Diffusion Morning Report 07/05/12

Ted Berg tberg at stanford.edu
Thu Jul 5 07:13:46 PDT 2012


Good Morning All,
*1.  New issues: *TEL LL not pumping-reset pump
*2.  leftovers:* No TLC on Thermco 3 and 4, TEOS particles,  Thermco 1 
low wet ox rate, Tylan Poly rewriting recipes
*3.  Resolved: *Germane for Epi changed, Thermco LTO tube and TCs 
changed ready for test

					
	Date: 	7/5/12 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*yellow* 	*need staff present to run-flask changed* 
** 	** 	**
Tylan 7-TEOS2 	*yellow* 	*particles* 	*14.39/30* 	** 	**
Tylan 8-SiGe 	*down* 	*waiting for users* 	*3.4/30* 	** 	**
Tylan 9-Poly 	*down* 	*rewriting recipes* 	*23.7/30* 	** 	**
Tylan 10-Nitride 	*up* 	** 	*17.1/30* 	** 	**
Tylan 11-LTO 	*up* 	** 	*9.7./30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*yellow* 	*low oxidation rate* 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*yellow* 	*testing TLC* 	** 	** 	**
Thermco4 	*yellow* 	*no TLC* 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	*
* 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	*yellow* 	*tcs are installed heating up-needs test* 
** 	** 	*1*
AMAT Epi Cham. A 	*yellow* 	*B2H6 is low* 	** 	** 	**
AMAT Epi Cham. B 	*down* 	** 	** 	** 	**
TEL Spa 	*yellow* 	*needs test-wont pump down LL* 	** 	** 	**
Burn Box 	*yellow* 	*testing and modifying cvd recipes* 	** 	** 	**
SEM 4160 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	*on* 	*crossover ok* 	*changeover working well* 	** 	**


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