A5222.2000003@stanford.edu> Good Morning All, *1. New Issues:* Epi has a problem with a couple of recipes *2. Leftovers: *No TLC on Thermco 3 and 4, Thermco 1 low wet ox rate,No TLC flow on Thermco 2 Tylan Poly rewriting recipes,** TylanNitride down after alarms, *3. Resolved*: Cl96 is back on line and related tools are back up Date: 8/14/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *sih4 alarm* *28.5/30* ** ** Tylan 11-LTO *up* ** *12/30/2012* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** ** Thermco 2 *yellow* *no TLC* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *recipe issue?* ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Aug 15 06:11:47 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 15 Aug 2012 06:11:47 -0700 Subject: Diffusion Morning Report 08/15/12 Message-ID: <502BA013.7080701@stanford.edu> Good Morning All, *1. New Issues:*no new issues overnight *2. Leftovers: *No TLC on Thermco 3 and 4, Thermco 1 low wet ox rate,No TLC flow on Thermco 2 Tylan Poly rewriting recipes,** TylanNitride testes waiting further instructions after alarms, *3. Resolved*: epi silane gas panel issue, geH4 flow to thermco poly, epi etch recipes Date: 8/15/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm* *28.5/30* ** ** Tylan 11-LTO *up* ** *12/30/2012* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** ** Thermco 2 *yellow* *no TLC* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Aug 16 06:18:37 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 16 Aug 2012 06:18:37 -0700 Subject: Diffusion Morning Report 08/16/12 Message-ID: <502CF32D.1070004@stanford.edu> Good Morning All, *1. New Issues:*no new issues overnight *2. Leftovers: *No TLC on Thermco 3 and 4, Thermco 1 low wet ox rate,No TLC flow on Thermco 2 Tylan Poly rewriting recipes,** TylanNitride testes waiting further instructions after alarms, *3. Resolved*: Date: 8/16/12 THICKNESS-Change at Priority Tube Name/Number *Status* ** ** ** ** Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm* *28.5/30* ** ** Tylan 11-LTO *up* ** *12/30/2012* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** ** Thermco 2 *yellow* *no TLC* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Aug 17 07:26:22 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 17 Aug 2012 07:26:22 -0700 Subject: Diffusion Morning Report Message-ID: <502E548E.8090209@stanford.edu> Good Morning All, Ted is out today. *1. New Issues:* EPI2 heater contactor problems. *2. Leftovers: *No TLC on Thermco 3 and 4, Thermco 1 low wet ox rate,No TLC flow on Thermco 2 Tylan Poly rewriting recipes,** TylanNitride testes waiting further instructions after alarms, *3. Resolved*: Date: 8/17/12 THICKNESS-Change at Priority Tube Name/Number *Status* ** ** ** ** Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm* *28.5/30* ** ** Tylan 11-LTO *up* ** *12/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** ** Thermco 2 *yellow* *no TLC* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Aug 20 08:26:44 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 20 Aug 2012 08:26:44 -0700 Subject: Diffusion Morning Report 08/20/12 Message-ID: <50325734.9090800@stanford.edu> Good Morning All, *1. New issues:* Tylan Nitride pump possibly bad,Thermco Poly 1 has a leak *2. Ongoing issues:*No TLC on Thermco 3 and 4, Thermco 1 low wet ox rate,No TLC flow on Thermco 2 Tylan Poly rewriting recipes,** TylanNitride testes waiting further instructions after alarms, *Epi cooling water issues* *3. Resolved*: most furnaces back up Date: 8/20/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm, possible bad pump* *28.5/30* ** ** Tylan 11-LTO *up* ** *12/30/2012* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** ** Thermco 2 *yellow* *no TLC* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *down* *leak* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *heater contactor-cooling water* ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Aug 21 06:16:41 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 21 Aug 2012 06:16:41 -0700 Subject: Diffusion MorningReport 08/21/12 Message-ID: <50338A39.1010005@stanford.edu> Good Morning All, *1. New issues:* none overnight *2. Ongoing issues:*No TLC on Thermco 3 and 4, Thermco 1 low wet ox rate,No TLC flow on Thermco 2 Tylan Poly rewriting recipes,** TylanNitride tested waiting further instructions after alarms, Tylan Nitride pump possibly bad,Thermco Poly 1 tube pull *3. Resolved*:Epi cooling water issues resolved -replaced proteus switch Date: 8/21/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm, possible bad pump* *28.5/30* ** ** Tylan 11-LTO *up* ** *12/30/2012* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** ** Thermco 2 *yellow* *no TLC* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *down* *tube pull* ** * * * 1* Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Aug 22 06:31:32 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 22 Aug 2012 06:31:32 -0700 Subject: Diffusion Morning Report 08/22/12 Message-ID: <5034DF34.5060109@stanford.edu> Good Morning All, *1. New issues:*Tylan 2 H2/O2 leak *2. Ongoing issues:*No TLC on Thermco 3 and 4, Thermco 1 low wet ox rate,No TLC flow on Thermco 2 Tylan Poly rewriting recipes,** TylanNitride tested waiting further instructions after alarms, Tylan Nitride pump possibly bad,Thermco Poly 1 tube pull *3. Resolved*: several minor Tylan furnace issues Date: 8/22/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *H2/O2 ALARM* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm, possible bad pump* *28.5/30* ** ** Tylan 11-LTO *up* ** *12.8/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** ** Thermco 2 *yellow* *no TLC* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *down* *tube pull and leak check* ** * * * 1 * Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Aug 23 06:10:05 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 23 Aug 2012 06:10:05 -0700 Subject: Diffusion Morning Report 08/23/12 Message-ID: <50362BAD.8020100@stanford.edu> Good Morning All, *1. New issues:*none overnight *2. Ongoing issues:*No TLC on Thermco 3 and 4, Thermco 1 low wet ox rate,No TLC flow on Thermco 2 Tylan Poly rewriting recipes,** TylanNitride tested waiting further instructions after alarms, Tylan Nitride pump possibly bad, *3. Resolved*:Tylan H2/O2 leak, Thermco Poly 1 tube pull completed-needs test Date: 8/22/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm, possible bad pump* *28.5/30* ** ** Tylan 11-LTO *up* ** *12.8/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** ** Thermco 2 *yellow* *no TLC* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *yellow* *needs test* ** * * *1* Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Aug 24 06:06:07 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 24 Aug 2012 06:06:07 -0700 Subject: Diffusion Morning Report 08/24/12 Message-ID: <50377C3F.5060003@stanford.edu> Good Morning All, *1. New issues:*Epi rotation errors, Thermco Poly1 pressure control issues *2. Ongoing issues:*No TLC on Thermco 3 and 4, Thermco 1 low wet ox rate,No TLC flow on Thermco 2 Tylan Poly rewriting recipes,** TylanNitride tested waiting further instructions after alarms, Tylan Nitride pump possibly bad, *3. Resolved*: Date: 8/24/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm, possible bad pump* *28.5/30* ** ** Tylan 11-LTO *up* ** *12.8/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** ** Thermco 2 *yellow* *no TLC* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *down* *pressure control* ** * * *2* Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *rotation issue* ** ** *1* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Aug 27 06:31:10 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 27 Aug 2012 06:31:10 -0700 Subject: Diffusion Morning Report 08/27/12 Message-ID: <503B769E.3020709@stanford.edu> Good Morning All, *1. New issues:*Teos door close issues *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** TylanNitride tested waiting further instructions after alarms, Epi rotation issue *3. Resolved*: Thermco 1 low wet ox rate,No TLC flow on Thermco 2,Phosphine cylinder change for LPs Date: 8/27/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *Door close/pump issue * *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm* *28.5/30* ** ** Tylan 11-LTO *up* ** *12.8/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *yellow* *thin dep* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *rotation issue* ** ** *1* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Aug 28 06:13:21 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 28 Aug 2012 06:13:21 -0700 Subject: Diffusion Morning Report 08/28/12 Message-ID: <503CC3F1.8010502@stanford.edu> Good Morning All, *1. New issues:*none overnight *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** TylanNitride tested waiting further instructions after alarms, Epi rotation issue *3. Resolved*: Teos door close issues Date: 8/28/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm* *28.5/30* ** ** Tylan 11-LTO *up* ** *12.8/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *yellow* *thin dep* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *rotation issue* ** ** *1* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Aug 29 06:48:41 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 29 Aug 2012 06:48:41 -0700 Subject: Diffusion Morning Report 08/29/12 Message-ID: <503E1DB9.10205@stanford.edu> Good Morning All, *1. New issues:Epi possible gas flow issues* *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** TylanNitride tested waiting further instructions after alarms, *3. Resolved*: epi rotation Date: 8/29/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm* *28.5/30* ** ** Tylan 11-LTO *up* ** *28.1/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *yellow* *thin dep* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *possible gas flow issues* ** ** *1* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Aug 30 06:09:00 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 30 Aug 2012 06:09:00 -0700 Subject: Diffusion Morning Report 08/31/12 Message-ID: <503F65EC.60009@stanford.edu> Good Morning All, *1. New issues:none overnight* *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** TylanNitride tested waiting further instructions after alarms, *3. Resolved*: epi gas and temp problems-could not duplicate Date: 8/30/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm* *28.5/30* ** ** Tylan 11-LTO *up* ** *28.1/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *yellow* *thin dep* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Aug 31 06:09:52 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 31 Aug 2012 06:09:52 -0700 Subject: Diffusion Morning Report 08/31/12 Message-ID: <5040B7A0.6070705@stanford.edu> Good Morning All, *1. New issues:Tylan LTO tube change* *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** TylanNitride tested waiting further instructions after alarms, *3. Resolved*: Date: 8/31/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm* *28.5/30* ** ** Tylan 11-LTO *down* *pull and clean* *0/30* ** * 1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *yellow* *thin dep* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: