Diffusion Morning Report 07/27/12

Ted Berg tberg at stanford.edu
Fri Jul 27 06:19:33 PDT 2012


Good Morning All,
*1.  New Issues: GeH4 for Epi is getting low*
*2.  Leftovers: *No TLC on Thermco 3 and 4,  Thermco 1 low wet ox rate, 
Tylan Poly rewriting recipes,**Alarms for silane, germane, POCl3,Tylan 
Lps and doping tubes down after alarms, epi Intermittent heater 
contactor drops
*3.  Resolved*:

					
	Date: 	7/27/12 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*down* 	*sih4 alarm* 	** 	** 	*1*
Tylan 6-POCl3 	*down* 	*sih4 alarm* 	** 	** 	**
Tylan 7-TEOS2 	*down* 	*sih4 alarm* 	*14.39/30* 	** 	**
Tylan 8-SiGe 	*down* 	*waiting for users* 	*3.4/30* 	** 	**
Tylan 9-Poly 	*down* 	*rewriting recipes* 	*23.7/30* 	** 	**
Tylan 10-Nitride 	*down* 	*sih4 alarm* 	*28.5/30* 	** 	**
Tylan 11-LTO 	*down* 	*sih4 alarm* 	*31.21/30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*yellow* 	*low oxidation rate* 	** 	** 	*2*
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*yellow* 	*testing TLC* 	** 	** 	**
Thermco4 	*yellow* 	*no TLC* 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	*
* 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi Cham. A 	*yellow* 	*intermittent contactor drops-GeH4 is 
getting low* 	** 	** 	**
AMAT Epi Cham. B 	*down* 	** 	** 	** 	**
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*yellow* 	*replacing exhaust duct Monday* 	** 	** 	*1*
SEM 4160 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	*on* 	*crossover ok* 	*changeover working well* 	** 	**


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20120727/3e86d65b/attachment.html>


More information about the diffusion mailing list