Diffusion Morning Report 08/31/12

Ted Berg tberg at stanford.edu
Fri Aug 31 06:09:52 PDT 2012


Good Morning All,
*1. New issues:Tylan LTO tube change*
*2. Ongoing issues:*No TLC on Thermco 3 and 4,  Tylan Poly rewriting 
recipes,** TylanNitride  tested waiting further instructions after alarms,
*3.  Resolved*:

					
	Date: 	8/31/12 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*up* 	** 	*14.39/30* 	** 	**
Tylan 8-SiGe 	*down* 	*waiting for users* 	*3.4/30* 	** 	**
Tylan 9-Poly 	*down* 	*rewriting recipes* 	*23.7/30* 	** 	**
Tylan 10-Nitride 	*down* 	*tested after sih4 alarm* 	*28.5/30* 	** 	**
Tylan 11-LTO 	*down* 	*pull and clean* 	*0/30* 	** 	* 1*
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*yellow* 	*testing TLC* 	** 	** 	**
Thermco4 	*yellow* 	*no TLC* 	** 	** 	**
Thermco Poly1 	*yellow* 	*thin dep* 	** 	*
* 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi Cham. A 	*up* 	** 	** 	** 	**
AMAT Epi Cham. B 	*down* 	** 	** 	** 	**
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
SEM 4160 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	*on* 	*crossover ok* 	***changeover working 
well*** 	** 	**


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20120831/85318a90/attachment.html>


More information about the diffusion mailing list