From tberg at stanford.edu Thu Feb 2 06:22:15 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 02 Feb 2012 06:22:15 -0800 Subject: Diffusion Morning Report 02/02/12 Message-ID: <4F2A9C17.5090204@stanford.edu> Good Morning All, Welcome back, let the fun continue. Several furnaces came up ok More are having issues. All of the Thermcos seem to have the same problem -no 24v, looking into it. No power feeding 4160 SEM. Epi is down for hanging of second gas panel. TEL has heater issues. Bulk gases are on and seem to be OK. Tylan nitride down for DCS to epi, also has a bad pump. Startup continues slowly. Date: 2/2/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *TLC clean needs test* ** ** ** Tylan 2 *yellow* *TLC clean needs test* ** ** ** Tylan 3 *down* *starting up* ** ** ** Tylan 4 *down* *starting up* ** ** ** Tylan 5-BBr3 *down* *starting up* ** ** ** Tylan 6-POCl3 *down* *starting up* ** ** ** Tylan 7-TEOS2 *down* *starting up* *12.75/30* ** ** Tylan 8-SiGe *down* *starting up* *3.76/30* ** ** Tylan 9-Poly *down* *starting up* *9.97/30* ** ** Tylan 10-Nitride *down* *starting up,, bad pump,DCS off* *6.23/30* ** ** Tylan 11-LTO *down* *starting up* *9.46/30* ** ** Tylan 12-FGA *down* *starting up* ** ** ** Thermco 1 *down* *starting up* ** ** ** Thermco 2 *down* *starting up* ** ** ** Thermco 3 *down* *starting up* ** ** ** Thermco4 *down* *starting up* ** ** ** Thermco Poly1 *down* *starting up* ** * * ** Thermco Poly2 *down* *starting up* ** ** ** Thermco Nitride1 *down* *starting up,,DCS off* ** ** ** Thermco bpsg *down* *starting up* ** ** ** AMAT Epi *down* *starting up, hanging second panel* ** ** ** TEL Spa *down* *starting up, heater issues* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *down* *starting up, power issues* ** ** ** ZYGO *down* *starting up* ** ** ** FGA2 *down* *starting up* ** ** ** SiH4 for furnaces *off* ** *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Feb 3 06:26:22 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 03 Feb 2012 06:26:22 -0800 Subject: Diffusion Morning Report 02/03/12 Message-ID: <4F2BEE8E.60108@stanford.edu> Good Morning All, Thing are starting to come up slowly. TLC cleans are done on Tylans 1-4, they will neeed testing once wet benches come up. Thermco have had boat cals and temp cals but are having gas issues-looking into it. TEL still has heater issues and is down for N2 today. Applied showed up yesterday afternoon and will be hanging the gas panel so we can move ahead on that. SEM 4160 no power to main unit- looking into it. No gases to Epi or diffusion tools yet. Date: 2/3/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *TLC clean needs test* ** ** ** Tylan 2 *yellow* *TLC clean needs test* ** ** ** Tylan 3 *yellow* *TLC clean needs test* ** ** ** Tylan 4 *yellow* *TLC clean needs test* ** ** ** Tylan 5-BBr3 *down* *starting up* ** ** ** Tylan 6-POCl3 *down* *starting up* ** ** ** Tylan 7-TEOS2 *down* *starting up* *12.75/30* ** ** Tylan 8-SiGe *down* *starting up* *3.76/30* ** ** Tylan 9-Poly *down* *starting up* *9.97/30* ** ** Tylan 10-Nitride *down* *starting up,, bad pump,DCS off* *6.23/30* ** ** Tylan 11-LTO *down* *starting up* *9.46/30* ** ** Tylan 12-FGA *down* *starting up* ** ** ** Thermco 1 *down* *starting up-gas flow issues* ** ** ** Thermco 2 *down* *starting up-gas flow issues* ** ** ** Thermco 3 *down* *starting up-gas flow issues* ** ** ** Thermco4 *down* *starting up-gas flow issues* ** ** ** Thermco Poly1 *down* *starting up* ** * * ** Thermco Poly2 *down* *starting up* ** ** ** Thermco Nitride1 *down* *starting up,,DCS off* ** ** ** Thermco bpsg *down* *starting up* ** ** ** AMAT Epi *down* *starting up, hanging second panel* ** ** ** TEL Spa *down* *starting up, heater issues, N2 today* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *down* *starting up, power issues* ** ** ** ZYGO *down* *starting up* ** ** ** FGA2 *down* *starting up* ** ** ** SiH4 for furnaces *off* ** *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Feb 6 07:31:42 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 06 Feb 2012 07:31:42 -0800 Subject: Diffusion Morning Report 02/06/12 Message-ID: <4F2FF25E.8090002@stanford.edu> Good Morning All, Looking ok this morning. Qualtech is here doing the gas line tie ins on Epi. Thermco furnaces have had TLC clean need tests. Tylan furnaces have had TLC clean need tests. LPs waiting for gases. TEL has stage heater issues. SEM 4160 no power to main unit. Date: 2/6/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *TLC clean needs test* ** ** ** Tylan 2 *yellow* *TLC clean needs test* ** ** ** Tylan 3 *yellow* *TLC clean needs test* ** ** ** Tylan 4 *yellow* *TLC clean needs test* ** ** ** Tylan 5-BBr3 *yellow* *needs test* ** ** ** Tylan 6-POCl3 *yellow* *needs test* ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *12.75/30* ** ** Tylan 8-SiGe *down* *starting up* *3.76/30* ** ** Tylan 9-Poly *down* *starting up* *9.97/30* ** ** Tylan 10-Nitride *down* *starting up,, bad pump,DCS off* *6.23/30* ** ** Tylan 11-LTO *down* *starting up* *9.46/30* ** ** Tylan 12-FGA *yellow* *starting up* ** ** ** Thermco 1 *yellow* *tlc completed needs test* ** ** ** Thermco 2 *yellow* *tlc completed needs test* ** ** ** Thermco 3 *yellow* *starting up* ** ** ** Thermco4 *yellow* *starting up* ** ** ** Thermco Poly1 *down* *starting up* ** * * ** Thermco Poly2 *down* *starting up* ** ** ** Thermco Nitride1 *down* *starting up,,DCS off* ** ** ** Thermco bpsg *down* *starting up* ** ** ** AMAT Epi *down* *starting up, hanging second panel* ** ** ** TEL Spa *down* *starting up, heater issues* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *down* *starting up, power issues* ** ** ** ZYGO *down* *starting up* ** ** ** FGA2 *down* *starting up* ** ** ** SiH4 for furnaces *off* ** *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Feb 7 06:44:34 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 07 Feb 2012 06:44:34 -0800 Subject: Diffusion Morning Report 02/07/12 Message-ID: <4F3138D2.8090508@stanford.edu> Good Morning All, Looking Ok this morning. All of the furnaces are functional but LPs have no gas yet. The exception is Tylan Nitride which has a bad pump . Most Oxides have been tested waiting results. TEL has a heater issue and gas cabinet door issue. SEM 4160 has a power problem. Epi gas lines being reworked and leak tested today. Not much response from Applied. Date: 2/7/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *Tested waiting results* ** ** ** Tylan 2 *yellow* *Tested waiting results* ** ** ** Tylan 3 *yellow* *Tested waiting results* ** ** ** Tylan 4 *yellow* *Tested waiting results* ** ** ** Tylan 5-BBr3 *yellow* *needs test* ** ** ** Tylan 6-POCl3 *yellow* *needs test* ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *12.75/30* ** ** Tylan 8-SiGe *down* *starting up* *3.76/30* ** ** Tylan 9-Poly *down* *starting up-no gas yet* *9.97/30* ** ** Tylan 10-Nitride *down* *starting up,, bad pump,DCS off* *6.23/30* ** ** Tylan 11-LTO *down* *starting up-no gas yet* *9.46/30* ** ** Tylan 12-FGA *yellow* *starting up* ** ** ** Thermco 1 *yellow* *Tested waiting results* ** ** ** Thermco 2 *yellow* *Tested waiting results* ** ** ** Thermco 3 *yellow* *testing* ** ** ** Thermco4 *yellow* *testing* ** ** ** Thermco Poly1 *down* *starting up-no gas yet* ** * * ** Thermco Poly2 *down* *starting up-no gas yet* ** ** ** Thermco Nitride1 *down* *starting up,,DCS off* ** ** ** Thermco bpsg *down* *starting up-no gas yet* ** ** ** AMAT Epi *down* *starting up, hanging second panel* ** ** ** TEL Spa *down* *starting up, heater issues* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *down* *starting up, power issues* ** ** ** ZYGO *down* *starting up* ** ** ** FGA2 *down* *starting up-no gas yet* ** ** ** SiH4 for furnaces *off* ** *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Feb 10 06:34:11 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 10 Feb 2012 06:34:11 -0800 Subject: Diffusion Morning Report 02/10/12 Message-ID: <4F352AE3.9080604@stanford.edu> Good Morning all, Thing are beginning to look up in startup area. The problem is with facilities going on and off we really cannot get a good feel of exactly where we are. There are a few issues with furnaces. SEM 4160 is up waiting checkout. Several gases are reconnected and in leak check. Epi gases are not connected yet Epi second panel is hung and FS is working on it. TEL is ready to turn back on after water play is completed. TGO training today. Stay tuned for updates. Date: 2/10/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *Tested waiting results* ** ** ** Tylan 2 *yellow* *Tested waiting results* ** ** ** Tylan 3 *yellow* *Tested waiting results* ** ** ** Tylan 4 *yellow* *Tested waiting results* ** ** ** Tylan 5-BBr3 *yellow* *needs test* ** ** ** Tylan 6-POCl3 *yellow* *needs test* ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *12.75/30* ** ** Tylan 8-SiGe *down* *starting up-leak* *3.76/30* ** ** Tylan 9-Poly *down* *starting up-no gas yet* *9.97/30* ** ** Tylan 10-Nitride *down* *starting up,,DCS off* *6.23/30* ** ** Tylan 11-LTO *down* *starting up-no gas yet* *9.46/30* ** ** Tylan 12-FGA *yellow* *starting up-needs test* ** ** ** Thermco 1 *yellow* *Tested waiting results* ** ** ** Thermco 2 *yellow* *Tested waiting results* ** ** ** Thermco 3 *yellow* *testing* ** ** ** Thermco4 *yellow* *testing* ** ** ** Thermco Poly1 *down* *starting up-no gas yet* ** * * ** Thermco Poly2 *down* *starting up-no gas yet* ** ** ** Thermco Nitride1 *down* *starting up,,DCS off* ** ** ** Thermco bpsg *down* *starting up-no gas yet* ** ** ** AMAT Epi *down* *starting up, hanging second panel* ** ** ** TEL Spa *down* *starting up, facilities* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *yellow* *started up needs checkout* ** ** ** ZYGO *down* *starting up* ** ** ** FGA2 *down* *starting up-needs test?* ** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Feb 13 08:30:51 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 13 Feb 2012 08:30:51 -0800 Subject: Diffusion Morning Report 02/13/12 Message-ID: <4F393ABB.5080206@stanford.edu> Good Morning all, Continuing startup. N2 is off today so cannot do too much.Hopefully all will be back up tomorrow. Epi second chamber moving along. Date: 2/13/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *Tested waiting results* ** ** ** Tylan 2 *yellow* *Tested waiting results* ** ** ** Tylan 3 *yellow* *Tested waiting results* ** ** ** Tylan 4 *yellow* *Tested waiting results* ** ** ** Tylan 5-BBr3 *yellow* *needs test* ** ** ** Tylan 6-POCl3 *yellow* *needs test* ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *12.75/30* ** ** Tylan 8-SiGe *down* *starting up-leak* *3.76/30* ** ** Tylan 9-Poly *down* *starting up-no gas yet* *9.97/30* ** ** Tylan 10-Nitride *down* *starting up,,DCS off* *6.23/30* ** ** Tylan 11-LTO *down* *starting up-no gas yet* *9.46/30* ** ** Tylan 12-FGA *yellow* *starting up-needs test* ** ** ** Thermco 1 *yellow* *Tested waiting results* ** ** ** Thermco 2 *yellow* *Tested waiting results* ** ** ** Thermco 3 *yellow* *testing* ** ** ** Thermco4 *yellow* *testing* ** ** ** Thermco Poly1 *down* *starting up-no gas yet* ** * * ** Thermco Poly2 *down* *starting up-no gas yet* ** ** ** Thermco Nitride1 *down* *starting up,,DCS off* ** ** ** Thermco bpsg *down* *starting up-no gas yet* ** ** ** AMAT Epi *down* *starting up, second panel hung and tied in* ** ** ** TEL Spa *down* *starting up, facilities* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *yellow* *started up needs checkout* ** ** ** ZYGO *down* *starting up* ** ** ** FGA2 *down* *starting up-needs test?* ** ** ** SiH4 for furnaces *off* *in leak check* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Feb 15 12:58:31 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 15 Feb 2012 12:58:31 -0800 Subject: Diffusion Daily Report 02/15/12 Message-ID: <4F3C1C77.1040109@stanford.edu> Good Day All, Looking Ok many tools are up and more on the way. Testing ongoing. Epi second chamber is progressing nicely. Date: 2/15/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 up up Tylan 2 *yellow* *Tested waiting results* ** ** ** Tylan 3 *yellow* *Tested waiting results* ** ** ** Tylan 4 *yellow* *Tested waiting results* ** ** ** Tylan 5-BBr3 *yellow* *needs test* ** ** ** Tylan 6-POCl3 *yellow* *needs test* ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *12.75/30* ** ** Tylan 8-SiGe *down* *starting up-leak* *3.76/30* ** ** Tylan 9-Poly *yellow* *needs test* *9.97/30* ** ** Tylan 10-Nitride *down* *starting up,,DCS off* *0/30* ** ** Tylan 11-LTO *yellow* *needs test* *9.46/30* ** ** Tylan 12-FGA *yellow* *starting up-needs test* ** ** ** Thermco 1 *up* *up* ** ** ** Thermco 2 *yellow* *Tested waiting results* ** ** ** Thermco 3 *yellow* *testing* ** ** ** Thermco4 *yellow* *testing* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *starting up,,DCS off* ** ** ** Thermco bpsg *yellow* *needs test* ** ** ** AMAT Epi *down* *starting up, second panel hung and tied in* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *yellow* *started up needs checkout* ** ** ** ZYGO *up* ** ** ** ** FGA2 *yellow* *starting up-needs test?* ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Feb 16 06:28:52 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 16 Feb 2012 06:28:52 -0800 Subject: Diffusion Morning Report 02/16/12 Message-ID: <4F3D12A4.9040101@stanford.edu> Good Morning All, Looking OK this morning. Things are coming back to life with a few kinks. Epi 2 progress is good. Several furnaces still have issues but we are working through them. TEL is up, SEM4160 needs checkout but is functional. Most Diffusion gases are on. Watch CORAL for progress. Date: 2/16/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* *up* ** ** ** Tylan 2 *yellow* *Tested waiting results* ** ** ** Tylan 3 *yellow* *Tested waiting results* ** ** ** Tylan 4 *yellow* *Tested waiting results* ** ** ** Tylan 5-BBr3 *yellow* *needs test* ** ** ** Tylan 6-POCl3 *yellow* *needs test* ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *12.75/30* ** ** Tylan 8-SiGe *down* *starting up-leak* *3.76/30* ** ** Tylan 9-Poly *yellow* *needs test* *9.97/30* ** ** Tylan 10-Nitride *down* *starting up,,DCS off* *0/30* ** ** Tylan 11-LTO *down* *broken injector* *9.46/30* ** ** Tylan 12-FGA *yellow* *starting up-needs test* ** ** ** Thermco 1 *up* *up* ** ** ** Thermco 2 *yellow* *Tested waiting results* ** ** ** Thermco 3 *yellow* *testing* ** ** ** Thermco4 *yellow* *testing* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *starting up,,DCS off* ** ** ** Thermco bpsg *yellow* *needs test* ** ** ** AMAT Epi *down* *starting up, second panel hung and tied in* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *yellow* *started up needs checkout* ** ** ** ZYGO *up* ** ** ** ** FGA2 *yellow* *starting up-needs test?* ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Feb 17 07:17:24 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 17 Feb 2012 07:17:24 -0800 Subject: Diffusion Morning Report Message-ID: <4F3E6F84.1070506@stanford.edu> Good Morning All, Ted is out today. Looking OK this morning. Things are coming back to life with a few kinks. Epi 2 progress is good. Several furnaces still have issues but we are working through them. TEL is up, SEM4160 needs checkout but is functional. Most Diffusion gases are on. Watch CORAL for progress. Date: 2/17/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* * * ** ** ** Tylan 4 *yellow* *Tycom remote panel not reading * ** ** ** Tylan 5-BBr3 *yellow* *needs test* ** ** ** Tylan 6-POCl3 *yellow* *needs test* ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *12.75/30* ** ** Tylan 8-SiGe *down* *Not pumping down * *3.76/30* ** ** Tylan 9-Poly *yellow* *needs test* *9.97/30* ** ** Tylan 10-Nitride *down* *starting up,,DCS off* *0/30* ** ** Tylan 11-LTO *down* *not venting * *9.46/30* ** ** Tylan 12-FGA *yellow* *starting up-needs test* ** ** ** Thermco 1 *up* *up* ** ** ** Thermco 2 *yellow* *Tested waiting results* ** ** ** Thermco 3 *yellow* *testing* ** ** ** Thermco4 *yellow* *testing* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *starting up,,DCS off* ** ** ** Thermco bpsg *yellow* *needs test* ** ** ** AMAT Epi *down* *starting up, second panel hung and tied in* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *yellow* *started up needs checkout* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* * * ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Feb 21 06:39:09 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 21 Feb 2012 06:39:09 -0800 Subject: Diffusion Morning Report 02/21/12 Message-ID: <4F43AC8D.4090003@stanford.edu> Good Morning All, Looking OK this morning. Still a few furnace issues that we are working through. Epi 2 chamber 2 moving ahead well. No other major problems at this time. Date: 2/21/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *12.75/30* ** ** Tylan 8-SiGe *down* *starting up-leak* *3.76/30* ** ** Tylan 9-Poly *down* *not pumping* *9.97/30* ** *1* Tylan 10-Nitride *down* *starting up,,DCS off* *0/30* ** ** Tylan 11-LTO *down* *won't vent* *9.46/30* ** *2* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* *up* ** ** ** Thermco 2 *down* *h2/o2 ratio* ** ** ** Thermco 3 *yellow* *testing* ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *starting up,,DCS off* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up, second panel hung and tied in* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Feb 22 06:30:30 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 22 Feb 2012 06:30:30 -0800 Subject: Diffusion Morning Report 02/22/12 Message-ID: <4F44FC06.3050403@stanford.edu> Good Morning All, Looking good this morning.Most of the furnaces are up. Exceptions Nitride no DCS because of Epi, Tylan LTO has a broken injector,SiGE has a leak, Thermco 2 has a Flow problem. Epi 2 second chamber has a bad pump. SEM 4160 no image capture. No other issues at this time. > > Date: 2/22/12 THICKNESS-Change at Priority > Tube Name/Number Status > Tylan 1 *up* ** ** ** ** > Tylan 2 *up* ** ** ** ** > Tylan 3 *up* ** ** ** ** > Tylan 4 *up* ** ** ** ** > Tylan 5-BBr3 *up* ** ** ** ** > Tylan 6-POCl3 *up* ** ** ** ** > Tylan 7-TEOS2 *up* ** *12.75/30* ** ** > Tylan 8-SiGe *down* *starting up-leak* *3.76/30* ** ** > Tylan 9-Poly *up* ** *9.97/30* ** ** > Tylan 10-Nitride *down* *starting up,,DCS off* *0/30* ** ** > Tylan 11-LTO *down* *broken injector* *9.46/30* ** *1* > Tylan 12-FGA *up* ** ** ** ** > Thermco 1 *up* *up* ** ** ** > Thermco 2 *down* *h2/o2 ratio* ** ** ** > Thermco 3 *yellow* *testing* ** ** ** > Thermco4 *up* ** ** ** ** > Thermco Poly1 *up* ** ** * > * ** > Thermco Poly2 *up* ** ** ** ** > Thermco Nitride1 *down* *starting up,,DCS off* ** ** ** > Thermco bpsg *up* ** ** ** ** > AMAT Epi *down* *starting up, second panel hung and tied in* ** > ** ** > TEL Spa *yellow* *needs test* ** ** ** > Burn Box *up* ** ** ** ** > SEM 4160 *yellow* *no image capture* ** ** ** > ZYGO *up* ** ** ** ** > FGA2 *up* ** ** ** ** > SiH4 for furnaces *on* *crossover ok* *changeover working well* > ** ** > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Feb 23 06:52:33 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 23 Feb 2012 06:52:33 -0800 Subject: Diffusion Morning Report 02/23/12 Message-ID: <4F4652B1.90102@stanford.edu> Good Morning All, Looking good this morning. Still a few furnaces with issues. No DCS to nitrides. SiGe leak. Thermco 2 H2 issues. Epi second chamber moving ahead. No other issues at this time. Date: 2/23/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.3/30* ** ** Tylan 8-SiGe *down* *starting up-leak* *3.76/30* ** *1* Tylan 9-Poly *up* ** *10.79/30* ** ** Tylan 10-Nitride *down* *starting up,,DCS off* *0/30* ** ** Tylan 11-LTO *up* ** *16.56/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* *up* ** ** ** Thermco 2 *down* *h2/o2 ratio* ** ** ** Thermco 3 *yellow* *testing* ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *starting up,,DCS off* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up, second panel hung and tied in* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Mon Feb 27 06:58:24 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Mon, 27 Feb 2012 06:58:24 -0800 Subject: Diffusion Morning Report Message-ID: <4F4B9A10.7050205@stanford.edu> Good Morning All, Ted is out today. Looking good this morning. No DCS to nitrides. Thermco 2 H2 issues. Epi second chamber moving ahead. No other issues at this time. Date: 2/27/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.3/30* ** ** Tylan 8-SiGe *down* *needs test * *3.76/30* ** * * Tylan 9-Poly *up* ** *10.79/30* ** ** Tylan 10-Nitride *down* *starting up,,DCS off* *0/30* ** ** Tylan 11-LTO *up* ** *16.56/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* *up* ** ** ** Thermco 2 *down* *h2/o2 ratio* ** ** ** Thermco 3 *yellow* *testing* ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *starting up,,DCS off* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up, second panel hung and tied in* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Feb 28 06:28:42 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 28 Feb 2012 06:28:42 -0800 Subject: Diffusion Morning Report 02/28/12 Message-ID: <4F4CE49A.1070203@stanford.edu> Good Morning All, Looking good this morning. All Tylan CVDs are up with slight thickness variations. Thermco 2 has H2 flow issues. Tylan oxides are up. Nitride are waiting for DCS. Epi second chamber is getting close. Tel has wafer transfer issues. No other problems at this time. Date: 2/28/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *12.75/30* ** ** Tylan 8-SiGe *yellow* *needs test* *3.76/30* ** ** Tylan 9-Poly *up* ** *9.97/30* ** ** Tylan 10-Nitride *down* *starting up,,DCS off* *0/30* ** ** Tylan 11-LTO *yellow* *thickness* *9.46/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* *up* ** ** ** Thermco 2 *down* *h2flow issue* ** ** ** Thermco 3 *yellow* *testing* ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *starting up,,DCS off* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up, second panel hung and tied in* ** ** ** TEL Spa *yellow* *needs test-wafer wont move* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Feb 29 07:20:57 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 29 Feb 2012 07:20:57 -0800 Subject: Diffusion Morning Report 02/29/12 Message-ID: <4F4E4259.8030504@stanford.edu> Good Morning All, Happy leap day. Looking good this morning. Not much change from yesterday. All LPs are up except Nitrides-waiting for DCS. Thermco 2 has H2 flow issue.TEL lift pins not moving-looking into it with factory. No other problems at this time. Date: 2/29/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *yellow* *needs test* *3.76/30* ** ** Tylan 9-Poly *up* ** *11.74/30* ** ** Tylan 10-Nitride *down* *starting up,,DCS off* *0/30* ** ** Tylan 11-LTO *yellow* *thickness* *17.74/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *down* *h2flow issue* ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *starting up,,DCS off* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up, second panel hung and tied in* ** ** ** TEL Spa *yellow* *needs test-lift pins not working* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... 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