D iffusion Morning Report 07/13/12

Ted Berg tberg at stanford.edu
Fri Jul 13 08:00:02 PDT 2012


Good Morning All,
*1.  New Issues:* Thermco BPSG Pump is dead, HCL  for Epi switched to 
other cylinder
*2.  Leftovers:*No TLC on Thermco 3 and 4, TEOS particles,  Thermco 1 
low wet ox rate, Tylan Poly rewriting recipes
*3.  Resolved*

> 					
> 	Date: 	7/13/12 	THICKNESS-Change at 		Priority
> Tube Name/Number 	Status 				
> Tylan 1 	*up* 	** 	** 	** 	**
> Tylan 2 	*up* 	** 	** 	** 	**
> Tylan 3 	*up* 	** 	** 	** 	**
> Tylan 4 	*up* 	** 	** 	** 	**
> Tylan 5-BBr3 	*up* 	** 	** 	** 	**
> Tylan 6-POCl3 	*yellow* 	*needs test* 	** 	** 	**
> Tylan 7-TEOS2 	*up* 	** 	*14.39/30* 	** 	**
> Tylan 8-SiGe 	*down* 	*waiting for users* 	*3.4/30* 	** 	**
> Tylan 9-Poly 	*down* 	*rewriting recipes* 	*23.7/30* 	** 	**
> Tylan 10-Nitride 	*up* 	** 	*28.5/30* 	** 	**
> Tylan 11-LTO 	*up* 	** 	*25.4/30* 	** 	**
> Tylan 12-FGA 	*up* 	** 	** 	** 	**
> Thermco 1 	*yellow* 	*low oxidation rate* 	** 	** 	*1*
> Thermco 2 	*up* 	** 	** 	** 	**
> Thermco 3 	*yellow* 	*testing TLC* 	** 	** 	**
> Thermco4 	*yellow* 	*no TLC* 	** 	** 	**
> Thermco Poly1 	*up* 	** 	** 	*
> * 	**
> Thermco Poly2 	*up* 	** 	** 	** 	**
> Thermco Nitride1 	*up* 	** 	** 	** 	**
> Thermco bpsg 	*down* 	*dead pump* 	** 	** 	*2*
> AMAT Epi Cham. A 	*yellow* 	*B2H6 is low-Cylinder has shipped* 	** 
> ** 	**
> AMAT Epi Cham. B 	*down* 	** 	** 	** 	**
> TEL Spa 	*yellow* 	*needs test* 	** 	** 	**
> Burn Box 	*yellow* 	*testing and modifying cvd recipes* 	** 	** 	**
> SEM 4160 	*up* 	** 	** 	** 	**
> FGA2 	*up* 	** 	** 	** 	**
> SiH4 for furnaces 	*on* 	*crossover ok* 	*changeover working well* 
> ** 	**
>

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