From tberg at stanford.edu Fri Jun 1 06:02:39 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 01 Jun 2012 06:02:39 -0700 Subject: Dffusion morning report 06/01/12 Message-ID: <4FC8BD6F.2060504@stanford.edu> Good Morning All, Looking good this morning. 1. *New issues:* Thermco Nitride not venting, Thermco LTO not pumping 2. *Leftovers:* Thermco 3 and 4 no TLC, Tylan burn box issues, 3*Resolved:* BBr3 door close issues Date: 6/1/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *leak resolved-need staff present to run* ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *burn box* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *23.7/30* ** ** Tylan 10-Nitride *up* ** *17.1/30* ** ** Tylan 11-LTO *yellow* ** *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *won't vent* ** ** *1* Thermco bpsg *down* *won't pump down* ** ** *2* AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** *3* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jun 4 06:42:47 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 04 Jun 2012 06:42:47 -0700 Subject: Diffusion Morning Report 06/04/12 Message-ID: <4FCCBB57.4010306@stanford.edu> Good Morning All, Looking good this morning. 1. *New issues:* none over the weekend 2. *Leftovers:* Thermco 3 and 4 no TLC, Thermco BPSG won't pump down, Tylan burn box 3. *Resolved:* Thermco nitride-cleaned gate valve, changed forming gas Date: 6/4/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *leak resolved-need staff present to run* ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *burn box* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *23.7/30* ** ** Tylan 10-Nitride *up* ** *17.1/30* ** ** Tylan 11-LTO *yellow* ** *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* *vents fine-cleaned gate valve* ** ** ** Thermco bpsg *down* *won't pump down* ** ** *1* AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** *2* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jun 5 06:27:32 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 05 Jun 2012 06:27:32 -0700 Subject: Diffusion Morning Report 06/05/12 Message-ID: <4FCE0944.8070506@stanford.edu> Good Morning All, looking good this morning. *1. New issues:* none overnight *2. Leftovers*: Thermco 3 and 4 no Tlc, Tylan burnbox, Thermco bpsg-pull and clean Date: 6/5/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *leak resolved-need staff present to run* ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *burn box* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *23.7/30* ** ** Tylan 10-Nitride *up* ** *17.1/30* ** ** Tylan 11-LTO *yellow* ** *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *tube pull and clean* ** ** *1* AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** *2* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jun 6 06:29:43 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 06 Jun 2012 06:29:43 -0700 Subject: Diffusion Morning Report 06/06/12 Message-ID: <4FCF5B47.4050308@stanford.edu> Good Morning All, looking good this morning. *1. New issues:* none overnight *2. Leftovers*: Thermco 3 and 4 no Tlc, Tylan burnbox, Thermco bpsg-pull and clean Date: 6/6/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *leak resolved-need staff present to run* ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *burn box* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *23.7/30* ** ** Tylan 10-Nitride *up* ** *17.1/30* ** ** Tylan 11-LTO *yellow* ** *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *tube pull and clean-tube out to be cleaned* ** ** *1* AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** *2* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jun 7 06:35:56 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 07 Jun 2012 06:35:56 -0700 Subject: Diffusion Morning Report 06/07/12 Message-ID: <4FD0AE3C.9070502@stanford.edu> Good Morning All, looking good this morning. *1. New issues:* none overnight *2. Leftovers*: Thermco 3 and 4 no Tlc, Tylan Recipe rewrites, Thermco bpsg-pull and clean Date: 6/7/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *leak resolved-need staff present to run* ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *up* ** *17.1/30* ** ** Tylan 11-LTO *yellow* ** *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *tube pull and clean-tube out to be cleaned* ** ** *1* AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** *2* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jun 8 06:12:13 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 08 Jun 2012 06:12:13 -0700 Subject: Diffusion Morning Report 06/08/12 Message-ID: <4FD1FA2D.6060806@stanford.edu> Good Morning All, Looking good this morning. *1. New issues:* Tylan LTO low dep *2. Leftovers:* Thermco BPSG going back together, Tylan Poly-rewriting recipes, Thermco 3 and 4 no Tlc *3. Resolved:*Replaced epi vacuum wand holder Date: 6/8/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *leak resolved-need staff present to run* ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *up* ** *17.1/30* ** ** Tylan 11-LTO *yellow* *low dep* *9.7./30* ** *2* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *tube pull and clean-tube out to be cleaned* ** ** *1* AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** *3* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jun 11 06:40:58 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 11 Jun 2012 06:40:58 -0700 Subject: Diffusion Morning Report 06/11/12 Message-ID: <4FD5F56A.2000204@stanford.edu> Good Morning All, Looking good this morning. *1. New issues:* Tylan nitride pressure rising while running *2. Leftovers: *Thermco BPSG tube pull-broken TC, Tylan Poly rewriting recipes, Thermco 3 and4 no TLC *3. Resolved:* Tylan LTO replaced broken injector Date: 6/11/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *leak resolved-need staff present to run* ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *yellow* *pressure increasing while running* *17.1/30* ** *1* Tylan 11-LTO *yellow* *replaced injector* *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *tube pull and clean-broken TC* ** ** *2* AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jun 12 06:41:52 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 12 Jun 2012 06:41:52 -0700 Subject: Diffusion Morning Report 06/12/12 Message-ID: <4FD74720.90600@stanford.edu> Good Morning All, Looking good this morning. *1. New issues:* changing forming gas *2. Leftovers:* Thermco 3 and 4 no TLC, Thermco BPSG-TC ordered tube change,Tylan Poly rewriting recipes, Tylan Nitride pressure rise-oil changed needs testing *3. Resolved:* Tylan Nitride maybe? Date: 6/12/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *leak resolved-need staff present to run* ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** *2* Tylan 10-Nitride *yellow* *oil changed -testing* *17.1/30* ** ** Tylan 11-LTO *yellow* ** *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *tube pull and clean- TC ordered* ** ** *1* AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jun 13 07:17:39 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 13 Jun 2012 07:17:39 -0700 Subject: Diffusion Morning Report 06/13/12 Message-ID: <4FD8A103.2090709@stanford.edu> Good Morning All, Looking good this morning. *1. New Problems:* particles on TEOS *2. Leftovers:* No TLC on Thermco 3 and 4, Broken injector on Tylan LTO, Tube change on THermco BPSG-Profile TC broken-on order i hope, Tylan Poly -rewriting recipes *3. Resolved:* Forming gas changed, Tylan Nitride is OK now Date: 6/13/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *leak resolved-need staff present to run* ** ** ** Tylan 7-TEOS2 *yellow* *particles* *14.39/30* ** *2* Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *up* *oil changed -ran OK* *17.1/30* ** ** Tylan 11-LTO *down* *broken injector* *9.7./30* ** *1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *tube pull and clean- TC ordered* ** ** *3* AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jun 14 07:20:39 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 14 Jun 2012 07:20:39 -0700 Subject: Diffusion Morning Report 06/14/12 Message-ID: <4FD9F337.8070405@stanford.edu> Good Morning All, Looking good this morning. *1. New issues: *Epi is down for pinholes in exhaust line *2. Leftovers:* Thermco 3 and 4 no TLC,TEOS particles,Tylan Poly-rewriting recipes, Tylan LTO needs test after injector replacement, THermco BPSG TC on order *3. Resolved:* Tylan LTO injectors replaced Date: 6/15/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *leak resolved-need staff present to run* ** ** ** Tylan 7-TEOS2 *yellow* *particles* *14.39/30* ** *3* Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *up* ** *17.1/30* ** ** Tylan 11-LTO *yellow* *injector changed needs test* *9.7./30* ** *2* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *tube pull and clean- TC ordered* ** ** *4* AMAT Epi Cham. A *down* *pinholes in exhaust* ** ** *1* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jun 15 06:16:17 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 15 Jun 2012 06:16:17 -0700 Subject: Diffusion Morning Report 06/15/12 Message-ID: <4FDB35A1.6060700@stanford.edu> Good Morning All,(can i say that) Looking better than yesterday *1. New issues: *none overnight *2. Leftovers:* Thermco 3 and 4 no TLC,TEOS particles,Tylan Poly-rewriting recipes, THermco BPSG TC on order *3. Resolved:* Tylan LTO injectors replaced and running,Epi Exhaust line replaced Date: 6/15/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *leak resolved-need staff present to run* ** ** ** Tylan 7-TEOS2 *yellow* *particles* *14.39/30* ** *1* Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *up* ** *17.1/30* ** ** Tylan 11-LTO *yellow* *injector changed users running* *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *tube pull and clean- TC ordered* ** ** ** AMAT Epi Cham. A *up* *exhaust line replaced* ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** *2* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jun 18 06:51:10 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 18 Jun 2012 06:51:10 -0700 Subject: Diffusion Morning Report 06/18/12 Message-ID: <4FDF324E.3000305@stanford.edu> Good Morning All, *1. New issues:* Low oxidation rate on Thermco 1 *2. Leftovers: *No TLC on Thermco 3 and 4, TC on Thermco BPSG, Poly recipes, Particles on TEOS Date: 6/18/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *leak resolved-need staff present to run* ** ** ** Tylan 7-TEOS2 *yellow* *particles* *14.39/30* ** *2* Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** *4* Tylan 10-Nitride *up* ** *17.1/30* ** ** Tylan 11-LTO *up* ** *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** *1* Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *tube pull and clean- TC ordered* ** ** *3* AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** *4* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jun 19 06:30:54 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 19 Jun 2012 06:30:54 -0700 Subject: Diffusion morning Report 06/19/12 Message-ID: <4FE07F0E.4030109@stanford.edu> Good Morning All, 1. New issues: HCL for Epi-looking into issue 2. Leftovers: No TLC to Thermco 3 and 4, Thermco BPSG TC on order, Tylan Poly rewriting recipes, Thermco 1 low oxidation?, TEOS particles, FGA2 broken pull rod again-third in a week!!! Date: 6/19/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *leak resolved-need staff present to run* ** ** ** Tylan 7-TEOS2 *yellow* *particles* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** *4* Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** *3* Tylan 10-Nitride *up* ** *17.1/30* ** ** Tylan 11-LTO *up* ** *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *tube pull and clean- TC ordered* ** ** ** AMAT Epi Cham. A *down* *HCL issues* ** ** *1* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *yellow* *pull rod broken again* ** ** *2* SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jun 20 07:28:37 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 20 Jun 2012 07:28:37 -0700 Subject: Diffusion Morning Report 06/20/12 Message-ID: <4FE1DE15.5020100@stanford.edu> Good Morning All, * 1. New issues: *None *2. Leftovers:* No TLC on Thermco 3 and 4, TEOS particles, Thermco BPSG TC on order, Thermco 1 low wet ox rate, Tylan Poly rewriting recipes * 3. Resolved:* HCL for Epi replaced, Pull rods for FGA2 replaced Date: 6/20/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *leak resolved-need staff present to run* ** ** ** Tylan 7-TEOS2 *yellow* *particles* *14.39/30* ** *2* Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *up* ** *17.1/30* ** ** Tylan 11-LTO *up* ** *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** *1* Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *tube pull and clean- TC ordered* ** ** *3* AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** *4* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jun 21 06:15:07 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 21 Jun 2012 06:15:07 -0700 Subject: Diffusion Morning Report 06/21/12 Message-ID: <4FE31E5B.4040807@stanford.edu> Good Morning All, * 1. New issues: *100 PPM B2H6 is low Cylinder is on order *2. Leftovers:* No TLC on Thermco 3 and 4, TEOS particles, Thermco BPSG TC on order, Thermco 1 low wet ox rate, Tylan Poly rewriting recipes * 3. Resolved:* Date: 6/21/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *leak resolved-need staff present to run* ** ** ** Tylan 7-TEOS2 *yellow* *particles* *14.39/30* ** *2* Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *up* ** *17.1/30* ** ** Tylan 11-LTO *up* ** *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** *1* Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *tube pull and clean- TC ordered* ** ** *3* AMAT Epi Cham. A *yellow * *100 PPM B2H6 is low-cylinder ordered * ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** *4* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jun 22 06:08:19 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 22 Jun 2012 06:08:19 -0700 Subject: Diffusion Morning Report 06/22/12 Message-ID: <4FE46E43.1000903@stanford.edu> Good Morning All, * 1. New issues: *none overnight *2. Leftovers:* No TLC on Thermco 3 and 4, TEOS particles, Thermco BPSG TC on order, Thermco 1 low wet ox rate, Tylan Poly rewriting recipes * 3. Resolved:* Date: 6/22/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *leak resolved-need staff present to run* ** ** ** Tylan 7-TEOS2 *yellow* *particles* *14.39/30* ** *2* Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *up* ** *17.1/30* ** ** Tylan 11-LTO *up* ** *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** *1* Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *tube pull and clean- TC ordered* ** ** *3* AMAT Epi Cham. A *yellow* *B2H6 is low* ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** *4* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jun 25 07:17:07 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 25 Jun 2012 07:17:07 -0700 Subject: Diffusion Morning Report 06/25/12 Message-ID: <4FE872E3.1060407@stanford.edu> Good Morning All, *1. New issues:* No Silane-problems with fire eyes *2. Leftovers:* No TLC on Thermco 3 and 4, TEOS particles, Thermco BPSG TC on order, Thermco 1 low wet ox rate, Tylan Poly rewriting recipes *3. Resolved:* Date: 6/25/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *leak resolved-need staff present to run* ** ** ** Tylan 7-TEOS2 *yellow* *particles* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *up* ** *17.1/30* ** ** Tylan 11-LTO *down* *tgo issues* *9.7./30* ** *1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *down* *tgo issues* ** * * *1* Thermco Poly2 *down* *tgo issues* ** ** *1* Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *tube pull and clean- TC ordered* ** ** ** AMAT Epi Cham. A *yellow* *B2H6 is low, no silane* ** ** *1* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jun 26 06:26:49 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 26 Jun 2012 06:26:49 -0700 Subject: Diffusion Morning Report 06/26/12 Message-ID: <4FE9B899.2020907@stanford.edu> Good Morning All, *1. New issues:* none overnight *2. Leftovers:* No TLC on Thermco 3 and 4, TEOS particles, Thermco BPSG TC on order, Thermco 1 low wet ox rate, Tylan Poly rewriting recipes *3. Resolved: *Silanes turned back on after TGO issues resolved, HCL back on, burnbox back on Date: 6/26/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *leak resolved-need staff present to run* ** ** ** Tylan 7-TEOS2 *yellow* *particles* *14.39/30* ** * 2* Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *up* ** *17.1/30* ** ** Tylan 11-LTO *up* ** *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** * 1* Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *tube pull and clean- TC ordered* ** ** ** AMAT Epi Cham. A *yellow* *B2H6 is low* ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jun 27 06:29:31 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 27 Jun 2012 06:29:31 -0700 Subject: Diffusion Morning Report 06/27/12 Message-ID: <4FEB0ABB.6020707@stanford.edu> Good Morning All, *1. New issues:* none overnight *2. Leftovers:* No TLC on Thermco 3 and 4, TEOS particles, Thermco BPSG TC on order, Thermco 1 low wet ox rate, Tylan Poly rewriting recipes *3. Resolved: * Date: 6/27/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *leak resolved-need staff present to run* ** ** ** Tylan 7-TEOS2 *yellow* *particles* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *up* ** *17.1/30* ** ** Tylan 11-LTO *up* ** *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *tube pull and clean- TC ordered* ** ** ** AMAT Epi Cham. A *yellow* *B2H6 is low* ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jun 28 06:37:53 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 28 Jun 2012 06:37:53 -0700 Subject: Difffusion Morning Report 06/28/12 Message-ID: <4FEC5E31.8050508@stanford.edu> Good Morning All, *1. New issues:* none overnight *2. Leftovers:* No TLC on Thermco 3 and 4, TEOS particles, Thermco BPSG TC on order, Thermco 1 low wet ox rate, Tylan Poly rewriting recipes *3. Resolved:* Silane for Tylans and Thermco LP switched to second cylinder Date: 6/28/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *leak resolved-need staff present to run* ** ** ** Tylan 7-TEOS2 *yellow* *particles* *14.39/30* ** *1* Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *up* ** *17.1/30* ** ** Tylan 11-LTO *up* ** *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** *2* Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *tube pull and clean- TC ordered* ** ** ** AMAT Epi Cham. A *yellow* *B2H6 is low* ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** *3* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jun 29 07:10:26 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 29 Jun 2012 07:10:26 -0700 Subject: Diffusion Morning Report 06/29/12 Message-ID: <4FEDB752.1030808@stanford.edu> Good Morning All, *1. New issues:*SEM4160 Bent load Rod *2. Leftovers:* No TLC on Thermco 3 and 4, TEOS particles, Thermco 1 low wet ox rate, Tylan Poly rewriting recipes *3. Resolved:* Thermco BPSG TC is here installing, POCL3 flask changed Date: 6/29/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *need staff present to run-flask changed* ** ** ** Tylan 7-TEOS2 *yellow* *particles* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *up* ** *17.1/30* ** ** Tylan 11-LTO *up* ** *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low oxidation rate* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *down* *TC is here installing* ** ** *1* AMAT Epi Cham. A *yellow* *B2H6 is low* ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: