From bogus@does.not.exist.com Sun Dec 23 08:48:37 2012 From: bogus@does.not.exist.com () Date: Sun, 23 Dec 2012 16:48:37 -0000 Subject: No subject Message-ID: QUIT Received: from got-milkweed.com (-1207979184 [-1209669600]) by 38.62.223.222.broad.cz.he.dynamic.163data.com.cn (Qmailv1) with ESMTP id A05856BBC1 for ; Fri, 05 Oct 2007 22:26:41 +0000 Date: Fri, 05 Oct 2007 22:26:41 +0000 From: "Minaret E. Airedale" X-Mailer: The Bat! (v2.00.3) Personal X-Priority: 3 Message-ID: <6208222349.20071005222641 at got-milkweed.com> To: Diffusion Subject: International Legal RX MIME-Version: 1.0 Content-Type: multipart/alternative; boundary="----------47CB131537F596C" X-GMX-Antivirus: 0 (no virus found) This is a multi-part message in MIME format. ------------47CB131537F596C Content-Type: text/plain Content-Transfer-Encoding: 7bit Welcome to International RX! - Best quality drugs - Special Internet prices - Fast and discreet worldwide shipping - Friendly customer support Men's Health Anti-Depressants Pain Relief General health Weight loss Anti-biotics Anti-herpes Women's health Anti-diabetic Blood Pressure/Cholesterol Anti-Allergic/Asthma Anti-Acidity View Full Products List http://compagis.cn dfglirsjiel VVtVUkBCW1xadUJcVRpGRVNdUlpDVh1RUUQ= ------------47CB131537F596C Content-Type: text/html Content-Transfer-Encoding: 7bit Welcome to International RX!
- Best quality drugs
- Special Internet prices
- Fast and discreet worldwide shipping
- Friendly customer support

Men's Health
Anti-Depressants
Pain Relief
General health
Weight loss
Anti-biotics
Anti-herpes
Women's health
Anti-diabetic
Blood Pressure/Cholesterol
Anti-Allergic/Asthma
Anti-Acidity

------------47CB131537F596C-- From tberg at stanford.edu Mon Dec 3 06:20:17 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 03 Dec 2012 06:20:17 -0800 Subject: Diffusion Morning Report 12/032/12 Message-ID: <50BCB521.6080506@stanford.edu> Good Morning All, *1**. New issues**: none over the weekend * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**O2 in Silane? **Installing Thermco nitride pump, Epi dome coated-PM today ** 3. Resolved:** * Date: 12/3/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *installing the new pump* ** ** * 2* Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4? SIMS is back-PM* ** ** * 1* AMAT Epi Cham. B *down* ***At the county since 10/30/12* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Dec 4 06:31:06 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 04 Dec 2012 06:31:06 -0800 Subject: Diffusion Morning Report 12/04/12 Message-ID: <50BE092A.3060906@stanford.edu> Good Morning All, *1**. New issues**: PM on Epi 2 * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**O2 in Silane? **Installing Thermco nitride pump, Epi dome coated-PM today ** 3. Resolved:** * Date: 12/4/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *installing the new pump* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4? SIMS is back-PM* ** ** ** AMAT Epi Cham. B *down* ***At the county since 10/30/12* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Dec 5 06:27:11 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 05 Dec 2012 06:27:11 -0800 Subject: Diffusion Morning Report 12/05/12 Message-ID: <50BF59BF.9000504@stanford.edu> Good Morning All, *1**. New issues**: Teos leak * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**O2 in Silane? **Installing Thermco nitride pump, Epi dome coated-**PM on Epi 2 3. Resolved: Tylan 1 loader issue * Date: 12/5/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *leak* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *testing after pump install* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4? SIMS is back-PM in progress* ** ** ** AMAT Epi Cham. B *down* ***At the county since 10/30/12* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Dec 6 06:18:59 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 06 Dec 2012 06:18:59 -0800 Subject: Diffusion Morning Report 12/06/12 Message-ID: <50C0A953.7020703@stanford.edu> Good Morning All, *1**. New issues**: None overnight * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**O2 in Silane? **Epi dome coated-**PM on Epi 2, Teos leak 3. Resolved: Thermco Nitride OK after pump change * Date: 12/6/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *leak-Ray is on it** * *14.39/30* ** *2* Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* *tests good* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4? SIMS is back-PM in progress* ** ** *1* AMAT Epi Cham. B *down* ***At the county since 10/30/12-almost ready* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Dec 7 08:21:53 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 07 Dec 2012 08:21:53 -0800 Subject: Diffusion Morning Report Message-ID: <50C217A1.4090907@stanford.edu> Good Morning All, Ted is out today. *1**. New issues**: PM on Epi 2 LTO N2 alarm * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**O2 in Silane? TEOS not pumping down, **Installing Thermco nitride pump, Epi dome coated-PM today ** 3. Resolved:** * Date: 12/7/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *installing the new pump* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4? SIMS is back-PM* ** ** ** AMAT Epi Cham. B *down* ***At the county since 10/30/12* ** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Dec 10 06:18:23 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 10 Dec 2012 06:18:23 -0800 Subject: Diffusion Morning Report 12/10/12 Message-ID: <50C5EF2F.1080100@stanford.edu> Good Morning All, *1**. New issues**: TEL wafer not returning * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**O2 in Silane? TEOS not pumping down**, Epi dome coated-PM still in progress, ?Epi chamber 2 permit at county ** 3. Resolved:** * Date: 12/10/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *leak* *14.39/30* ** *2* Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* *tests good* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4? SIMS is back-PM in progress* ** ** *1* AMAT Epi Cham. B *down* ***At the county since 10/30/12-almost ready* ** ** ** TEL Spa *yellow* *wafer not returning* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Dec 11 06:31:18 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 11 Dec 2012 06:31:18 -0800 Subject: Diffusion Morning Report 12/11/12 Message-ID: <50C743B6.1070404@stanford.edu> Good Morning All, *1**. New issues**: None overnight * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**O2 in Silane? ,**Epi dome coated-PM still in progress, ?Epi chamber 2 permit at county , ***TEL wafer not returning* ** 3. Resolved:**TEOS tube changed, leak checked and coated * Date: 12/11/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** *2* Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* *tests good* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4? SIMS is back-PM in progress* ** ** *1* AMAT Epi Cham. B *down* ***At the county since 10/30/12-almost ready* ** ** ** TEL Spa *yellow* *wafer not returning* ** ** *3* Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Dec 12 06:08:01 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 12 Dec 2012 06:08:01 -0800 Subject: Diffusion Morning Report 12/12/12 Message-ID: <50C88FC1.9010806@stanford.edu> Good Morning All, *1**. New issues**: None overnight * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**O2 in Silane? ,**Epi dome coated-PM still in progress, ?Epi chamber 2 permit at county , ** ** 3. Resolved:**Tel wafer retrieved, several more badger interlocks completed * Date: 12/12/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** *2* Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* *tests good* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4? SIMS is back-PM in progress* ** ** *1* AMAT Epi Cham. B *down* ***At the county since 10/30/12-almost ready* ** ** ** TEL Spa *up* *wafer retrieved** * ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Dec 13 06:14:12 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 13 Dec 2012 06:14:12 -0800 Subject: Diffusion Morning Report 12/13/12 Message-ID: <50C9E2B4.7020401@stanford.edu> Good Morning All, *1**. New issues**: TEL cooling water issues * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**O2 in Silane? ,**Epi dome coated-PM still in progress, ?Epi chamber 2 permit at county , ** ** 3. Resolved:**TEOS run for 5 hours no problem, All badger interlocks completed in diffusion * ** Date: 12/13/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *testing* *14.39/30* ** *2* Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4? SIMS is back-PM in progress* ** ** *1* AMAT Epi Cham. B *down* ***At the county since 10/30/12-almost ready* ** ** ** TEL Spa *down* *cooling water faults* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Dec 14 06:25:16 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 14 Dec 2012 06:25:16 -0800 Subject: Diffusion Morning Report 12/14/12 Message-ID: <50CB36CC.4030304@stanford.edu> Good Morning All, *1**. New issues**: none overnight * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**O2 in Silane? ,**Epi dome coated-PM still in progress, ?Epi chamber 2 permit at county waiting for DEH approval, * **TEL cooling water issues * ** 3. Resolved: * Date: 12/14/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *testing* *14.39/30* ** *2* Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4? SIMS is back-PM in progress* ** ** *1* AMAT Epi Cham. B *down* ***At the county since 10/30/12-almost ready* ** ** ** TEL Spa *down* *cooling water faults* ** ** *3* Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Dec 17 06:11:54 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 17 Dec 2012 06:11:54 -0800 Subject: Diffusion Morning Report 12/17/12 Message-ID: <50CF282A.3030800@stanford.edu> Good Morning All, *1**. New issues**: none over the weekend * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**O2 in Silane? ,**Epi dome coated-PM still in progress, ?Epi chamber 2 permit at county waiting for DEH approval, * *** 3. Resolved:* **TEL cooling water issues ** **** Date: 12/17/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* *several runs no problem* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4? SIMS is back-PM in progress* ** ** *1* AMAT Epi Cham. B *down* ***At the county since 10/30/12-almost ready* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Dec 18 06:03:28 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 18 Dec 2012 06:03:28 -0800 Subject: Diffusion Morning Report 12/18/12 Message-ID: <50D077B0.7050403@stanford.edu> Good Morning All, *1**. New issues**: Thermco Nitride-no gas flows * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**O2 in Silane? ,**Epi dome coated-PM still in progress, ?Epi chamber 2 permit at county waiting for DEH approval, * *** 3. Resolved:* Date: 12/18/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *no gas flows* ** ** *2* Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4? SIMS is back-PM in progress* ** ** *1* AMAT Epi Cham. B *down* ***At the county since 10/30/12-almost ready* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Wed Dec 19 06:11:27 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Wed, 19 Dec 2012 06:11:27 -0800 Subject: Diffusion Morning Report Message-ID: <50D1CB0F.2010105@stanford.edu> Good Morning All, Ted is out today. *1**. New issues**: None over night * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, ***O2 in Silane? ,**Epi dome coated-PM still in progress, ?Epi chamber 2 permit at county waiting for DEH approval, * *** 3. Resolved:* *Thermco gas flow issue.* Date: 12/19/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *no gas flows* ** ** *2* Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4? SIMS is back-PM in progress* ** ** *1* AMAT Epi Cham. B *down* ***At the county since 10/30/12-almost ready* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Dec 20 07:07:33 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 20 Dec 2012 07:07:33 -0800 Subject: Diffusion Morning Report 12/20/12 Message-ID: <50D329B5.30504@stanford.edu> Good Morning All, *1**. New issues**: lab shutdown * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane? ,**Epi dome coated-PM still in progress, ?Epi chamber 2 permit at county DEH approval completed, * *** 3. Resolved:* ** -------------- next part -------------- An HTML attachment was scrubbed... URL: