From tberg at stanford.edu Thu Mar 1 11:21:52 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 01 Mar 2012 11:21:52 -0800 Subject: Diffusion Morning Report 03/01/12 Message-ID: <4F4FCC50.8000007@stanford.edu> Good Morning All, Looking good this morning. TEL is back ready for a test. Thermco 2 is still having gas flow issues-another gas board is on its way. Nitrides still no DCS-hopefully next week No other major issues at this time. Not too much progress on Epi. Date: 3/1/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *yellow* *needs test* *3.76/30* ** ** Tylan 9-Poly *up* ** *11.74/30* ** ** Tylan 10-Nitride *down* *starting up,,DCS off* *0/30* ** ** Tylan 11-LTO *yellow* *thickness* *17.74/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *down* *gas board changed still gas issues* ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *starting up,,DCS off* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up, second panel hung and tied in Leak checking, final testing * ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Mar 2 06:38:11 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 02 Mar 2012 06:38:11 -0800 Subject: Diffusion Morning Report 03/02/12 Message-ID: <4F50DB53.8000002@stanford.edu> Good Morning All, Looking good this morning. Epi is moving ahead again. Tylan 2 had MFS alarms. Thermco 2 waiting for replacement gas board. No other major issues at this time. Date: 3/2/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *MFS alarms* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *yellow* *needs test* *3.76/30* ** ** Tylan 9-Poly *up* ** *11.74/30* ** ** Tylan 10-Nitride *down* *starting up,,DCS off* *0/30* ** ** Tylan 11-LTO *yellow* *thickness* *17.74/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *down* *gas board changed still gas issues* ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *starting up,,DCS off* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up,Leak testing and checkout* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Mar 5 07:05:09 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 05 Mar 2012 07:05:09 -0800 Subject: Diffusion Morning Report 03/05/12 Message-ID: <4F54D625.9000907@stanford.edu> Good Morning All, Looking good this morning. Several issues with new sensor settings causing alarms-Checking with manufacturer. Epi leak checks are looking good-hopefully gases on this week. Thermco 2 still having GAS flow issues. MFS alarms on Tylan 2. No other major issues at this time. Date: 3/5/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *MFS alarms* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *down* *tgo sensor issue* ** ** ** Tylan 6-POCl3 *down* *tgo sensor issue* ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *yellow* *needs test* *3.76/30* ** ** Tylan 9-Poly *up* ** *11.74/30* ** ** Tylan 10-Nitride *down* *starting up,,DCS off* *0/30* ** ** Tylan 11-LTO *yellow* *thickness* *17.74/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *down* *gas board changed still gas issues* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *starting up,,DCS off* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up,Leak testing and checkout* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Mar 6 07:17:09 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 06 Mar 2012 07:17:09 -0800 Subject: Diffusion Morning Report 03/06/12 Message-ID: <4F562A75.2010706@stanford.edu> Good Morning All, Looking good this morning. Trying to sort out TGO issues with POCl3 and BBr3 and Tlc. Epi gases are in leak check. Install progressing. Thermco 2 H2 flow issues-working with FS. Some Lps have slight thickness issues. No other problems at this time. Date: 3/6/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *down* *tgo sensor issue* ** ** ** Tylan 6-POCl3 *down* *tgo sensor issue* ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *yellow* *needs test* *3.4/30* ** ** Tylan 9-Poly *up* ** *11.9/30* ** ** Tylan 10-Nitride *down* *starting up,,DCS off* *0/30* ** ** Tylan 11-LTO *yellow* *thickness* *22.84/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *down* *gas board changed still gas issues* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *starting up,,DCS off* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up,Leak testing and checkout* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Mar 7 07:50:56 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 07 Mar 2012 07:50:56 -0800 Subject: Diffusion Morning report 03/07/12 Message-ID: <4F5783E0.2090104@stanford.edu> Good Morning All, Looking OK this morning. DCS is back on and Nitrides are being tested. Corroded duct in POCl3 bank is being replaced. Epi checking out new abatement. Thermco 2 waiting FS response on boards. POCl3 tube being cleaned. Several LPs have slight thickness issues. No other issue at this time. Date: 3/7/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *down* *tgo sensor issue* ** ** ** Tylan 6-POCl3 *down* *tgo sensor issue-tube clean* ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *yellow* *needs test* *3.4/30* ** ** Tylan 9-Poly *up* ** *11.9/30* ** ** Tylan 10-Nitride *down* *testing after DCS on* *0/30* ** ** Tylan 11-LTO *yellow* *thickness* *22./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *down* *gas board changed still gas issues* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *testing after DCS on* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up,Leak testing and checkout* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Mar 8 11:56:43 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 08 Mar 2012 11:56:43 -0800 Subject: Diffusion Morning Report 03/08/12 Message-ID: <4F590EFB.1070100@stanford.edu> Good Morning All, Looking good this morning. Ran both POCl3 and BBr3 with no problems-Waiting for decision on TGO alarm set. Epi progress-working on scrubber and burn box. Thermco 2 still has H2 flow issues-changed gas control and gas interface boards. TEL needs a test. Some LPs have slight thickness issues. No other major problems at this time. Date: 3/8/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *down* *tgo sensor issue-ran BBr3 run* ** ** ** Tylan 6-POCl3 *down* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *yellow* *needs test* *3.4/30* ** ** Tylan 9-Poly *up* ** *11.9/30* ** ** Tylan 10-Nitride *up* *test good* *0/30* ** ** Tylan 11-LTO *yellow* *thickness* *22./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *down* *gas board changed still gas issues* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *testing after DCS on* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up,Leak testing and checkout* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Mar 9 10:49:50 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 09 Mar 2012 10:49:50 -0800 Subject: Diffusion Morning report 03/09/12 Message-ID: <4F5A50CE.3010406@stanford.edu> Good Morning All, Looking OK this morning. Had a TGO alarm while cleaning the Nitride gate valve. it was the POCl3 sensor, no tubes were running. Thermco Nitride down for gate valve repair. Thermco 2 still has H2 problems. TEL needs a test. No other major issues at this time. Date: 3/9/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** Tylan 2 *up* ** ** ** Tylan 3 *up* ** ** ** Tylan 4 *up* ** ** ** Tylan 5-BBr3 *down* *tgo sensor issue-ran BBr3 run* ** ** Tylan 6-POCl3 *down* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** Tylan 8-SiGe *yellow* *needs test* *3.4/30* ** Tylan 9-Poly *up* ** *11.9/30* ** Tylan 10-Nitride *up* *test good* *0/30* ** Tylan 11-LTO *yellow* *thickness* *22./30* ** Tylan 12-FGA *up* ** ** ** Thermco 1 *up* ** ** ** Thermco 2 *down* *gas board changed still gas issues* ** ** Thermco 3 *yellow* *testing TLC* ** ** Thermco4 *up* ** ** ** Thermco Poly1 *up* ** ** * * Thermco Poly2 *up* ** ** ** Thermco Nitride1 *down* *not venting* ** ** Thermco bpsg *up* ** ** ** AMAT Epi *down* *starting up,Leak testing and checkout* ** ** TEL Spa *yellow* *needs test* ** ** Burn Box *up* ** ** ** SEM 4160 *up* ** ** ** ZYGO *up* ** ** ** FGA2 *up* ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Mar 12 06:29:08 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 12 Mar 2012 06:29:08 -0700 Subject: Diffusion Morning Report 03/12/12 Message-ID: <4F5DFA24.3070802@stanford.edu> Good Morning All, Looking good this morning. Still trying to decide what to do with POCl3 and BBr3 furnaces and sensors. Epi 2 chamber-working on abatement. Thermco 2 wrote PO for FS assistance. Thermco Nitride -cleaned gate valve-needs test. TEL needs a test. SEM has handling issue. No other major issues at this time. Date: 3/12/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *down* *tgo sensor issue-ran BBr3 run* ** ** ** Tylan 6-POCl3 *down* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *yellow* *needs test* *3.4/30* ** ** Tylan 9-Poly *up* ** *11.9/30* ** ** Tylan 10-Nitride *up* ** *0/30* ** ** Tylan 11-LTO *yellow* *thickness* *22./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *down* *gas board changed still gas issues* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *rebuilt gate valve needs test* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up,Leak testing and checkout* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *yellow* *handling issue* ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Mar 13 10:24:57 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 13 Mar 2012 10:24:57 -0700 Subject: Diffusion Morning Report 03/13/12 Message-ID: <4F5F82E9.2080604@stanford.edu> Good Morning All, looking good this morning. No new issues Leftovers:Thermco Nitride has a leak. FS to be here today to look at Thermco 2. Tel needs a test. POCl3 and BBr3 still waiting for a decision on level set. Epi second chamber abatement issues. No other major issues at this time. Date: 3/13/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *down* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *down* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *yellow* *needs test* *3.4/30* ** ** Tylan 9-Poly *up* ** *11.9/30* ** ** Tylan 10-Nitride *up* ** *0/30* ** ** Tylan 11-LTO *yellow* *thickness* *22./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *down* *gas board changed still gas issues* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *leak* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up,Leak testing and checkout* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Mar 14 06:46:22 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 14 Mar 2012 06:46:22 -0700 Subject: Diffusion Morning Report 03/14/12 Message-ID: <4F60A12E.4090901@stanford.edu> Good Morning All, Looking good this morning. No new issues. Leftovers: Thermco 2 finally functional, POCl3 and BBr3 waiting decision on level settings. Epi2 has abatement issues on new chamber. Thermco Nitride has a small leak.TEL needs a test. No other major problems at this time. Date: 3/14/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *down* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *down* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *yellow* *needs test* *3.4/30* ** ** Tylan 9-Poly *up* ** *11.9/30* ** ** Tylan 10-Nitride *up* ** *0/30* ** ** Tylan 11-LTO *yellow* *thickness* *22./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *testing after repairt* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *leak* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up,scrubber prob on Chamber 2* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Mar 15 12:58:45 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 15 Mar 2012 12:58:45 -0700 Subject: furnaces shut down tomorrow morning Message-ID: <4F6249F5.7040402@stanford.edu> Hello, *_All of diffusion_* will be shut down tomorrow morning from 6:00am until around 11:30 am for tie ins of high purity N2 and CDA for the new nanosynthesis lab. I have reserved all of the tools except tylan 1 which had reservations. I do not advise running during this time. Thanks for your cooperation.Ted -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Mar 16 07:46:06 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 16 Mar 2012 07:46:06 -0700 Subject: Diffusion Morning Report 03/16/12 Message-ID: <4F63522E.2030403@stanford.edu> Good Morning All, All of Diffusion is down for tie ins to New nano lab. Epi still has scrubber issues. Teos is down for a leak as is Thermco nitride. Thermco 1 and 2 yellow no TLC. TEL still needs a test. no other major issues at this time. Date: 3/16/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *down* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *down* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *yellow* *needs test* *3.4/30* ** ** Tylan 9-Poly *up* ** *11.9/30* ** ** Tylan 10-Nitride *up* ** *0/30* ** ** Tylan 11-LTO *yellow* *thickness* *22./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* ** ** ** ** Thermco 2 *yellow * *testing after repairt* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *leak* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up,scrubber prob on Chamber 2* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Mon Mar 19 13:34:19 2012 From: maurice at stanford.edu (maurice stevens) Date: Mon, 19 Mar 2012 13:34:19 -0700 Subject: Diffusion Morning Report 03/19/12 In-Reply-To: <4F63522E.2030403@stanford.edu> References: <4F63522E.2030403@stanford.edu> Message-ID: <4F67984B.5030406@stanford.edu> Sorry for getting this out late. Ted & Ray are out today > Good Morning All, > Epi2 ChamberA leak located. Teos is down for a leak as is Thermco > nitride. Thermco 1 and 2 yellow no TLC. Tylan2 has a TC issue. > > > Date: 3/19/12 THICKNESS-Change at Priority > Tube Name/Number Status > Tylan 1 *up* ** ** ** ** > Tylan 2 *down* > * TC issue > * ** ** ** > Tylan 3 *up* ** ** ** ** > Tylan 4 *up* ** ** ** ** > Tylan 5-BBr3 *down* *tgo sensor issue-ran BBr3 run-observed* ** > ** ** > Tylan 6-POCl3 *down* *tgo sensor issue tube reinstalled-ran POCl3 > run* ** ** ** > Tylan 7-TEOS2 *up* ** *14.39/30* ** ** > Tylan 8-SiGe *yellow* *needs test* *3.4/30* ** ** > Tylan 9-Poly *up* ** *11.9/30* ** ** > Tylan 10-Nitride *up* ** *0/30* ** ** > Tylan 11-LTO *yellow* *pump lights not on display* > *26./30* ** ** > Tylan 12-FGA *up* ** ** ** ** > Thermco 1 *yellow* * No TLC > * ** ** ** > Thermco 2 *yellow > * *No TLC > * ** ** ** > Thermco 3 *yellow* *testing TLC* ** ** ** > Thermco4 *up* ** ** ** ** > Thermco Poly1 *up* ** ** * > * ** > Thermco Poly2 *up* ** ** ** ** > Thermco Nitride1 *yellow* *leak* ** ** ** > Thermco bpsg *up* ** ** ** ** > AMAT Epi *down* *starting up,scrubber prob on Chamber 2/Chamer 1 leak > * ** ** ** > TEL Spa *yellow* *needs test* ** ** ** > Burn Box *up* ** ** ** ** > SEM 4160 *up* ** ** ** ** > ZYGO *up* ** ** ** ** > FGA2 *up* ** ** ** ** > SiH4 for furnaces *on* *crossover ok* *changeover working well* > ** ** > > -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Tue Mar 20 07:18:12 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Tue, 20 Mar 2012 07:18:12 -0700 Subject: Diffusion Morning Report Message-ID: <4F6891A4.9070905@stanford.edu> Good Morning All, Ted is out this morning. Epi still has scrubber issues. Teos is down for a leak as is Thermco nitride. Thermco 1 and 2 yellow no TLC. TEL still needs a test. no other major issues at this time. Date: 3/20/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *down* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *down* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* * leaking* *14.39/30* ** ** Tylan 8-SiGe *yellow* *needs test* *3.4/30* ** ** Tylan 9-Poly *up* ** *11.9/30* ** ** Tylan 10-Nitride *up* ** *0/30* ** ** Tylan 11-LTO *yellow* *thickness* *22./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* ** ** ** ** Thermco 2 *yellow * *testing after repairt* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *leak* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up,scrubber prob on Chamber 2* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Wed Mar 21 10:16:24 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Wed, 21 Mar 2012 10:16:24 -0700 Subject: Diffusion Morning Report Message-ID: <4F6A0CE8.8060100@stanford.edu> Good Morning All, Ted is out this morning. Epi still has scrubber issues. Teos is down for a leak as is Thermco nitride. Thermco 1 and 2 yellow no TLC. TEL still needs a test. no other major issues at this time. Date: 3/21/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *down* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *down* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* * leaking* *14.39/30* ** ** Tylan 8-SiGe *yellow* *needs test* *3.4/30* ** ** Tylan 9-Poly *up* ** *11.9/30* ** ** Tylan 10-Nitride *up* ** *0/30* ** ** Tylan 11-LTO *yellow* *thickness* *22./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* ** ** ** ** Thermco 2 *yellow * *testing after repairt* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *leak* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up,scrubber prob on Chamber 2* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Mar 22 06:26:24 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 22 Mar 2012 06:26:24 -0700 Subject: Diffusion Morning Report 02/22/12 Message-ID: <4F6B2880.3020504@stanford.edu> Good Morning All, Looking OK this morning. New issues: broken loader cable on Tylan 2. Carryovers: Several furnaces with leaks.Thermco 1 and 2 no TLC> Epi startup underway.TEL still needs a test. No other major issues at this time. Date: 3/22/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *no oxidation* ** ** ** Tylan 2 *down* *broken loader cable* ** ** ** Tylan 3 *up* *loader issue* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *leak* *14.39/30* ** ** Tylan 8-SiGe *down* *leak* *3.4/30* ** ** Tylan 9-Poly *up* ** *11.9/30* ** ** Tylan 10-Nitride *up* ** *0/30* ** ** Tylan 11-LTO *yellow* *thickness* *22./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *no tlc* ** ** ** Thermco 2 *yellow* *no tlc* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *leak* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up,scrubber prob on Chamber 2* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Mar 23 07:22:07 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 23 Mar 2012 07:22:07 -0700 Subject: Diffusion Morning Report Message-ID: <4F6C870F.80309@stanford.edu> Good Morning All, Ted is out today Looking OK this morning. Tube 6 shifted back door flag position off. . Carryovers: Several furnaces with leaks.Thermco 1 and 2 no TLC> Epi startup underway.TEL still needs a test. No other major issues at this time. Date: 3/23/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *no oxidation* ** ** ** Tylan 2 *yellow* * * ** ** ** Tylan 3 *up* *loader issue* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *down* *tgo sensor issue tube needs reinstalled-ran POCl3 run* ** ** Tylan 7-TEOS2 *down* *door seal needs assist to seal* *14.39/30* ** ** Tylan 8-SiGe *down* *leak* *3.4/30* ** ** Tylan 9-Poly *up* ** *11.9/30* ** ** Tylan 10-Nitride *up* ** *0/30* ** ** Tylan 11-LTO *yellow* *thickness* *22./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *no tlc* ** ** ** Thermco 2 *yellow* *no tlc* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *leak* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up,scrubber prob on Chamber 2* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Mar 26 07:25:30 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 26 Mar 2012 07:25:30 -0700 Subject: Diffusion Morning Report 03/26/12 Message-ID: <4F707C5A.8000008@stanford.edu> Good Morning All, Looking OK this morning. New issues:TEOS mfs errors, SIGe down for a leak, Operator Locked up computer on Thermco 2 bank. Leftover issues: loader issues on Tylan 3, Thermco 1 and 2 no TLC. No other major issues at this time. Date: 3/26/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *no oxidation* ** ** ** Tylan 2 *yellow* *needs qual* ** ** ** Tylan 3 *up* *loader issue* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *mfs error* *14.39/30* ** ** Tylan 8-SiGe *down* *leak* *3.4/30* ** ** Tylan 9-Poly *up* ** *11.9/30* ** ** Tylan 10-Nitride *up* ** *0/30* ** ** Tylan 11-LTO *yellow* *thickness* *22./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *no tlc* ** ** ** Thermco 2 *yellow* *no tlc* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *leak* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up,scrubber prob on Chamber 2* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Mar 27 07:21:25 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 27 Mar 2012 07:21:25 -0700 Subject: Diffusion Morning report 03/27/12 Message-ID: <4F71CCE5.3060007@stanford.edu> Good Morning All, Looking OK this morning. New issues:-B2H6 regulator problems Thermco Polys-ordering Regulator Left overs: Thermcos TLC problems, Thermco Nitride leak, SiGe leak, Epi woking on startup chamber 2. No other major issues at this time. Date: 3/27/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs qual* ** ** *2* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *mfs error* *14.39/30* ** ** Tylan 8-SiGe *down* *leak-broken tube* *3.4/30* ** *1* Tylan 9-Poly *up* ** *11.9/30* ** ** Tylan 10-Nitride *up* ** *0/30* ** ** Tylan 11-LTO *yellow* *thickness* *22./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *no tlc* ** ** ** Thermco 2 *yellow* *no tlc* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *yellow* *no B2H6* ** * * * 4 * Thermco Poly2 *yellow* *no B2H6* ** ** ** Thermco Nitride1 *yellow* *leak waiting for o-rings* ** ** *3* Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up,scrubber prob on Chamber 2* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Mar 28 06:11:25 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 28 Mar 2012 06:11:25 -0700 Subject: Diffusion Morning Report 03/28/12 Message-ID: <4F730DFD.6050807@stanford.edu> Good Morning All, Looking OK this morning- no new issues. Leftovers: Reg for B2 H6 ordered, Thermco 1and 2 TLC issues, Thermco Nitride waiting for orings,POCl3 still running only when staff present, SIGe pump out for repair,Epi second chamber in progress. No other major issues at this time. Date: 3/28/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs qual* ** ** *2* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *mfs error* *14.39/30* ** ** Tylan 8-SiGe *down* *broken tube-bad pump-out for repair* *3.4/30* ** ** Tylan 9-Poly *up* ** *11.9/30* ** ** Tylan 10-Nitride *up* ** *0/30* ** ** Tylan 11-LTO *yellow* *thickness* *22./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *no tlc* ** ** ** Thermco 2 *yellow* *no tlc* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *up* ** ** ** *1* Thermco Poly1 *yellow* *no B2H6-reg ordered* ** * * ** Thermco Poly2 *yellow* *no B2H6-reg ordered* ** ** ** Thermco Nitride1 *yellow* *leak waiting for o-rings* ** ** *3* Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up,scrubber prob on Chamber 2* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Thu Mar 29 07:22:24 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Thu, 29 Mar 2012 07:22:24 -0700 Subject: Diffusion Morning Report Message-ID: <4F747020.2000006@stanford.edu> Good Morning All, Ted is out today. Looking OK this morning- no new issues. Leftovers: Reg for B2 H6 ordered, Thermco 1and 2 TLC issues, Thermco Nitride waiting for orings, POCl3 still running only when staff present, SIGe pump out for repair,Epi second chamber in progress. No other major issues at this time. Date: 3/29/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* * * ** ** * * Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *up* * * *14.39/30* ** ** Tylan 8-SiGe *down* *broken tube-bad pump-out for repair* *0/30* ** ** Tylan 9-Poly *up* ** *11.9/30* ** ** Tylan 10-Nitride *up* ** *0/30* ** ** Tylan 11-LTO *yellow* *thickness* *22./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *no tlc* ** ** ** Thermco 2 *yellow* *no tlc* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *up* ** ** ** *1* Thermco Poly1 *yellow* *no B2H6-reg ordered* ** * * ** Thermco Poly2 *yellow* *no B2H6-reg ordered* ** ** ** Thermco Nitride1 *yellow* *leak waiting for o-rings* ** ** *2 * Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up,scrubber prob on Chamber 2* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Mar 30 06:56:44 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 30 Mar 2012 06:56:44 -0700 Subject: Diffusion Morning Report Message-ID: <4F75BB9C.3070800@stanford.edu> Good Morning All, Ted is out today. Looking OK this morning- no new issues. Leftovers: Reg for B2 H6 ordered, Thermco 1and 2 TLC issues, Thermco Nitride waiting for orings, POCl3 still running only when staff present, SIGe pump out for repair,Epi second chamber in progress. No other major issues at this time. Date: 3/30/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* * * ** ** * * Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *up* * * *14.39/30* ** ** Tylan 8-SiGe *down* *broken tube-bad pump-out for repair* *0/30* ** ** Tylan 9-Poly *up* ** *11.9/30* ** ** Tylan 10-Nitride *up* ** *0/30* ** ** Tylan 11-LTO *yellow* *thickness* *22./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *no tlc* ** ** ** Thermco 2 *yellow* *no tlc* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *up* ** ** ** * * Thermco Poly1 *yellow* *no B2H6-reg ordered* ** * * ** Thermco Poly2 *yellow* *no B2H6-reg ordered* ** ** ** Thermco Nitride1 *yellow* *leak waiting for o-rings* ** ** *1 * Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *starting up,scrubber prob on Chamber 2* ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** ZYGO *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** -------------- next part -------------- An HTML attachment was scrubbed... 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