Diffusion Morning Report

Ray Seymour rseymour at stanford.edu
Fri Aug 3 06:27:54 PDT 2012


Good Morning All,
Ted is out today.
*1.  New Issues:* MFS alarm on Tylan 2, TRANSLC flow on Thermco 2
*2.  Leftovers: *No TLC on Thermco 3 and 4,  Thermco 1 low wet ox rate, 
Tylan Poly rewriting recipes,**Alarms for silane, germane, Tylan Lps  
down after alarms,
*3.  Resolved*:   EPI2 missing wafer
					
	Date: 	8/3/12 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*yellow*
	* MFS alarm
* 	** 	** 	*1
*
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*up* 	** 	*14.39/30* 	** 	**
Tylan 8-SiGe 	*down* 	*waiting for users* 	*3.4/30* 	** 	**
Tylan 9-Poly 	*down* 	*rewriting recipes* 	*23.7/30* 	** 	**
Tylan 10-Nitride 	*down* 	*sih4 alarm* 	*28.5/30* 	** 	
Tylan 11-LTO 	*yellow* 	*tool being used need thickness *info
	*0/30* 	** 	
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*yellow* 	*low oxidation rate* 	** 	** 	**
Thermco 2 	*yellow*
	* no TLC
* 	** 	** 	*2
*
Thermco 3 	*yellow* 	*testing TLC* 	** 	** 	**
Thermco4 	*yellow* 	*no TLC* 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	*
* 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi Cham. A 	*yellow* 	** 	** 	** 	**
AMAT Epi Cham. B 	*down* 	** 	** 	** 	**
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
SEM 4160 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	*on* 	*crossover ok* 	*changeover working well* 	** 	**

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