Diffusion Morning Report

Ray Seymour rseymour at stanford.edu
Wed Jul 11 06:30:53 PDT 2012


Good Morning All,
*  1.  New issues:*
*2.  Leftovers:*  No TLC on Thermco 3 and 4, TEOS particles,  Thermco 1 
low wet ox rate, Tylan Poly rewriting recipes.
*3.  Resolved:*  Epi Scrubber Fault, Thermco LTO test good

					
	Date: 	7/11/12 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*yellow* 	*flask changed* 	** 	** 	**
Tylan 7-TEOS2 	*yellow* 	*particles* 	*14.39/30* 	** 	**
Tylan 8-SiGe 	*down* 	*waiting for users* 	*0/30* 	** 	**
Tylan 9-Poly 	*down* 	*rewriting recipes* 	*23.7/30* 	** 	**
Tylan 10-Nitride 	*up* 	** 	*25.4/30* 	** 	**
Tylan 11-LTO 	*up* 	** 	*28.5/30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*yellow* 	*low oxidation rate* 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*yellow* 	*testing TLC* 	** 	** 	**
Thermco4 	*yellow* 	*no TLC* 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	*
* 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	
	*
* 	** 	** 	
AMAT Epi Cham. A 	*down* 	*B2H6 is low* 	** 	** 	*1*
AMAT Epi Cham. B 	*down* 	** 	** 	** 	**
TEL Spa 	*up*
	*needs test* 	** 	** 	**
Burn Box 	*yellow* 	*testing and modifying cvd recipes* 	** 	** 	**
SEM 4160 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	*on* 	*crossover ok* 	*changeover working well* 	** 	**

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20120711/10841523/attachment.html>


More information about the diffusion mailing list