Diffusion Morning Report 07/23/12

Ted Berg tberg at stanford.edu
Mon Jul 23 07:17:54 PDT 2012


Good Morning All,
*1.  New Issues:*Epi contactor issues and DCS flow issues
*2.  Leftovers:*No TLC on Thermco 3 and 4,  Thermco 1 low wet ox rate, 
Tylan Poly rewriting recipes
*3.  Resolved*: DCS flowed just fine
					
	Date: 	7/23/12 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	up 	** 	** 	** 	**
Tylan 2 	up 	** 	** 	** 	**
Tylan 3 	up 	** 	** 	** 	**
Tylan 4 	up 	** 	** 	** 	**
Tylan 5-BBr3 	up 	** 	** 	** 	**
Tylan 6-POCl3 	up 	** 	** 	** 	**
Tylan 7-TEOS2 	up 	** 	*14.39/30* 	** 	**
Tylan 8-SiGe 	down 	*waiting for users* 	*3.4/30* 	** 	**
Tylan 9-Poly 	down 	*rewriting recipes* 	*23.7/30* 	** 	**
Tylan 10-Nitride 	up 	** 	*28.5/30* 	** 	**
Tylan 11-LTO 	up 	** 	*25.4/30* 	** 	**
Tylan 12-FGA 	up 	** 	** 	** 	**
Thermco 1 	yellow 	*low oxidation rate* 	** 	** 	*1*
Thermco 2 	up 	** 	** 	** 	**
Thermco 3 	yellow 	*testing TLC* 	** 	** 	**
Thermco4 	yellow 	*no TLC* 	** 	** 	**
Thermco Poly1 	up 	** 	** 	*
* 	**
Thermco Poly2 	up 	** 	** 	** 	**
Thermco Nitride1 	up 	** 	** 	** 	**
Thermco bpsg 	up 	** 	** 	** 	**
AMAT Epi Cham. A 	yellow 	*Contactor open, DCS flow issues* 	** 	** 	*2*
AMAT Epi Cham. B 	down 	** 	** 	** 	**
TEL Spa 	up 	** 	** 	** 	**
Burn Box 	yellow 	*testing and modifying cvd recipes* 	** 	** 	**
SEM 4160 	up 	** 	** 	** 	**
FGA2 	up 	** 	** 	** 	**
SiH4 for furnaces 	on 	*crossover ok* 	*changeover working well* 	** 	**




	

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