Diffusion Morning Report 08/27/12

Ted Berg tberg at stanford.edu
Mon Aug 27 06:31:10 PDT 2012


Good Morning All,
*1. New issues:*Teos door close issues
*2. Ongoing issues:*No TLC on Thermco 3 and 4,  Tylan Poly rewriting 
recipes,** TylanNitride  tested waiting further instructions after 
alarms,  Epi rotation issue
*3.  Resolved*:  Thermco 1 low wet ox rate,No TLC flow on Thermco 
2,Phosphine cylinder change for LPs

					
	Date: 	8/27/12 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*yellow*
	*Door close/pump issue
* 	*14.39/30* 	** 	**
Tylan 8-SiGe 	*down* 	*waiting for users* 	*3.4/30* 	** 	**
Tylan 9-Poly 	*down* 	*rewriting recipes* 	*23.7/30* 	** 	**
Tylan 10-Nitride 	*down* 	*tested after sih4 alarm* 	*28.5/30* 	** 	**
Tylan 11-LTO 	*up* 	** 	*12.8/30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*yellow* 	*testing TLC* 	** 	** 	**
Thermco4 	*yellow* 	*no TLC* 	** 	** 	**
Thermco Poly1 	*yellow* 	*thin dep* 	** 	*
* 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi Cham. A 	*down* 	*rotation issue* 	** 	** 	*1*
AMAT Epi Cham. B 	*down* 	** 	** 	** 	**
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
SEM 4160 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	*on* 	*crossover ok* 	*changeover working well* 	** 	**



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